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博碩士論文 etd-0712102-165113 詳細資訊
Title page for etd-0712102-165113
論文名稱
Title
平衡式元件之向量網路分析儀量測技術
Measurement of Balanced Devices Using Vector Network Analyzers
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
68
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2002-07-04
繳交日期
Date of Submission
2002-07-12
關鍵字
Keywords
平衡式元件、散射參數、校正
balanced devices, s-parameters, calibration
統計
Statistics
本論文已被瀏覽 5920 次,被下載 12580
The thesis/dissertation has been browsed 5920 times, has been downloaded 12580 times.
中文摘要
本論文提出一種能使用雙埠向量網路分析儀精確量測平衡式元件的方法,結合了重新正規化法及混合模態轉換法這兩種技術,可以用在同軸元件量測上。先以模擬的方式分別驗證上述兩種技術並確認方法是可行的之後,再實際以FR4基板製作一Marchand Balun並且使用本論文發展的系統進行量測。此系統純粹以軟體計算的方式求取平衡式元件特性,而不需要增加額外的硬體設備,此外,配合微波開關的使用亦能應用此方法到晶圓上元件之量測。
Abstract
This thesis presented a complete measurement method for accurate characterization of balanced devices using two-port vector network analyzer. Combining renormalization and mixed-mode transformation techniques, this method is good for coaxial components. At first, the feasibility of the method was confirmed with the help of ADS simulation. Then a real example of Marchand balun fabricated on FR4 substrate was measured with calibrated mixed-mode S-parameters that have been further verified by full-wave simulations. The measurement system developed based on this method does not require any additional hardware to the vector network analyzer. This system can be also applied to the measurement of on-wafer components with the help of some microwave switches.
目次 Table of Contents
目錄 I
圖表目錄 II
第一章 緒論 1
第二章 多埠校正理論 4
2.1 簡介 4
2.2 雙埠校正 7
2.2.1 SOLT 8
2.2.2 TRL 9
2.2.3 TRM/LRM 12
2.2.4 LRRM 13
2.2.5 SOLR 14
2.2.6 De-Embedding 15
2.3 多埠校正 23
2.3.1 全多埠校正 25
2.3.2 迭代法 28
2.3.3 重新正規化法 29
2.3.4 多埠網路De-Embedding 30
2.4 重新正規化法的驗證 33
2.5 參考阻抗轉換 39
第三章 平衡式元件的量測 44
3.1 簡介 44
3.2 混合模態散射參數 44
3.3 純模態向量網路分析儀 47
3.4 混合模態轉換 49
3.5 設計與量測實例 51
第四章 結論 60
參考文獻 61
附錄A
參考文獻 References
[1] J.C. Tippet and R.A. Speciale, “A Rigorous Technique for Measuring the Scattering Matrix of a Multiport Device with a 2-Port Network Analyzer,” IEEE Transactions on Microwave Theory and Techniques, vol. 30, no. 5, pp. 661-666, May 1982.
[2] H. Dropkin, Comments on “A Rigorous Technique for Measuring the Scattering Matrix of a Multiport Device with a Two-Port Network Analyzer,” IEEE Transactions on Microwave Theory and Techniques, vol. 31, no. 1, pp. 79-81, Jan. 1983.
[3] M. Schoon, “A Semi-Automatic 3-Port Network Analyzer,” IEEE Transactions on Microwave Theory and Techniques, vol. 41, no. 6/7, pp. 974-978, June/July 1993.
[4] A. Ferrero, et al., “A New Implementation of a Multiport Automatic Network Analyzer,” IEEE Transactions on Microwave Theory and Techniques, vol. 40, no. 11, pp. 2078-2085, Nov. 1992.
[5] D.E. Bockelman and W.R. Eisenstadt, “Combined Differential and Common-Mode Scattering Parameters: Theory and Simulation,” IEEE Transactions on. Microwave Theory and Techniques, vol. 43, no. 7, pp. 1530-1539, July 1995.
[6] D.E. Bockelman and W.R. Eisenstadt, “Calibration and Verification of the Pure-Mode Vector Network Analyzer,” IEEE Transactions on Microwave Theory and Techniques, vol. 46, no. 7, pp. 1009-1012, July 1998.
[7] D.E. Bockelman and W.R. Eisenstadt, “Pure-Mode Network Analyzer for On-Wafer Measuremetns of Mixed-Mode S-Parameters of Differential Circuits,” IEEE Transactions on Microwave Theory and Techniques, vol. 45, no. 7, pp. 1071-1077, July 1997.
[8] F. Sanpietro, et al., “Accuracy of a Multiport Network Analyzer,” IEEE Transactions on Instrumentation and Measurement, vol. 44, no. 2, pp. 304-307, Apr. 1995.
[9] 郭明哲, “微帶互連元件電性測試夾具製作與向量網路分析儀量測校正技術之研發,” 中山大學碩士論文, 1998.
[10] 陳棓煌, “向量網路分析儀量測校正方法之研究與實踐,” 中山大學碩士論文, 1996.
[11] J.A. Jargon and R.B. Marks, "Two-Tier Multiline TRL for Calibration of Low-Cost Network Analyzers," 46th ARFTG Conference Digest, Dec. 1995.
[12] 黃輝祥, “應用於射頻積體電路之釘架型晶片尺寸封裝電性模型及效應評估,” 中山大學碩士論文, 2001.
[13] G.F. Engen and C.A. Hoer. “ Thru-Reflect-Line: An ImprovedTechnique for Calibrating the Dual Six-Port Automatic Network Analyzer,” IEEE Transactions on Microwave Theory and Techniques, vol. 27, no. 12, pp. 987-993, Dec. 1979.
[14] “In-Fixture Measurements Using Vector Network Analyzers,” Application Note 1287-9, Agilent Technologies.
[15] D. Rubin, “De-Embedding mm-Wave MICs with TRL,” Microwave Journal, June 1990.
[16] D. Williams, “De-embedding and Unterminating Microwave Fixtures with Nonlinear Least Squares,” IEEE Transactions on Microwave Theory and Techniques, vol. 38, no. 6, pp. 787-791, June 1990.
[17] R.B. Marks, “A Multiline Method of Network Analyzer Calibration,” IEEE Transactions on Microwave Theory and Techniques, vol. 39, no. 7, pp.1205-1215, July 1991.
[18] R.A. Soares, P. Gouzien, P. Legaud and G. Follot, “A Unified Mathematical Approach to Two-Port Calibration Techniques and Some Applications,” IEEE Transactions on Microwave Theory and Techniques, vol. 37, no. 11, Nov. 1989.
[19] C. Wan, “Calibrating Network Analyzers Using a Through and a Line or a Transmission Parameter Measurement,” Microwave and Optical Technology Letters, vol. 20, no. 6, March 1999.
[20] H.J. Eul and B. Schiek., “Thru-Match-Reflect: One Result of a Rigorous Theory for De-embedding and Network Analyzer Calibration,” Proceedings of the 1988 European Microwave Conference, Sep. 1988.
[21] S. Lautzenhiser, et al, “Improve Accuracy of On-Wafer Tests via LRM Calibration,” Microwaves & RF, Jan. 1990.
[22] A. Davidson, K. Jones, and E. Strid, “LRM and LRRM Calibrations with Automatic Determination of Load Inductance,” 36th ARFTG Conference Digest, Nov. 1990.
[23] “Technique Verifies LRRM Calibrations for GaAs Measurements,” Technical Brief, Cascade Microtech.
[24] J. Pence, “Verification of LRRM Calibration with Load Inductance Compensation for CPW Measurements on GaAs Substrates,” 42nd ARFTG Conference Digest, Dec. 1993.
[25] A. Ferero and U. Pisani, “Two-Port Network Analyzer Calibration Using an Unknown Thru,” IEEE Microwave and Guided Wave Letters, vol. 2, no. 12, pp. 505-507, Dec. 1992.
[26] S. Basu and L. Hayden, “An SOLR Calibration for Accurate Measurement of Orthogonal On-Wafer DUTs,” IEEE MTT-S International, vol. 3, pp.1335-1338, 1997.
[27] M.Y. Li, et al, “A Simple Divide-by-De-Embedding Measurement Method,” Microwave Journal, Sep. 1993.
[28] D.K. Walker, and D.F. Williams, “Comparison of SOLR and TRL Calibration,” 51st ARFTG Conference Digest, Dec. 1998.
[29] T.E. Kolding, “On-Wafer Calibration Techniques for Giga-Hertz CMOS Measurements,” Proc. IEEE 1999 Int. Conf. on Microelectronic Test Structures, vol. 12, pp. 105-110, Mar. 1999.
[30] M.C.A.M. Koolen, et al, “An Improved De-embedding Technique for On-Wafer High-Frequency Characterization,” IEEE 1991 Bipolar Circuits and Technology Meeting, pp. 188-191.
[31] H. Cho and D.E. Burk, “A Three-Step Method for the De-Embedding of High-Frequency S-Parameter Measurements,” IEEE Transactions on Electronic Devices, vol. 38, no. 6, pp. 1371-1375, June 1991.
[32] E.P. Vandamme, et al, “Improved Three-Step De-Embedding Method to Accurately Account for the Influence of Pad Parasitics in Silicon On-Wafer RF Test-Structures,” IEEE Transactions on Electronic Devices, vol. 48, no. 4, pp. 737-742, Apr. 2001.
[33] T.E. Kolding, “A Four-Step Method for De-Embedding Gigahertz On-Wafer CMOS Measurements,” IEEE Transactions on Electronic Devices, vol. 47, no. 4, pp. 734-740, Apr. 2000.
[34] T.E. Kolding, “Impact of Test-Fixture Forward Coupling on On-Wafer Silicon Device Measurements,” IEEE Transactions on Microwave and Guided Wave Letters, Vol. 10, No. 2, pp. 73-74, February 2000.
[35] T.E. Kolding, “General Accuracy Considerations of Microwave On-Wafer Silicon Device Measurements,” IEEE MTT-S International, vol. 3, pp. 1839-1842, June 2000.
[36] S.K. Park, et al, “A Method of Measuring Large-Signal S-Parameters of High Power Transistors,” Microwave Journal, Aug. 2001.
[37] S. Bousnina, et al, “An Accurate On-Wafer De-Embedding Technique with Application to HBT Devices Characterization,” IEEE Transactions on Microwave Theory and Techniques, vol.50, no. 2, pp. 420-424, Feb. 2002.
[38] A. Ferrero and U. Pisani, “QSOLT: a new fast calibration algorithm for two port S-parameter measurements,” 38th ARFTG Conference Digest, San Diego, Dec. 1991.
[39] H.J. Eul and B. Schiek, “Reducing the number of calibration standards for network analyzer calibration,” IEEE Transactions on Microwave Theory and Techniques, vol. 40, no. 4, pp. 732-735, Aug. 1991.
[40] J.C. Rautio, “Techniques for Correcting Scattering Parameter Data of an Imperfectly Terminated Multiport When Measured with a Two-Port Network Analyzer,” IEEE Transactions on Microwave Theory and Techniques, vol. 31, no. 5, pp. 407-412, May 1983.
[41] T.E. Kolding, “Shield-Based Microwave On-Wave Device Measurement,” IEEE Transactions on Microwave Theory and Techniques, vol. 49, no. 6, pp. 1039-1044, June 2001.
[42] T.E. Kolding, et al, “Microwave On-Wafer Characterization of Three-Port Devices using Shield-Based Test-Fixtures,” IEEE MTT-S International, vol. 3, pp.1535-1538, 2001.
[43] C. Buoli, “3 dB, 90°, DC block Directional Coupler,” 19th European Microwave Conference, pp. 779-784, 1989.
[44] D.M. Pozar, Microwave Engineering, 2nd Edition, John Wiley & Sons, N.Y., 1998.
[45] R.J. Weber, Introduction to Microwave Circuits, IEEE Press, 2001.
[46] K.S. Ang & I.D. Robertson, “Analysis and Design of Impedance- Transforming Planar Marchand Baluns,” IEEE Transactions on Microwave Theory and Techniques, vol. 49, no. 2, pp. 402-406, Feb. 2001.
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