以LED替代傳統汞燈及鹵素燈，並設計一均光透鏡，應用於曝光機及手術無影燈系統。曝光技術是微電子產業關鍵的技術，以使用UV-LEDs替代傳統汞燈光源是發展的趨勢。而應用在曝光製程時，曝光光源的輻照度及均勻性，將影響曝光後結構精度。故本文提出UV-LEDs曝光機光源設計，以折射定律及能量守恆分配出光面的能量，設計自由曲面及斜面反射結構結合金屬玻璃，以達到目標面均勻光場且改善輻照度。Al-Ni-Y金屬玻璃在紫外光波段具有獨特的反射率約為80~88%，比起一般純鋁具有較佳的耐腐蝕及抗刮機械性質。接著以FRED®光學模擬軟體進行分析。利用3D快速列印製作自由曲面模具，使用PDMS光學級高分子翻印出自由曲面透鏡，再鍍上金屬玻璃，與UV-LEDs結合成曝光機光源模組。曝光實驗結果顯示，在目標面上的平均照度為8~8.7mW/cm2和均勻性為82%~86%，曝光後結構可得知傳統曝光機與光罩誤差為6~8%，而自由曲面結合60度斜面反射與光罩尺寸誤差為4.5%。故可由UV-LEDs光源模組替代傳統汞燈光源模組。傳統手術無影燈源會造成汞汙染且會增加輻射熱，所以本文設計LED手術無影燈，利用Ag-Cu-Al金屬玻璃作為反射層，具有高強度及抗菌之性能。量測結果，可得知中心照度值為110,500 lux及d50/d10為58.9%，加入單及雙遮罩無影度測試分別為58.96% 和 56.16%，接著量測單及雙遮罩加入照傷深管無影度測試分別為57.46%和58.03%，皆合乎法規IEC-60601-2-41之規範。

We adopted the LED (Light-emitting diode) to replace the traditional lamp, and a uniform lens was designed and fabricated for exposure system and surgical shadowless lamp. Exposure process plays an important role in micro-electronics industry, and it is an inevitable trend that conventional mercury lamp could be replaced by UV-LEDs (Ultraviolet). In the exposure process, the irradiance and uniformity of exposure light directly influence the precision of products. Based on the law of conservation of energy and law of refraction, a free-form lens and inclined reflector with uniform light field was designed. Al-Ni-Y Thin film metallic glasses (TFMG) are adopted as UV reflection layers to enhance the irradiance and uniformity. Al-based TFMG with 80~88% reflectance at the UV wave band is coated partially around the lens. The inclined reflector layer was coated with TFMG due to the characteristics of scratch resistance and corrosion resistance. FRED® optical software was applied to analyze. Polydimethylsiloxane (PDMS) with high transmittance was adopted as the lens material, and the mold of freeform lens was fabricated by the 3-D fast printing method for fast optical verification. The experimental results show that the average irradiance and uniformity on the target plane with lens were 8~8.7mW/cm2 and 82~86%, respectively. Then, for the 5-UV-LEDs exposure system comprised freeform lens and 60 degree inclined reflector layer, the 4.5% dimensional deviation of exposed sample was better than 6-8% dimensional deviation of sample exposed by commercial mercury lamp exposure system. This current system shows promising potential to replace the conventional mercury exposure systems. On the other hand, Traditional projection surgical shadowless lamp could cause mercury pollution and increase heat radiation. In this study, LED surgical shadowless lamp was designed. The Ag-Cu-Al TFMG possessing great mechanical strength and antibacterial effect was used as the material of reflective curve layer. For the measured result, the central illuminance (Ec) was 110,500 lux and d50/d10 was 58.9%. For measurement with mask, the shadow dilution with single mask and double masks were 58.96% and 56.16%, respectively. Then, the shadow dilution of lamp with single mask combined with tube and double masks combined with tube were 57.46% and 58.03%, respectively. The simulation and experiment met the rule of IEC-60601-2-41.

審定書 i
致謝 ii
中文摘要 iii
Abstract iv
Contents vi
List of Figures ix
List of Tables xii
Chapter 1 前言 1
1.1 UV-LED 1
1.2 UV 市場 1
1.3 UV光譜特性 5
1.4 曝光製程 5
1.5自由曲面設計 6
1.6手術無影燈 7
1.7研究目的 9
1.8章節概述 10
Chapter 2 LED光場設計及幾何設計 11
2.1二次光學設計 11
2.2設計流程 12
2.3 LED光場 12
2.4目標面之光場 14
2.5 光通量之能量守恆 15
2.6幾何光場設計 16
2.7設計斜面反射及自由曲面透鏡 18
2.8斜面反射及自由曲面之目標面光場分布 18
2.9建立斜面反射及自由曲面透鏡 20
2.10設計LED手術無影燈之非同軸反射結構 22
2.11設計非同軸反射罩之雙遮片位置 23
2.12設計非同軸反射罩之單遮片位置 24
Chapter 3 建立自由反射曲面及TFMG反射膜 26
3.1 UV-LED特性 26
3.2建立及設計TFMG反射 27
3.3 TFMG光學特性 28
3.3白光LED特性 33
3.4正規化相關匹配法 (Normalized Cross Correlation, NCC) 34
3.5均勻度量測法 34
3.6模擬分析法 35
Chapter 4 結果與討論 36
4.1 模擬UV-LEDs 陣列 36
4.2 模擬5-UV-LEDs結合TFMG均光自由曲面透鏡 38
4.2.1量測5-UV-LEDs結合均勻自由曲面及包覆TFMG 39
4.2.2 5-UV-LEDs曝光系統之曝光實驗 40
4.3斜面反射及均光自由曲面分析 41
4.3.1 模擬均光自由曲面結合斜面反射 42
4.3.2量測均光自由曲面結合斜面反射 43
4.3.3 5-UV-LEDs曝光系統之曝光實驗 44
4.3.4 小結 47
4.4 LED無影手術燈分析 48
4.4.1模擬Ec (central illuminance)和單及雙遮照無影度分析 49
4.4.2 LED手術無影燈之光譜分析 52
4.4.3模擬Ec (central illuminance)和d50/d10 55
4.4.4比較模擬及量測無影度 56
4.4.5 小結 58
Chapter 5 結論 60
參考文獻 62

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