本研究是利用外加電場輔助光纖雷射(1064nm)對氧化鋁陶瓷基板鑽孔，以及使用預熱基板方式輔助雷射劃線。我們利用理論及模擬進行分析後，調整不同電場參數以及設計不同電場架構，探討對鑽孔後的孔洞品質影響，例如孔洞真圓度、表面焦化區域大小、熔渣堆積高度等，經由實驗結果歸納出最佳電場參數，並設計出可應用於實際雷射鑽孔機台之電場模組。另外在雷射劃線方面，我們使用加熱平台提高基板溫度後，測試基板之最小可劃線雷射功率，由實驗結果得知雷射應用效率提高程度，最後設計出可應用於實際雷射劃線機台之預熱模組。
外加電場輔助雷射鑽孔的架構為在雷射鑽孔區周圍架設至少兩面電極並施加電壓，其原理為因雷射鑽孔時會產生大量電漿雲，而此電漿雲會吸收雷射能量以及造成雷射的散射，由於電漿是由許多的帶電粒子所組成,因此外加一電場後能有效吸引帶電粒子將其帶離雷射加工區，對於孔洞表面品質、加工效率都能有所改善，且可吸引被加熱熔融態的氧化鋁將其帶離孔洞，提高孔洞中熔渣移除效率。在雷射劃線方面，提高基板溫度後能提高其對光的吸收，可減少劃線斷線之情形發生。
實驗結果證實外加電場輔助雷射鑽孔確實可提高熔渣的移除效率以及減少表面焦化區域，且提高基板溫度也有助於提高雷射的應用效率。

This study use the external electric field to assist fiber laser (1064nm) drilling for Al2O3 ceramic substrate, and use the preheating method to assist laser scribing. After using the theory and simulation analysis, we adjust the different parameters and design different electric field structure, then study the quality of the hole after drilling, such as roundness, the size of coke area, debris height, etc. According to the experimental result, we summarize the best electric field parameters, and design a module which can be applied to the real laser drilling machine. On laser scribing, we use the heating platform to raise the temperature of the substrate, then we test the minimum laser power that can scribe the substrate. We obtain the improved level of the laser application efficiency, then design a module which can be applied to the real laser scribing machine.
The structure of the external electric field assisted laser drilling is set up by two electrodes around the laser drilling area, and a voltage is applied. The principle is that while laser drilling, a large amount of plasma plume will be produced. The plasma plume will absorb and scatter the laser light. Since the plasma is composed of many charged particles, apply an electric field can effectively attract the charged particles and leave them from processing area. The quality of surface and processing efficiency will be improved. It also can attract the molten Al2O3 and leave it from the hole, improve the debris removal efficiency. On laser scribing, raising the temperature of the substrate can enhance the absorption of the light, then the occurrence of scribe break will be reduce.
The experimental results show that the external electric field assisted laser drilling can indeed improve debris removal efficiency and reduce the coke area of surface. Raising the temperature also help to improve the efficiency of laser application.

目錄
論文審定書(中文) i
論文審定書(英文) ii
論文公開授權書 iii
誌謝 iv
中文摘要 v
Abstract vi
目錄 viii
圖目錄 x
表目錄 xii
第一章 序論 1
1.1前言 1
1.2研究背景 2
1.2.1 雷射加工技術 2
1.2.2 陶瓷鑽孔 4
1.3研究動機 4
第二章 電場輔助雷射鑽孔之理論與模擬 6
2.1雷射誘發電漿理論 6
2.2電場架構之模擬與設計 7
第三章 實驗儀器與量測方法 14
3.1實驗儀器 14
3.2 量測設備與方法 16
3.2.1 光學顯微鏡 16
3.2.2 熱場發射型掃描式電子顯微鏡 17
3.2.3 紫外光-可見光光譜儀 18
3.2.4 環境掃描式電子顯微鏡 19
第四章 輔助雷射劃線及鑽孔之實驗方法與結果 20
4.1 實驗方法 20
4.1.1 提高溫度輔助雷射劃線 20
4.1.2 外加電場輔助雷射鑽孔 20
4.2 實驗結果 20
4.2.1提高基板溫度對雷射劃線結果影響 20
4.2.2電場強度對雷射鑽孔結果影響 21
4.2.3電場強度對雷射鑽孔結果影響 24
4.3 雷射鑽孔後電極之吸附情形 28
第五章 結 論 29
參考文獻 30

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