本研究之目的為開發一六軸力量及力矩感測器的校正機構，此校正平台結合音圈馬達之穩定力量輸出，透過簡易且直接的幾何結構設計達成對感測器施加可靠的六軸力量及力矩，並搭配精準的單軸向荷重元感測校正系統之校正力達到補償之效果，最後以微調裝置提升此平台於空間中施力方向之平行度及準確性；本研究組裝於此校正平台之六軸力量/力矩感測器選擇以精度高且量測範圍廣之電阻式應變感測作為其運作原理，結構部分則採用蟹型腳作為結構設計主軸，透過ANSYS有限元素分析軟體進行感測器結構應變分析並得到適當之幾何尺寸，當感測器受力及可造成結構變形使表面貼附之應變規產生應變，進而產生電壓變化之訊號，作為本研究之感測器訊號；透過統計學概念，以最小平方法(Least squares estimation, LSE)與最大似然函數方法(Maximum likelihood estimation, MLE)開發此校正平台力量力矩與感測器應變規電壓變化之間的轉換矩陣，意即達到數據最佳化之效果；最後利用LabVIEW軟體以人機介面方式整合所有校正訊號控制方法，以達到簡單操作並減少人為失誤所造成誤差之可能性，最後以架設完整系統之實驗架構進行最後驗證。

This study developed a six-axis force/torque sensor and a calibration system. In order to improve the stability of the calibration system, we used VCMs (voice coil motor) as the output force device of the system. Simply and directly structures designed also make the six-axis calibration force/torque much more reliable. Furthermore, the system combined two precise one-axis load cells to receive the output reactionary force from VCMs, then used the proportional-integral-derivative controller (PID controller) to reduce the steady-state time. Finally, there are some mechanism designed to adjust the orientation of the calibration force. The principle of the six-axis force/torque sensor is the mechanical deformation of the structure and we use the resistance strain gauges as the measuring devices because of the characteristic of wide measuring range and high level accuracy. According to the results of strain analysis using ANSYS, we designed a crab-type force sensor as the main structure of our sensor. By measuring the strain gauges on the elastic body surfaces, we get the corresponding voltages by each applied calibration force. In this study, we conduce LSE (Least squares estimation) and MLE (Maximum Likelihood Estimation) to find the transfer function between the calibration force/torque and the voltages of the sensor. On the whole, we integrated the whole system with LabVIEW and also simplified the usage of this equipment in order to minimize the operation error. The six-axis calibration process has been conducted to verify the proposed method.

目錄
致謝 i
摘要 ii
ABSTRACT iii
圖次 vii
表次 xiv
符號說明 xvi
第一章 緒論 18
1.1 前言 18
1.2 研究動機與目的 18
1.3 文獻回顧 19
1.4 本文架構 29
第二章 六軸力量/力矩感測器設計 30
2.1 六軸力量/力矩感測器幾何結構 30
2.2 應變規感測原理 31
2.2.1 半橋電壓電組轉換關係 34
2.2.2 全橋電壓電組轉換關係 35
2.3 ANSYS模擬力量感測器結構應變分析 36
2.3.1 X、Y軸向力量應變分析 39
2.3.2 Z軸向力量應變分析 40
2.3.3 X、Y軸向力矩應變分析 41
2.3.4 Z軸向力矩應變分析 43
2.3.5 最大應力分析 44
2.4 六軸力量/力矩感測器加工實體圖 46
第三章 感測器校正平台開發 47
3.1 校正平台整體結構設計 47
3.2 六軸校正力量/力矩組合方式 48
3.2.1 X、Y軸校正力量組合方式 49
3.2.2 Z軸校正力矩組合方式 50
3.2.3 X、Y軸校正力矩組合方式 50
3.2.4 Z軸校正力量組合方式 51
3.3 校正平台元件簡述 52
3.3.1 音圈馬達 52
3.3.2 荷重元 54
3.3.3 千分表及磁性座 55
3.3.4 精密位移台 58
3.3.5 桿件 59
3.3.6 線性滑軌 61
3.3.7 其他安裝用治具 62
3.3.8 DAQ轉接卡 65
3.3.9 荷重元顯示控制器 66
第四章 LabVIEW人機介面整合控制訊號 68
4.1 校正系統整體控制佈局 68
4.2 LabVIEW控制架構 68
4.2.1 命令校正力 69
4.2.2 輸入音圈馬達驅動板 71
4.2.2.1 六軸校正力量/力矩演算法 71
4.2.2.2 荷重元訊號回饋控制 74
4.2.2.3 DAQ card輸出模組 75
4.2.3 荷重元訊號輸入模組 76
4.2.4 穩態誤差判定 78
4.2.5 資料匯出 78
第五章 轉換矩陣開發 80
5.1 校正系統數學模型建立 80
5.2 最小平方法公式推導 80
5.3 最大似然函數法公式推導 81
5.4 ANSYS數據驗證運算程式測試 83
5.5 線性最小平方法建立轉換矩陣 85
5.6 最大似然函數法建立轉換矩陣 87
5.7 非線姓三次項最小平方法建立轉換矩陣 88
5.7.1 非線性最小平方法模型建立 88
5.7.2 非線性最小平方法回歸 88
第六章 校正系統試驗 90
6.1 荷重元感測校正 90
6.2 ATI六軸感測器測試 91
6.3 校正平台各軸向校正力試驗 97
6.3.1 X軸向力量試驗 98
6.3.2 Y軸向力量試驗 99
6.3.3 Z軸向力量試驗 101
6.3.4 X軸向力矩試驗 102
6.3.5 Y軸向力矩試驗 103
6.3.6 Z軸向力矩試驗 105
6.4 組合力試驗 106
6.4.1 X軸向力量組合Z軸向力矩試驗 106
6.4.2 Z軸向力量組合X軸向力矩試驗 108
6.5 線性最小平方法校正結果 109
6.6 最大似然函數法結果 112
6.7 非線性三次項最小平方法結果 116
6.8 誤差值比較 119
第七章 結論與未來展望 128
7.1 結論 128
7.2 未來研究方向 128
參考文獻 130

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