本論文以實驗方式探討在不具相變化及具有相變化條件下，微渠道內流/熱場特性，並與傳統結果相比較。本論文主要分成三個部份進行實驗及分析討論。第一部份利用ArF準分子雷射在一高分子聚合物(PMMA)上加工製造出一單一微渠道，並以微質點影像測速儀(μPIV)對微渠道內的流體進行二維流場的拍攝及探討微渠道內是否具有壁邊滑動速度的現象。第二部份則以SU-8微機電製程技術配合PDMS翻模技術製造出一含有20根平行微渠道的微散熱裝置，並利用紫外光臭氧機的照射，使原本為疏水性的PDMS微渠道表面性質發生改變而形成親水性，並以μPIV/μLIF系統來量測此微渠道內流/熱場情況，進而探討在微渠道內此二種表面特性(親、疏水性)對流/熱場(不具相變化)所造成的影響。第三部份則探討流體在75根平行微渠道內具有相變化的次冷流動沸騰現象(如: 沸騰起始點、沸騰曲線圖及相對應的流場圖、汽泡脫離直徑及汽泡脫離頻率)，並嘗試以下列三種不同方法:
(1) 在微渠道二側壁邊以等距離增加三種不同開孔角度(θ = 60°、90°及120°)的孔穴。
(2) 在原本為Cu的加熱表面上均勻濺鍍上一層厚度為2 μm 的鑽石薄膜。
(3) 在流體(去離子水)中加入1 vol. % 的多壁奈米碳管 (MCNT) 。
來提高此微渠道的極限熱通量(CHF) 及對流熱傳係數，以期能提高微渠道的散熱效率。
本論文主要目地是希望能以所得的研究成果發展出一高效率的微冷卻技術，並能實際應用在微電子零件冷卻裝置上，以解決目前電子零件發熱功率急速增加的散熱問題。

An experimental investigation was carried to examine the flow/ thermal field characteristics with/without phase change in the microchannels and compared with the traditional results. There are three parts in this study. The first part investigated the 2-D flow field measured by the micro particle image velocimetry (μPIV) in a single PMMA microchannel fabricated by an ArF excimer laser. The slip boundary condition in the microchannel wall was also discussed. The second part studied the influence of surface condition (hydrophilic vs hydrophobic) on the flow/thermal field in a micro cooling device which included twenty parallel microchannels, which was fabricated by SU-8 microfabrication technique and replicated by the PDMS replica technique. The UV/ozone device was used to change the PDMS microchannels’ surface condition from hydrophobic to hydrophilic and the μPIV/μLIF system was also used to measure the velocity and temperature distribution. The third part investigated the two-phase subcooled flow boiling phenomena (onset of nucleate boiling, boiling curve, flow patterns, bubble departure diameter and frequency) in the seventy-five parallel microchannels fabricated by SU-8 microfabrication technique, and aimed to raise the critical heat flux (CHF) and heat transfer coefficient to enhance the cooling efficiency. Three major methods were used in this study, as follows:
(1) To add the cavity angle of θ = 60°, 90°, and 120° on the microchannel side walls.
(2) To coat 2 μm diamond film on the Cu heated surface.
(3) To add 1 vol. % Multi-walled Carbon Nanotube (MCNT) into the working medium (deionized water).
The goal of this paper is to develop a high heat flux cooling technique and apply the experimental results to solve the cooling problem resulting from the exceedingly high heat flux from the electronic component.

ACKNOWLEDGMENTS(謝誌)…………………………...…….……..i
摘要……………………………………………………………..………..ii
ABSTRACT………………………………………………………….…iv
TABLE OF CONTENTS………………………………...…………….vi
LIST OF TABLES………………………………………….…………...x
LIST OF FIGURES…………………………………………………….xi
NOMENCLATURE………………………………………….………...xv
CHAPTER
1. INTRODUCTION…………………………………………….1
1.1 Literature Review……………………………………….1
1.1.1 μPIV ……………………………………….....2
1.1.2 μLIF………………………………………...…5
1.1.3 Flow Field Measurement in Microchannel…...6
1.1.4 Single-Phase Heat Transfer in Microchannel..10
1.1.5 Two-Phase Heat Transfer in Microchannel….13
1.2 The Objective of This Study…………………………..19
1.3 Thesis Scope…………………………………………..19
2. EXPERMIEMTAL APPARATUS AND PROCEDURES...22
2.1 Microchannel Fabrication Process…………………….22
2.1.1 Excimer Laser Fabrication…………………..22
2.1.2 SU-8 Fabrication…………………………….23
2.2 Single-Phase Flow Loop and Test Section for Velocity Measurement…………………………………………..24
2.2.1 Single-Phase Test Section for Velocity Measurement………………...………………24
2.2.2 Single-Phase Flow Loop for Velocity Measurement…………...……………………25
2.3 Single-Phase Flow Loop and Test Section for Temperature Measurement ………………..…………..26
2.3.1 Single-Phase Test Section for Temperature Measurement………………...………………26
2.3.2 Single-Phase Flow Loop for Temperature Measurement………………...………………28
2.4 Two-Phase Flow Loop and Test Section………………29
2.4.1 Two-phase Test Section……………………29
2.4.2 Two-Phase Flow Loop………………….…..31
2.5 μPIV/ μLIF System……………………………………32
3. DATA REDUCTION AND UNCERTAINTY……………...46
3.1 Single-Phase…………………………………………...46
3.1.1 Flow Field Analysis……………….................46
3.1.2 Single-Phase Heat transfer Coefficient…………………………………...48
3.2 Two-Phase ……………………………………...……..50
3.2.1 Effect Heat Flux (qeff) and Channel Wall Heat Flux (qch)…………………………………….51
3.2.2 Average Two-Phase Heat Transfer Coefficient……………...……………………53
3.2.3 Two-Phase Pressure Drop and Friction Factor
……………………………………………….54
3.3 Uncertainty Analysis…………………………………..55
4. FLOW FIELD MEASUREMENT IN A SINGLE MICROCHANNEL………………………………………….58
4.1 No-Slip/Slip Boundary Condition in Marco/Micro Channel…….………………………………………….58
4.2 Flow Field Measurement………………...……………60
4.3 Slip Velocity and Slip Length………………...……….62
5. CONVECTIVE HEAT TRANSFER IN PARALLEL LIQUID MICROCHANNELS WITH HYDROPHOBIC AND HYDROPHILIC SURFACE…………………..……..70
5.1 Hydrophobic and Hydrophilic…………………...……71
5.2 Flow / Velocity Field………………………………...72
5.3 Slip Velocity vs Hydrophobic Surface……………….73
5.4 μLIF / Temperature Visualization……………………74
5.5 Local Heat Transfer Coefficient Distribution and Thermal Entry Length…………………………………75
5.6 vs Pe and Compared with Those of Previous Studies…………………………………………………76
6. SUBCOOLED CONVECTIVE BOILING IN STRUCTURED SURFACE MICROCHANNELS………..92
6.1 Bubble Ebullition Cycle……………………………..92
6.2 Flow Pattern and Morphology………………………94
6.3 Boiling Curve/ Two Phase Heat Transfer Coefficient…96
6.4 Effect of Geometry and Flow Parameter on CHF……..98
6.5 Enhancement Performance Ratio…………………..101
6.6 Comparison with Existing Data…………………….102
7. SUMMARY…………………………………………………116
7.1 Conclusions…………………………………………..116
7.1.1 Flow Field Measurement in a Single Microchannel………………………..……...116
7.1.2 Convective Heat Transfer in Parallel Liquid Microchannels with Hydrophobic and Hydrophilic Surface………………………..117
7.1.3 Subcooled Convective Boiling in Structured Surface Microchannels……….…………….118
7.2 Recommendation for Future Work………………….119
REFERENCES…………………………………...……………121
APPNDIX A……………………………………………………137
PUBLICATION LIST…………………………………………148

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