||In this work, carbon nanotubes (CNTs) have been synthesized by microwave chemical vapor deposition technique using Ni as catalyst and at different experimental parameters. Catalysts Ni plays an important role in the process of synthesizing carbon nanotubes. Sputtered Ni film can|
agglomerate into uniformly distributed nanometer size particles, which can be employed to assist the growth of carbon nanotubes.
The effect of Ni catalyst on CNTs growth have been investigated and an optima Ni thickness has been found. There are series experiments performed in order to improve the CNT growth environment and a characteristics for
CNTs under the condition at 30 torr, 800℃, 600W and – 350V was observed.
The growth characteristics was evaluated with TEM, SEM, Raman and FTIR.
From Raman spectra, the degree of graphitization is proportional to growth temperature and microwave power. In addition to extending the growth time, the length of CNT did not increase.