本研究利用電漿化學氣相沉積法，以甲烷之碳氫化合物為碳源、鎳
金屬為催化劑成長奈米碳管。藉改變鎳催化劑膜厚、基板溫度、氣氛之壓力及基板偏壓的大小及成長時間等找出實驗之最佳條件。實驗成長之奈米碳管樣品，以SEM、TEM、RAMAN及FTIR分析奈米碳管的成長特
性。
實驗結果顯示，使用鎳膜為催化劑可成長出奈米碳管。成長過程中
催化劑扮演重要的角色 。由拉曼光譜及高解析TEM 分析顯示，此碳管具多層壁石墨結構。鎳顆粒提供碳管成長所需之觸媒，經氣相成長可得
垂直基板排列之順向奈米碳管。基板溫度於750℃至850℃間，為較佳之順向成長溫度範圍。微結構上的差異主要來自不同溫度或不同壓力，基板偏壓，及微波功率大小的影響，造成石墨層排列方式不同。
成長時間的增加並不會使碳管的長度加長，成長溫度越高結晶石墨
化的程度就越高，石墨化程度亦與功率大小成正比。而基板偏壓的改變對結晶石墨的程度並沒多大的影響。

In this work, carbon nanotubes (CNTs) have been synthesized by microwave chemical vapor deposition technique using Ni as catalyst and at different experimental parameters. Catalysts Ni plays an important role in the process of synthesizing carbon nanotubes. Sputtered Ni film can
agglomerate into uniformly distributed nanometer size particles, which can be employed to assist the growth of carbon nanotubes.
The effect of Ni catalyst on CNTs growth have been investigated and an optima Ni thickness has been found. There are series experiments performed in order to improve the CNT growth environment and a characteristics for
CNTs under the condition at 30 torr, 800℃, 600W and – 350V was observed.
The growth characteristics was evaluated with TEM, SEM, Raman and FTIR.
From Raman spectra, the degree of graphitization is proportional to growth temperature and microwave power. In addition to extending the growth time, the length of CNT did not increase.

中文摘要…………………………………………………......Ⅰ
Abstract…………………………………………………......Ⅱ
Content…………………………………………………….....Ⅲ
Table caption…………………………………………….....Ⅴ
Figure caption…………………………………………………Ⅵ
Chapter 1.
Introduction……….……………………………………………1
1.1 Structures of carbon nanotubes……………………….1
1.2 The growth methods of carbon nanotubes ……………3
1.2.1 Arc-discharge methods ……………………………….3
1.2.2 Laser vaporization ……………………………………4
1.2.3 Catalytic chemical vapor deposition………………5
1.3 Properties of carbon nanotubes……………………...6
1.3.1 Band structure of graphite………………………….6
1.3.2 Transport properties of graphite , carbon nanotube
and disorder carbon ……………………….…………7
1.3.3 Band structure of single-walled carbon
nanotubes…....................................8
1.3.4 Optical properties of carbon nanotubes………….9
1.4 IR and Raman spectra for carbon nanotubes……….10
Chapter 2. Growth Mechanisms of CVD carbon nanotube.13
2.1 Introduction …………………………………………….13
2.2 Fundamental of chemical vapor deposition ……….13
2.3 Growth mechanism of catalytically produced carbon
nanotubes….....................................16
Chapter3.Experimentals………………………………......18
3.1 Substrate preparation …..…………………... ……19
3.2 Microwave plasma CVD system………………………….20
3.3 Experimental parameter ……………………………….20
3.3.1 H2 plasma cleaning and nucleation……………….20
3.3.2 Growth of the carbon nanotube films…………….21
3.4 Characterization of carbon nanotube films ………21
3.4.1 Scanning Electron Microscopy (SEM)………………21
3.4.2 Raman Spectoscopy…………………………………….21
3.4.3 High Resolution Transmission Electron Microscopy
(HRTEM)………………………………………….............22
3.4.4 Fourier Transform Infrared Spectroscopy (FTIR)22
Chapter 4 . Results and Discussion………………………24
4.1 The effect of the Ni catalyst thickness …………24
4.2 The effect of gas pressure on growth of CNTs .…25
4.3 The effect of deposition temperature on growth of
CNTs.............................................27
4.4 The effect of microwave power on growth of CNTs.29
4.5 The effect of substrate bias on growth of CNTs…31
4.6 The effect of growth time on CNTs’ properties…33
4.7 HRTEM results of thesamp………………………34
4.8 Conclusions………………….……………………36
Reference ………………………………………………37

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