晶背研磨(back grinding, BG)廢水主要是由超純水與細顆粒所組成，因此若將其處理並回收再利用，應具有相當程度的經濟效益。本研究採物化處理之方式，進行適合BG廢水回收再利用之前處理技術探討，評估廢水再利用之可行性。在化學處理部分，選定以混凝之瓶杯試驗針對固體物之去除，藉由批次試驗得知，以多元氯化鋁(poly aluminum chloride, PAC)及氯化鐵(FeCl3)為混凝劑，或PAC配合助凝劑之添加，皆能有效降低濁度及懸浮固體物。由研究結果可知，在考量成本效益，本研究採低加藥量及不調整廢液之酸鹼值，使水樣為中性(pH 7)之下，以PAC 2.2 mg/L及陽性助凝劑(polymer) 0.5 mg/L為加藥量，BG廢液之濁度去除率達98%。另砂濾之測試，藉此比較BG廢水採直接砂濾，或混凝砂濾後之實驗結果可知，直接利用砂濾過濾無法有效去除濁度與SS，而經過混凝後再以砂濾系統進行過濾，濁度去除率可提升至99%，由此可知BG廢液具「高濁度細粒徑」之特性。關於正壓式螺旋膜與負壓式中空纖維膜組之超過濾(ultrafiltration-UF)薄膜系統之結果顯示，使用二種UF膜後，濁度去除率皆可達99.9%以上。在UF膜的通量比較上，實驗組優於對照組，正壓膜於40分鐘內實驗組及對照組通量分別為87.7 L/m2-min及81.5 L/m2-min，負壓膜則為16.0 L/m2-min及15.0 L/m2-min，故有效的前處理方式可有效減緩薄膜處理之負荷。BG廢水水質再利用評估結果可知，經由UF膜處理後已能符合於冷卻水使用，倘若需符合製程純水之標準，則需再以逆滲透程序進行處理。

Back grinding (BG) wastewater consists mainly of high-purity water and high concentrations of inorganic particles. If the BG wastewater could be treated and recycled efficiently, it should be sort of economic benefit. In this study, appropriate pre-treatment technologies are evaluated to obtain the feasible recycle system. From the chemical coagulation experiment, the addition of PAC or FeCl3, both of them can obviously reduce the turbidity and suspended solid concentrations (SS). In addition, polymer can advance the sedimentation process. Considering the cost of practical operation, the turbidity of BG waste water could be removed up to 97% by using polyaluminum chloride as the coagulant (2.2 mg/L) and polymer as the coagulant aid (0.5 mg/L) in the pH=7 condition . In sand filtration experiment, the turbidity and SS can’t be effectively removed if the coagulation isn’t used on BG wastewater. It demonstrates that BG wastewater contains high concentration of nano-scale particles. The rate of removable turbidity can reach 99% under applying coagulation, sedimentation, and sand filtration. In ultra-filtration experiment, both of spiral-wound (SW) and hollow-fiber (HF) can remove more than 99.9% of turbidity. For the flux of behavior, the performance of pre-treatment water is better than non-treatment water. Thus, it reveals that appropriate pre-treatment can lower the load of membrane filtration system. For the obtained recycle water, the grade of standard can achieve the grade of the cooling tower required.
However, due to its high particle-containing characteristics, the commonly used reverse-osmoses (RO) membrane filtration technology can not be directly applied for purification process because the fouling/clogging problem would cause the frequent membrane replacement. In this lab-scale feasibility study, pre-treatment technologies (e.g., sand filtration, chemical coagulation, ultra-filtration) were applied to reduce the turbidity and particle concentrations of the BG wastewater (collected from a semiconductor manufacturing plant) before RO filtration unit. The BG wastewater contained turbidity and suspended solid concentrations of 3,200 NTU and 96 mg/L, respectively. The measured pH and conductivity of the BG wastewater were in the ranges of 6.8 to 7.2 and 14 to 18 μS/cm, respectively. Moreover, the particle sizes of the solids varied from 300 to 700 nm. Thus, applying conventional sand filtration along could not effectively remove the nano-scale particles. Results from the chemical coagulation experiment reveal that the turbidity and particles of the BG wastewater could be significantly removed (up to 95% of turbidity and particle removal) by the coagulation/sedimentation process using polyaluminum chloride as the coagulant (2.2 mg/L) and polymer as the coagulant aid (0.5 mg/L). Results also indicate that up to 99% of turbidity and particle removal could be obtained with the application of ultra-filtration unit after the coagulation/sedimentation process. Results from this study indicate that applying appropriate pre-treatment technologies (coagulation and ultra-filtration) would lower the fouling rate and extend the life of RO membrane used for BG wastewater purification.

目錄
謝誌 I
摘要 II
Abstract III
目錄 V
圖目錄 VIII
表目錄 X
表目錄 X
第一章 前言 1
1-1研究緣起 1
1-2 研究目的與內容 2
第二章 文獻回顧 3
2-1半導體廢水之種類 3
2-2 晶背研磨製程 4
2-3 研磨廢水特性 6
2-4 國內外研磨廢水處理技術概況 7
2-5 廢水回收再利用之相關案例 11
2-6 研磨廢水前處理之方式 14
2-6-1 混凝程序 14
2-6-2 混凝劑的種類 16
2-6-3 砂濾過濾 20
2-6-4 薄膜分離技術之發展 21
2-7 薄膜種類與材質 22
2-7-1薄膜種類 22
2-7-2 薄膜材質 26
2-8 薄膜過濾機制 27
2-8-1 薄膜分離程序 27
2-8-2 正負壓之驅動方式 28
2-8-3 薄膜組件之形式 28
第三章 研究方法與材料設備 30
3-1 研究架構 30
3-2 研究方法與儀器設備 32
3-2-1 廢水來源 32
3-2-2 瓶杯試驗 32
3-2-3 砂濾試驗 34
3-2-4 薄膜系統 36
3-2-5 儀器設備 40
3-3 分析參數 41
3-3-1 水質參數分析 41
3-3-2 界達電位與粒徑分析 41
3-3-3 薄膜過濾通量 41
3-3-4 水中總有機碳分析 42
3-3-5 電子顯微鏡觀測 43
第四章 結果與討論 44
4-1晶背研磨廢水特性 44
4-1-1晶背研磨廢水粒徑特性 46
4-1-2 電子顯微鏡之觀測 47
4-1-3 界達電位分析 49
4-2晶背研磨廢水化學混凝處理 51
4-2-1 多元氯化鋁及氯化鐵混凝實驗 51
4-2-2 陽離子高分子聚合物膠凝實驗 53
4-2-3 陰離子高分子聚合物膠凝實驗 56
4-3 晶背研磨廢水化學混凝後砂濾處理 58
4-4晶背研磨廢水UF處理系統 60
4-4-1 廢水實驗組及對照組之UF處理系統水質比較 61
4-4-2 廢水實驗組及對照組之UF處理系統通量比較 64
4-5晶背研磨廢水回收再利用之評估 67
4-6成本評估 69
第五章 結論與建議 72
5-1 處理程序參數及測試研究 72
5-2 建議 73
參考文獻 74

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