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博碩士論文 etd-0207106-122241 詳細資訊
Title page for etd-0207106-122241
論文名稱
Title
粒子碰撞對電漿與工件表面間不平衡電荷薄層內輸送現象之影響
The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
70
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2006-01-25
繳交日期
Date of Submission
2006-02-07
關鍵字
Keywords
蒙地卡羅碰撞、電漿模擬
Monte Carlo collision, plasma simulation
統計
Statistics
本論文已被瀏覽 5648 次,被下載 5357
The thesis/dissertation has been browsed 5648 times, has been downloaded 5357 times.
中文摘要
本論文用粒子模擬方法(Particle-in-Cell Method)加上蒙地卡羅方法(Monte-Carlo-Collision Method)模擬一個電漿碰撞系統,由此方法我們可以了解電漿碰撞的運動行為及其影響。

本論文主要探討是電漿與工件表面間會產生一不平衡電荷薄層(Sheath),在此薄層內碰撞現象對此薄層的影響。
Abstract
We use Particle-in-Cell Method(PIC)and Monte-Carlo-Collision Method(MCC)to model a plasma colliding system .By this way,we can realize the behaviors and effects in the motion of plasma collision .

Our mainly discuss is that the system will produce a thin layer(Sheath)between plasma and a workpiece ,and the effects of colliding phenomenon in this thin layer(Sheath) .
目次 Table of Contents
謝 誌 ………………………………………………………… I
摘 要 ………………………………………………………… II
英 文 摘 要 ………………………………………………… III

第一章 緒論 ……………………………………………… 1
1-1 粒子模擬方法的文獻回顧 …………………………… 1
1-2 粒子模擬方法 ………………………………………… 2
1-3 研究目的 ……………………………………………… 4

第二章 理論分析與方法 ……………………………… 5
2-1 粒子模擬方法的理論與流程 …………………………… 5
2-1-1 基本假設 ………………………………………………… 5
2-1-2 粒子模擬方法的基本思路 ……………………………… 6
2-1-3 流程解析 ………………………………………………… 7
2-2 蒙地卡羅的理論 ………………………………………… 11
2-3 各文獻的碰撞截面(Cross Section)比較與整理 …… 20

第三章 結果與討論 ……………………………………… 30
第四章 結論與未來方向 ……………………………… 36

附 錄 理 論 …………………………………………………… 37
1、何謂電漿(Plasma) ………………………………………… 37
2、德拜長度(Debye Length)和電漿的準電中性 …………… 38
3、電漿參量和集體相互作用 …………………………………… 39
4、電漿的振蕩頻率(Plasma frequency) …………………… 41
5、粒子模擬的維數(Dimension) ……………………………… 43
6、不同的模型(Model) ………………………………………… 43
7、碰撞問題 ……………………………………………………… 45
8、有限粒子大小(Finite-Size-Particle) ………………… 48

參 考 文 獻 ………………………………………………… 54
參考文獻 References
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