本研究透過聚焦離子束(FIB)對派熱克斯玻璃(Pyrex glass) 快速的製作出3D次微米結構模仁。在這片玻璃模仁上面塗佈UV膠，針對壓印的壓力與UV曝光時間等參數進行一系統化的紫外線固化奈米壓印(UV-nanoimprint lithography；UV-NIL)成形實驗，觀察其成形缺陷並檢視其缺陷，藉以探討壓力、時間等參數與缺陷出現之關係。同時對於UV膠的材料特性也加以探討。透過奈米壓痕儀去測量UV膠在壓印過程中所能承受壓力的變形能力，且利用熱重分析儀來探討UV膠的裂解溫度，以避免在壓印過程中材料結構崩解。不但如此，也對派熱克斯玻璃(Pyrex glass)模仁進行探討，透過接觸角量測儀來測量在壓印中玻璃模仁表面特性。

Focused Ion Beam (FIB) has several advantages such as high sensitivity, high material removal rates, low forward scattering and directing fabrication. Without any etched mask, processing time can be reduced. Pyrex glass etched by FIB is used for fast fabrication of 3-D submicron structure mold. In this study, glass is used as substrate. The UV-cured resin that spin-coated onto a mold has 3-D structure patterns. 3-D structure patterns are transferred on the plate to investigate the effects of parameters of UV cured, pressure and exposure time on the occurrence of defects. The relationship of these processing parameters for the imprinting process is also realized. Besides, the material property of UV-cured resin is investigated. UV-Cured resin is investigated by thermogravimetric Analysis (TGA) to measure the degradation temperature (Td). The hardness and modulus of UV-Cured resin was measured by nanoindentation to realize deformed ability of material for the imprinting process. Moreover, the contact angle of Pyrex glass is measured to investigate its surface quality for the imprint process.

目錄…………………………………………………...………….Ⅰ
圖目錄…………………………………………………..………..Ⅳ
表目錄…………………………………………………...….........Ⅶ
中文摘要…………………………………………………………Ⅷ
英文摘要………………………………………………………....Ⅸ
第１章 緒論--------------------------------------------------------------1
１-１ 研究動機與背景------------------------------------------------------ 1
１-２ 奈米壓印的發展------------------------------------------------------ 2
１-３ FIB 技術的發展------------------------------------------------------ 5
第２章 FIB 與奈米壓印原理-----------------------------------------7
２-１ FIB 的原理------------------------------------------------------------ 7
２-２ 奈米壓印的原理----------------------------------------------------- 10
２－２－１ 紫外光硬化之奈米壓印------------------------------ 10
２－２－２ 反轉壓印技術------------------------------------------ 13
第３章 實驗流程、材料與設備------------------------------------ 19
３-１ 實驗儀器及設備介紹----------------------------------------------- 19
３－１－１ 聚焦離子束儀器--------------------------------------- 19
３－１－２ 奈米三維量測儀及奈米薄膜材料試驗機--------- 22
３－１－３ 紫外線點光機------------------------------------------ 26
３－１－４ 熱重量分析儀------------------------------------------ 26
３－１－５ 接觸角量測儀------------------------------------------ 27
３-２ 實驗材料-------------------------------------------------------------- 28
３－２－１ Pyrex 玻璃--------------------------------------------- 28
３－２－２ UV 膠---------------------------------------------------- 30
３-３ 實驗流程-------------------------------------------------------------- 34
３－３－１ 實驗材料的準備--------------------------------------- 34
３－３－２ FIB 加工------------------------------------------------ 36
３－３－３ UV 固化壓印------------------------------------------- 38
第４章 實驗結果與討論--------------------------------------------- 43
４-１ 3D 玻璃結構壓印轉移效果--------------------------------------- 43
４-２ FIB 加工與UV 膠壓印出不同3D 玻璃結構分析------------- 44
４-３ 使用不同壓力壓印出不同3D 玻璃結構分析------------------ 49
４-４ 利用奈米壓痕量測不同UV 曝光時間的機械性質----------- 58
４-５ UV 膠的TGA 熱變化分析---------------------------------------- 64
４-６ Pyrex 玻璃接觸角量測-------------------------------------------- 66
第５章 結論與未來展望--------------------------------------------- 68
５-１ 結論-------------------------------------------------------------------- 68
５-２ 未來展望-------------------------------------------------------------- 70
５－２－１ 表面張力的改善--------------------------------------- 70
５－２－２ 添加劑、顏料或染料等的摻雜--------------------- 71
參考文獻----------------------------------------------------------------- 72

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