本研究探討鈦薄膜經陽極處理及氧化處理後之相變化，分析鈦薄膜相變化至一氧化鈦相、銳鈦礦相和金紅石相。 將利用X光繞射儀、穿透式電子顯微鏡和X光電子能譜儀來觀察其生成相、微結構以及相變化之機制。

第一章是探討鈦薄膜經陽極處理後之相變化，雖然X光繞射儀僅觀察到非晶質的氧化鈦相，但由穿透式電子顯微鏡可觀察到立方晶一氧化鈦，其晶粒小於10 奈米，並由X光電子能譜儀可偵測到Ti2+與Ti4+共存。 陽極處理試片再以500-550 oC在大氣中熱處理後，觀察到銳鈦礦相存在。 隨著溫度升高，隨著銳鈦礦相之增加且一氧化鈦相漸漸消失。 若不經陽極處理的鈦薄膜以同樣的溫度，經熱處理後只得到金紅石相。 本研究結果指出一氧化鈦相可以誘發銳鈦礦相的成核與生長，因為一氧化鈦相與銳鈦礦相有著相似的結構。

第二章是以穿透式電子顯微鏡觀察鈦薄膜經由陽極處理與熱處理後，鈦相變化至一氧化鈦相再變化至銳鈦礦相之機制。 將磊晶鈦薄膜生長在(001)方向的單晶鹽基板上，可以得到兩組方向的組織，經陽極處理後之試片除了非晶質的氧化鈦相之外，且觀察到鈦與一氧化鈦的晶向關係為( )Ti // (220)TiO。 再經熱處理後一氧化鈦相變化至銳鈦礦相其晶向關係為{200}TiO //{200}A。由此處理方式可以得到純的銳鈦礦相。

The phase transformation of anodized Ti film has been studied. Although X-ray diffraction detected only the amorphous TiO2 phase, transmission electron microscopy analysis showed that TiO nanocrystallites less than 10 nm in size were also present, which was further supported by x-ray photoelectron spectroscopy analysis. Anatase was found to appear gradually by annealing the as-anodized specimen in air at 500–550 oC, which was accompanied by a simultaneous disappearance of TiO nanocrystallites. In contrast, only rutile is formed by annealing the Ti film at the same temperatures. The results indicate that TiO can induce the formation of anatase, which is explained by the close similarity between their structures. (Chapter 1)

Anatase phase of TiO2 has been shown to have very good biocompability. It was frequently observed on Ti surfaces after anodizing and thermal annealing treatments. In this report the mechanisms of the Ti to TiO and the TiO to anatase phase transitions in anodizing and annealing treatments of Ti have been studied by transmission electron microscopy. Ti thin films of two strong textures were first grown on the (001)NaCl substrates. In addition to amorphous TiO2, the anodization treatment caused the formation of TiO with an orientation relationship of (11-20)Ti // (220)TiO with Ti. The subsequent thermal annealing treatment caused the TiO to anatase transition with an orientation relationship of {200}TiO //{200}A. Pure anatase film was prepared by this method. (Chapter 2)

論文摘要(中)………………………………………………………………………Ⅰ
Abstract……………………………………………………………………………Ⅱ
Contents……………………………………………………………………………Ⅳ
List of Figure………………………………………………………………………Ⅵ


Chapter 1
Formation of Anatase and TiO from Ti Thin Film after Anodic Treatment and Thermal Annealing
1.1. Introduction……………………………………………………………………...1
1.2. Experimental……………………………………………………………………..3
1.3. Results……………………………………………………………………………5
1.4. Discussion………………………………………………………………………...9
1.5. Conclusions…………………………………………………………………..…11
Figures……………………………………………………………………………....13


Chapter 2
The Ti to TiO and TiO to Anatase Transformations Induced by Anodizing and Annealing Treatments of Ti thin film
2.1. Introduction…………………………………………………………………..27
2.2. Experimental………………………………………………………………….29
2.3. Results and Discussion……………………………………………………….31
2.3.1 Anodization of Ti film
2.3.2 Annealing of anodized film
2.3.3 Oxidation of as-deposited Ti film
2.4. Conclusions……………………………………………...……………………...37
Figures……………………………………………………………………………….38

Reference…………………………………………………………………………..47

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