本論文之研究目的是以氧化銦錫/多孔隙氧氧化銦錫之多層堆疊結構製作布拉格反射鏡於可撓式基板。在布拉格反射鏡製作於可撓式基板的製程上，高折射率的氧化銦錫薄膜是由磁式濺鍍法於室溫條件下成長；低折射率的多孔隙氧化銦錫則是由超臨界CO2流體於不同的溫度及壓力的製程條件下作用於溶凝膠狀的氧化銦錫(Sol-gel ITO)而成。濺鍍氧化銦錫薄膜與多孔隙氧化銦錫薄膜的折射率分別為2.12與1.54。在玻璃基板上6.5個period相互堆疊後，在光譜波長為475nm處的反射率可達95%，截止帶寬為110nm，整體電阻約為2.54×10-3Ωcm，在PET基板上4.5個period相互堆疊後，在光譜波長為475nm處的反射率達85%，截止帶寬為126nm，整體電阻約為2.76×10-3Ωcm。

In this study, distributed Bragg reflectors (DBRs) on flexible substrates based on dense ITO and porous ITO bilayers were demonstrated. In the fabrication of the DBRs, the high refractive index ITO films were grown at room temperature by long-throw reactive ratio-frequency magnetron sputtering. On the other hand, the low refractive index porous ITO films were obtained by applying supercritical CO2 treatment at different temperatures and pressures on the spin-coated sol-gel ITO films. The refractive indices of the dense ITO films and porous ITO films were 2.12 and 1.54, respectively. On glass substrates, the DBR with 6.5 period ITO bilayers, the optical reflectance of 95 % was achieved. The stop band and the average resistivity is 110 nm and 2.54×10-3 Ω-cm, respectively. On PET substrates, the DBR with 4.5 period ITO bilayers, exhibits the optical reflectance of 85 % . The stop band and the average resistivity is 126 nm and 2.76×10-3 Ω-cm, respectively.

第一章 導論 ................................................................................................................. 1
1-1 引言 ................................................................................................................ 1
1-2 分佈式布拉格反射鏡(Distributed Bragg reflectors) .................................... 2
1-2-1 分佈式布拉格反射鏡原理 .............................................................. 4
1-2-2 導電式布拉格反射鏡研究 .............................................................. 7
1-3 研究動機 ....................................................................................................... 8
第二章 製程材料與儀器介紹 ................................................................................... 10
2-1 氧化銦錫與溶凝膠狀氧化銦錫 ................................................................. 10
2-2 Radio-frequency(RF)磁式濺鍍系統 ........................................................ 12
2-3 超臨界系統 ................................................................................................. 14
2-4 量測儀器介紹 ............................................................................................. 17
2-4-1 四點探針(Four-point-probe) .......................................................... 17
2-4-2 薄膜特性分析儀(n&k analyzer) .................................................... 18
2-4-3 場發射型掃描式電子顯微鏡(SEM) ............................................. 18
2-4-4 原子力顯微鏡(Atomic Force Microscope) ................................... 18
2-4-5 紫外光-可見光光譜儀(UV-vis) ..................................................... 19
第三章 實驗步驟 ....................................................................................................... 20
3-1 材料成長條件 .............................................................................................. 20
3-1-1 氧化銦錫 ......................................................................................... 20
3-1-2 溶凝膠狀氧化銦錫 ......................................................................... 22
3-2 元件製程流程 .............................................................................................. 24
3-2-1 布拉格反射鏡製作於玻璃基板之堆疊流程 ................................. 26
3-2-2 布拉格反射鏡製作於可撓性基板之堆疊流程 ............................. 27
第四章 結果與討論 ................................................................................................... 28
4-1 具導電性之布拉格反射鏡分析 ................................................................. 28
4-1-1 具導電性之布拉格反射鏡光性分析 ............................................ 28
4-1-2 具導電性之布拉格反射鏡電性分析 ............................................ 30
4-1-3 具導電之布拉格反射鏡表面形貌分析 ........................................ 31
第五章 結論 ............................................................................................................... 34
參考文獻 ..................................................................................................................... 35

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