薄膜結構被廣泛應用於微機電系統、積體電路、太空及空間建築等領域，對於高精度的薄膜結構來說，壽命是影響其結構性能的主要因素之一。為了探討薄膜疲勞的效應和影響其行為模式之因素，本實驗使用之薄膜材料為鋁薄膜，並針對其進行一系列的實驗進行探討與觀察。
本研究先對鋁薄膜進行一系列靜態拉伸實驗，分別有尺寸大小、裁切方向、邊界條件不同條件，而拉伸實驗採用軸向拉伸進行速率為1mm/min，同時紀錄負載與伸長量的變化量，經由計算轉成工程應力及工程應變，並且繪製成應力－應變曲線圖，從圖中可以得到鋁箔模的楊氏係數、極限強度、降伏強度、降伏應變等各種性能，待鋁薄膜性能穩定後便進行疲勞實驗。
本研究之疲勞實驗採用應變控制進行，對鋁薄膜進行拉伸－拉伸疲勞實驗，振次頻率為0.6Hz，最大振次20000次。藉由改變最大應變量進行實驗，可以測得鋁薄膜的疲勞壽命，最後繪製成應變－壽命曲線圖。根據此圖可以觀察到疲勞效應對於鋁薄膜的影響有一定的規律性，根據此規律可以歸納出三部分：一、彈性變形階段，二、塑性變形階段，三、總和應變壽命曲線，根據這三個階段解釋鋁薄膜完整之疲勞曲線。本文對薄膜疲勞的應變與壽命進行實驗性的觀察與分析，為薄膜疲勞壽命的理論預測提供了實驗依據。

The thesis is aimed to investigate the phenomena of fatigue in the thin films. For high precision thin film structures, fatigue is one of the main factors affecting structure performance. In order to understand the fatigue mechanisms and factors that influence behavior patterns, uniaxial tension-tension low cycle fatigue (LCF) tests are suitable for different strain. From static tensile tests, we obtained the mechanical properties of thin films and mechanisms as base-line data. Then, from systematize we received fatigue tests results of the characteristics of mechanical properties and were fatigue life.
The thin films were static tensile test, test with 1mm / min rate. Record the load and the elongation of the changes. Obtain Young's modulus, ultimate strength, yield strength, yield strain and other mechanical properties. After the tensile test, then the fatigue test.
Aluminum thin films were used. They have rectangular shape, bonded on the cardboard frame, and clip pod in a micro system of tensile test machine.
Through the experimental results the thin films due to the strain-life curve different strain ratios reach certain rules. They can be divided into three stages: first, the elastic deformation phase line; two plastic deformation phase; three, the sum of strain-life curve. That explains the film complete fatigue curves based on the three stages.

論文審定書 i
致謝 ii
摘要 iii
Abstract iv
目錄 v
圖目錄 vii
表目錄 ix
第一章 緒論 1
1-1 前言 1
1-2 研究動機 1
1-3 研究目的 2
1-4 文獻回顧 3
1-5 組織與章節 5
第二章 試片製備 15
2-1 材料試片 15
2-2 儀器設備 16
2-3 試片的準備與製作 16
第三章 實驗方法 26
3-1 實驗簡述 26
3-2 拉伸實驗 26
3-3 疲勞實驗 27
第四章 實驗結果 31
4-1 薄膜拉伸實驗結果 31
4-2 薄膜疲勞測量結果 32
第五章 討論與分析 40
5-1. 鋁薄膜機械性質 40
5-1.1 拉伸實驗理論 40
5-1.2 拉伸實驗結果討論 42
5-2. 疲勞實驗 47
5-2.1 疲勞試驗理論 47
5-2.2 疲勞實驗結果討論 48
第六章 結論 53
6-1 實驗結論 53
6-2 未來展望 54
參考文獻 55
附錄 59
附件A 實驗操作細節 59
附件B 頻率0.6Hz下之速率對照表 60
附件C 拉伸實驗數據表 (0度方向) 61
附件D 拉伸實驗數據 (90度方向) 63
附件E 拉伸實驗數據表 (方法一、窄試片、0度) 65
附件F 寬試片拉伸數據 67
附件G 頻率誤差數據表 68
附件H 控制應變與壽命關係表 70

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