本論文研究使用化學汽相沉積法 (Chemical Vapor Deposition，CVD)於鎵酸鋰(LiGaO2,LGO) 基板上成長非極性氧化鋅奈米帶。本實驗使用氬氣及氧氣作為載送氣體及氣態反應源，以氧化鋅及石墨按比例均勻混合後作為反應源前驅物，且在實驗前先將基板鍍金作為催化物進行氧化鋅生長。實驗研究以鍍金的厚度、溫度、壓力、反應的時間等實驗條件，研究氧化鋅奈米材料生長之影響。
以掃描式電子顯微鏡(Scanning Electron Microscopy,SEM) 、 X光繞射儀(X-Ray Diffraction,XRD)、穿透式電子顯微鏡(Transmission Electron Microscopy, TEM)，分析及探討其表面形貌、晶體結構、生長機制，且再進一步以光致發光(Photoluminescence spectrum , PL)、陰極發光(Cathodoluminescence spectrum,CL)及拉曼(Raman)光譜了解其氧化鋅奈米材料的光學性質，以及材料應力等研究。
研究奈米材料的晶體結構及表面型態，我們發現在鍍金厚度為0.3 nm，溫度930 ℃，反應時間為10分鐘與氬氣與氧氣混合氣流量為50 sccm時，可獲得生長品質良好a-plane及m-plane的氧化鋅奈米帶狀，且由TEM結果可確定其生長機制為Vapor-liquid-solid, VLS加Vapor -solid, VS的生長模式。

In this thesis，growth of zinc oxide (ZnO) nano-belts on (010)–LiGaO2 (LGO) substrates by a chemical vapor deposition (CVD) process. Argon and oxygen are used as the carrier gas and reaction gas. The mixture powders of ZnO and graphite are used as the reaction sources. Au-film on the LGO substrate is catalyst for growth zinc oxide nano-belts. Used to study the influence of the varied growth conditions, such as deposition time, reaction pressure, growth temperature, and other experimental conditions to study the growth of ZnO nano-belts impact.
The surface morphology and crystal structure were analyzed using Scanning electron microscope (Scanning Electron Microscopy, SEM). Crystal quality of ZnO was investigated by X-ray diffraction (XRD). The growth mechanism were analyzed using transmission electron microscope (TEM). Furthermore, photoluminescence (PL), cathodoluminescence (CL) and Raman spectroscope (Raman) were used to study optical properties and the inner stress of the materials.
The a-plane and m-plane ZnO nano-belts can be obtained at the growth parameters of 930°C, 30 torr, 5 minutes, and 50 sccm of Ar/O2, 0.3 mm of Au. And the growth mechanism for ZnO nano-belts is Vapor-liquid-solid (VLS) and Vapor-solid( VS) growth mode.

目錄
論文審定書.............................................................................................................. i
致謝....................................................................................................................... ii
摘要....................................................................................................................... iii
Abstract................................................................................................................. iv
目錄........................................................................................................................ v
圖目錄................................................................................................................... vii
表目錄.................................................................................................................. viii
第一章 緒論...................................................................................................... 1
1-1 引言 ................................................................................................................ 1
1-2 研究動機.......................................................................................................... 1
第二章 理論基礎文獻回顧.................................................................................. 3
2-1 氧化鋅之結構與基本性質 .................................................................................. 3
2-2 鎵酸鋰之結構與性質.......................................................................................... 6
2-3 化學氣相沉積法.................................................................................................7
2-4 Vapor-Liquid-Solid(VLS) 成長機制法.................................................................. 10
第三章 實驗內容 ................................................................................................. 13
3-1 實驗流程 ....................................................................................................... 14
3-2 實驗裝置 ....................................................................................................... 15
3-3 實驗方法與步驟 ............................................................................................. 16
3-4 量測設備簡介 ................................................................................................ 18
第四章 實驗結果 ............................................................................................. 20
4-1 基板鍍金厚度氧化鋅奈米材料的影響................................................................. 20
4-2 成長溫度對氧化鋅奈米材料的影響. ................................................................... 23
4-3 氧氣流量對氧化鋅奈米材料的影響………………….............................................. 26
4-4 反應時間對氧化鋅奈米材料的影響………………………....................................... 29
4-5 XRD結果分析. ................................................................................................ 31
4-6 穿透式電子顯微鏡TEM觀察與分析.................................................................... 32
4-7 光激發光譜PL (Photoluminescence spectrum)結果分析.......................................42
4-8 陰極發光光譜CL (Cathodoluminescence spectrum)結果分析................................43
4-9 拉曼光譜(Raman spectrum, Raman) 結果分析........... ........................................44

第五章 結論………………………………................................................................ 45
第六章 參考文獻 ................................................................................................46

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