本論文主要是以光柵耦合器之耦光方式進行低同調測量及探討SOI積體光學元件特性。透過環型共振腔的波長選擇性及小半徑的高FSR特性，它是具有潛力製作一個高FSR的DWDM波長開關選擇系統。藉由光柵耦合器的近垂直耦光特性，其具有即時監測製程狀況及元件製作完畢後免切片、拋光、研磨等額外步驟及花費之優點，另一方面，對於環形共振腔參數獲取上，低同調干涉量測不但可以避免背景雜訊(Fabry-Perot)的影響也能更透徹了解環形共振腔不同路徑的暫態響應。論文第一章將闡明論述研究背景、研究動機及介紹傳統波長掃描探討環型共振腔參數的方式。第二章將針對光柵耦合器進行設計、模擬、量測和分析等探討將其應用在低同調干涉量測上。第三章介紹低同調干涉量測之架設系統、分析方法與步驟、目前量測環型共振腔上所面臨到的問題及環形共振腔參數分析之結果，本論文之重要內容如下: 由於低同調干涉量測需要同時包含1.55μm波段及1.3μm波段進入量測系統，而光柵耦合器卻具有頻寬限制之問題，因此我們透過設計光柵耦合器使它在1.55μm波段使用TE極化而1.3μm波段使用TM極化，成功克服頻寬限制之問題。另一方面，透過低同調干涉量測分析環型共振腔時，正常來說當分析的干涉波包數越多能夠獲得更精確的參數，但是我們發現當繞行圈數太多時，背景雜訊所造成的較差訊雜比會造成參數分析上的誤差，並且對於測量小半徑環形共振腔時，由於光柵耦合器1.55μm波段頻寬限制之問題，也進而會造成相鄰干涉波包之重疊，更進一步影響參數分析之結果。因此我們透過在分析上使用Window method的方法適當擷取干涉波包的寬度，避免重疊之部分來獲得較精確的參數，或可透過半高寬為144nm的光柵耦合器設計，將能夠更進一步解決干涉波包重疊的問題。最後透過量測及分析高度為220 nm、寬度為450 nm而不同半徑及耦合間距的環型共振腔，再藉由低同調干涉量測分析之參數來重建頻譜與波長掃描頻譜進行比較及探討不同半徑及耦合間距之參數趨勢，藉此來了解量測及參數分析結果的準確性。

The thesis is based on low coherence interferometric measurement study of SOI micro-ring resonator via grating coupler. Due to highly wavelength selectivity and large FSR of SOI micro-ring resonator, it is a potential structure for large FSR DWDM system. Owing to the nearly vertical coupling of grating coupler, it can be used to monitor the fabrication result immediately, on the other hand. for the obtain the micro-ring resonator parameter, low coherence interferometric measurement not only can avoid the fabry-perot effect but also comprehend the transient state of ring resonator in each circumference completely. The research background, motivation and the way of traditional wavelength scanning will be described in the first chapter, the design, simulation, measurement and analysis of grating coupler in the second chapter, then the system setup, analysis method and step, the problem that we faced and analysis result of low coherence interferometric measurement in the third chapter.
However, the LCIM technique utilizes two distinct wavelength source, 1.55μm and 1.3μm, the grating coupler has bandwidth limitation, it is hard to efficiently coupler both signals into device simultaneously, so we have designed the grating coupler with a central wavelength at 1.55μm for TE polarization and a central wavelength around 1.3μm for TM polarization. On the other hand, using the low coherence interferometric study of SOI micro-ring resonator, the more interferograms we analyzed the more correct parameters we can obtained normally, but we find the more propagation distance the more bad signal to noise ratio that will cause the parameters error. Moreover, for the measurement of small radius ring resonator, the grating coupler 1.55μm bandwith limitation can cause the envelope overlap and affect the parameters accuracy. Through using the novel window method process analysis to decide the envelope width to avoid the envelope overlap, the broadband grating coupler designed which bandwidth is 144nm, the measurement and analysis problem can be overcodme. Finally, we measure and analyze the different radius and gap ring resonator which height is 220nm and width is 450nm, then using the LCIM analysis parameter to reconstruct spectrum and compare with scanning spectrum and investigate the parameter trend of different radius and gap, so we can comprehend the accuracy of measurement and analysis result.

論文審定書 i
誌謝 iii
摘要 iv
Abstract v
第一章 緒論 1
1.1. 研究背景 1
1.2. 研究動機 2
1.3. 波長掃描探討環型共振腔 4
1.3.1環型共振腔基本特性 5
1.3.2環型共振腔理論公式推導與應用 8
1.4. 論文概述 17
第二章 光柵耦合器 18
2.1. 繞射光柵 18
2.2. 光柵耦合器理論 20
2.3. 光柵耦合器設計與模擬 24
2.3.1 FDTD 理論 24
2.3.2均勻週期光柵耦合器 29
2.3.3寬頻光柵耦合器 32
2.4. 量測結果與討論 34
2.4.1量測系統架構 34
2.4.2量測流程 35
2.4.2量測結果與討論 36
第三章 低同調干涉量測 38
3.1. 量測系統架構與校準 38
3.2. 元件量測流程圖 42
3.3. 分析理論與步驟 43
3.3.1分析理論[11]: 44
3.3.2分析步驟 47
3.4. 量測結果與討論 53
第四章 總結 61
參考文獻 63

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