本論文研究氧化鎢(WO3)之各種形式粉末奈米結構，並塗佈於矽基板上製作乙醇氣體感測器。透過水熱法生長氧化鎢奈米片(WO3 nanosheet)，過程中調配酸性添加物，聚合成氧化鎢奈米花(WO3 nanoflower)以及氧化鎢奈米片堆(WO3 nanostacked-sheets)。分別與P型矽基板形成氧化鎢奈米結構WO3 nanostructure/p-Si (n-p)的乙醇感測元件並且進行物性及電性之量測。文中主要探討氧化鎢奈米材料的聚集與材料對乙醇感測的優勢，進而加強感測器對乙醇之感測能力。
實驗結果顯示，聚集堆疊之奈米結構元件因為具有較高比表面積，相較於奈米片更有利於乙醇氣體之感測。其中以酸性添加物製作之氧化鎢奈米花 WO3 nanoflower/p-Si以及氧化鎢奈米片堆WO3 nanostacked-sheets/p-Si之乙醇感測器在150oC下對800ppm乙醇氣體具有830%以及1020%的響應度，響應時間分別為51秒和21秒。因此，提高奈米結構的維度可增加較高的比表面積，而有利於乙醇氣體感測並提高響應度。

In this thesis, various forms of tungsten oxide (WO3) powder nanostructures are discussed and coated on silicon substrates for ethanol gas sensors. WO3 nanosheets are prepared by hydrothermal method. Furthermore, WO3 nanoflowers and nanostacked-sheets are transformed by adding different acid additions. These nanostructures are coated on p-type silicon substrate to form ethanol sensing elements (WO3 nanostructure/p-Si) and measured their physical and electrical properties. This research discusses the aggregation of WO3 nanomaterials and the advantages of the materials for ethanol sensing. Thus, the nanostructures enhance the sensing ability of the sensor to ethanol gas.
According to the experimental results, the aggregated stacks of nanostructure are more favorable to ethanol gas sensing due to their large surface area. Among the fabricated devices, WO3 nanoflower and nanostacked-sheets have high responsivity of 832% and 1020%, respectively under 150 oC and 800 ppm ethanol gas. The response times of the sensors are 51s and 21s, respectively. Therefore, the aggregated nanostructures have improved the devices’ sensitivity by providing higher surface-to-volume ratios.

論文審定書 i
誌謝 ii
摘要 iii
Abstract iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒 論 1
1-1前言 1
1-2乙醇氣體介紹 1
1-3乙醇感測器介紹 2
1-4 奈米結構 3
1-5 金屬氧化物半導體與感測原理 4
1-6 氧化鎢 5
1-6-1 氧化鎢的構造與簡介 5
1-6-2 氧化鎢的應用 5
1-7論文架構 6
第二章 理 論 7
2-1 粉末生長機制 7
2-1-1 水熱法 7
2-1-2 氧化鎢的合成 7
2-2氣體感測器工作原理 8
2-2-1 工作溫度 8
2-2-2 電阻式氣體感測器 9
2-2-3 PN異質接面感測器 9
2-3 酸鹼金屬氧化物對乙醇分解的影響 11
2-4 氣體響應度的定義與探討 12
2-5 蒸鍍機 13
2-6 量測機台 14
2-6-1 掃描式電子顯微鏡(Scanning Electron Microscope，SEM) 14
2-6-2 X光繞射儀(X-ray diffractometer; XRD) 15
2-7 氣體量測系統 16
第三章 實 驗 步 驟 與 材 料 選 擇 18
3-1 材料選用 18
3-2 電極製作之材料與系統 19
3-3 水熱法生長與量測相關機台 19
3-3-1 掃描式電子顯微鏡(FE-SEM) 19
3-3-2 XRD粉末繞射儀 20
3-3-3 氣體量測系統 20
3-4 製成步驟與參數調配 21
3-4-1基板清洗步驟與說明 21
3-4-2 水熱法生長氧化鎢奈米片奈米結構 22
3-4-3 生熱法生長氧化鎢奈米花奈米結構 22
3-4-4 水熱法生長氧化鎢奈米片堆奈米結構 23
3-4-5 電極鋁蒸鍍 24
第四章 結 果 與 討 論 25
4-1 物性特性 25
4-1-1 氧化鎢奈米片生長結果與分析 25
4-1-2 氧化鎢奈米花生長結果與分析 26
4-1-3 水熱法生長氧化鎢奈米片堆 26
4-2 奈米結構生長機制分析 27
4-2-1 奧斯特瓦爾德熟成(Ostwald Ripening) 27
4-2-2 生長機制分析 27
4-3 電性分析 28
4-3-1 N(氧化鎢奈米片)/P(矽)結構電性分析 28
4-3-2 N(氧化鎢奈米花)/P(矽)結構電性分析 29
4-3-3 N(氧化鎢奈米片堆)/P(矽)結構電性分析 29
4-4 元件結構與電性理論探討 30
4-4-1 氧化鎢(WO3)奈米片元件結構之電性結果探討 30
4-4-2 氧化鎢(WO3)奈米花元件結構之電性結果探討 31
4-4-3 氧化鎢(WO3)奈米片堆元件結構之電性結果探討 31
4-4-4 元件能帶圖之電性結果探討 32
4-4-5 元件與氣體關係之電性結果探討 32
4-5 元件工作溫度分析 33
4-6 元件響應時間與恢復時間分析 34
第五章 結 論 與 未 來 展 望 35
5-1結論 35
5-2 未來展望 36
參考文獻 37
附表 41
附圖 48

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