本研究將六方晶系纖鋅礦結構氮化鋁多晶靶材置於真空及四乙基正矽酸鹽液體中，進行脈衝雷射剝熔蝕，並且利用X光繞射、電子顯微鏡以及光譜儀，鑑定所得凝固顆粒及奈米凝聚物的結晶相種類、聚簇行為與光譜特徵。
在真空轟擊纖鋅礦結構氮化鋁靶材並且以火棉膠承接所得顆粒的實驗，產生了C-N摻雜的γ-Al2O3-x與C-N-O摻雜的面心立方結構fcc-Al，或多或少含有順晶缺陷集團，共同造成特徵光澤、X光光電子能譜，以及UV-可見吸收光譜。其中具有尖晶石結構的γ-Al2O3-x凝固顆粒幾乎不出現平整的(hkl)面；而fcc-Al之奈米凝聚物，則有發達的{111}鄰近面，相互聚簇成為有殘留次晶界的多晶。在這種單純由氮化鋁靶材提供Al與N原子的雷射電漿圍冪下進行凝結與凝固，並未合成原本的纖鋅礦結構AlN，但是於真空環境中通入適當氮氣，藉以增加氮氣逸度，結果除了相互平行磊晶聚簇C-N-O摻雜的fcc-Al之外，居然產生新穎尖晶石態的C-O摻雜Al2N1-x也是相互平行磊晶聚簇。
另一方面，於四乙基正矽酸鹽溶液中轟擊纖鋅礦結構氮化鋁靶材，則形成大量C-Si-H摻雜的非晶態AlO1-x球狀顆粒，直徑約20 ~ 200 nm。於同樣四乙基正矽酸鹽溶液中轟擊金屬fcc-Al，則形成尖晶石態C-Si-H摻雜因此含順晶缺陷的γ-Al2O3-x奈米凝聚物，彼此依{111}與{100}表面平行磊晶聚簇成球狀顆粒，經電子束照射幾十分鐘之後，則出現聚片雙晶進而變成非晶質。在四乙基正矽酸鹽溶液轟擊氮化鋁和金屬鋁靶材，所合成的顆粒具有不同UV-可見吸收光譜。

This research is about pulsed laser ablation (PLA) of hexagonal wurtzite-type AlN polycrystal in vacuum and tetraethyl orthosilicate (TEOS) to form solidified particulates and nanocondensates for X-ray diffraction, electron microscopy and optical spectroscopic characterizations.
The product produced in vacuum and accumulated on a C-coated collodion film (regardless of Q-switch or free run mode being adopted for PLA) turned out to be C-N doped γ-Al2O3-x and C-N-O doped fcc-type Al with characteristic optical luster, XPS spectrum and UV-visible absorbance. The spinel-type γ-Al2O3-x occurred as solidified particulate hardly with (hkl) facets. The fcc-type Al particulates and nanocondensates however have well-developed ~{111} vicinal surface for mutual coalescence as polycrystal with relic subgrain boundaries. A higher N fugacity by N2 gas purging under a specified flow rate during PLA of AlN in vacuum caused the formation of novel spinel-type C-O doped Al2N1-x besides the C-N-O doped fcc-Al. Such nonrefractory nanocondensates more or less with paracrystalline distribution of defect clusters tended to be parallel epitaxially coalesced into unity leaving abundant relic of the subgrains and dislocations.
By contrast, the sample produced by PLA of AlN in TEOS consists of C-Si-H doped AlO1-x amorphous phase in the form of spherical particles ranging from 20 to 200 nm in diameter. Whereas PLA of metal Al in TEOS, caused additional C-Si-H doped γ-Al2O3-x nanocondensates with paracrystalline distribution of defect clusters and well-developed {111} and {100} surfaces for parallel-epitaxial coalescence as a spherical particle which became polysynthetic twinned and then amorphized upon electron irradiation for tens of minutes. The particles produced by PLA of AlN and Al in TEOS showed different UV-visible absorbances.

誌謝 iii
摘要 v
目錄 vii
圖目錄 viii
表目錄 xiv
附錄目錄 xv

壹、前言 1
貳、實驗流程 5
參、實驗步驟及方法 7
肆、實驗結果 10
伍、討論 16
陸、結論 20
柒、參考文獻 21

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