本論文首次做出利用埋藏式波導及micro-prism波導結構組成的Y-branch光學分光器。此132分光器結構組成包含：擴張光傳播的區域、傳統Y-branch分光區、以及含有兩個micro-prisms bends之大角度偏折波導。
在132分光器的製程上，首先必須利用PECVD於Si基板上成長一層約10μm厚的二氧化矽(SiO2)，而元件的導光區域是在SiO2批覆層上蝕刻出槽溝，並且填入導光高分子材料(BCB polymer)，最後在做完回蝕製程時，可更進一步在我們的元件上塗鋪薄薄的一層高分子材料(SOG)，以便來平坦表面。在量測上，我們將針對1.3μm的波長作量測，量得波導的傳輸損耗0.47dB/cm；而量測得132分光器最小之功率傳輸效率為3.7dB。在論文中，也將討論利用BPM軟體所模擬結果。

A Y-branch optical power splitter based on the buried waveguide and the micro-prism waveguide bends is presented. The 132 splitter consists of a beam expanding region, a conventional Y-branch region, and two micro prisms providing large angle waveguide bends of device.
The 132 splitter are fabricated by first depositing a 10-μm-thick PECVD oxide (SiO2) on Si s ubstrates. The guiding core of the device was fabricated by etching trenches in SiO2 cladding, and filled with Benzocyclobutene (BCB) polymer. After etch-back process, the thin layer of spin on glass (SOG) is used to further planarized the surface of the device. The propagation loss of the waveguide is 0.47dB/cm at λ=1.3μm. The normalized power transmission efficiency of the 132 splitter as large as 3.7dB was obtained. Simulation results based on beam propagation method (BPM) of the splitter is also presented.

第一章 簡介 1
第二章 理論模擬與應用 6
2-1. 埋藏式高分子波導之結構分析 6
2-2. Micro-prism偏折結構之分析與討論 11
2-3. 應用偏折於132 Y-branch分光器之分析 17
第三章 波導製作 23
3-1. 埋藏式高分子BCB波導之製程流程 23
3-2. 製程結果與討論 31
第四章 波導量測結果與分析 35
4-1. 波導的量測 35
4-2. 量測結果 37
第五章 結果與討論 4

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