本實驗利用鈦為靶材，NaCl單晶(011)為基板進行離子束濺鍍法來製鈦薄膜，試圖鍍出完全TiO單相(011)薄膜，之後做不同溫度時間條件大氣熱處理，使TiO轉變成銳鈦礦，研究TiO至銳鈦礦之相變化機構。
經選區繞射圖鑑定，TiO初鍍膜為(011)膜，進一步熱處理生成銳鈦礦晶向關係為(012)A//(011)TiO，(200) A//(200) TiO、(024 ̅ ) A //(022 ̅) TiO但經計算仍夾13o角度差使相轉變困難，在相變化的過程中原有之薄膜卻逐漸轉向TiO (001) TiO及銳鈦礦(001) A之薄膜，此原因可能因為(001)且較低之表面能。

Ion beam sputtering of Ti target was used to prepare epitaxial (011) TiO film on a single crystal NaCl (011) surface.The specimen were then annealed at different temperature in atmosphere to turn them into anatase to study the transformation mechanism by Transmission Electron Microscopy.


The TiO films were identified to be (001) by electron diffraction. Anatase thin film of (012) surface was formed by annealing the anatase film and their orientation relationship in (200) A //(200) TiO, and (024 ̅) A nearly parallel to the (022 ̅) TiO by a difference of 13.In the transformation process, the original film gradually twins its orientation into mixed (001) A and (001) TiO film. this is probably because of the lower (001) surface energy.

摘要 i
Abstract ii
目錄 iii
表目錄 v
圖目錄 v
1前言 1
1.1 鈦-氧系統 1
1.2一氧化鈦至銳鈦礦之間的轉變 2
1.3 TiO沉積立方晶(011)平面之文獻回顧 4
1.4實驗目的 5
2. 實驗方法 6
2. 1 離子束濺鍍 6
2.2實驗儀器與材料 7
2.3實驗步驟 8
2.3.1試片的製作步驟 8
2.3.2儀器分析 9
3.結果 11
3.1 濺鍍基板溫度之影響 11
3.2.氧化處理 12
3.2.1 A，B，C組試片退火 12
3.2.2 D組試片退火 14
4. 討論 15
4.1 初鍍膜之形成 15
4.2.氧化溫度時間對TiO至Anatase相變化至影響 16
4.2.1 A、B、C組試片 16
4.2.2 D組試片 17
4.3 Anatase 、TiO介面之分析 19
5.結論 20
6.參考文獻 21

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