在本論文中，主要目的為研究利用偏折埋藏式波導結構所設計之可調變光衰減器。此衰減器所使用之結構乃為二次偏折結構，分為三個波導部份，而於分開處即偏折處插入兩個微稜鏡（microprism）區間使光偏折。
元件衰減原理是基於材料的熱光效應（Thermo-optical effects），在斜邊部份導光材料折射係數的改變會影響於其中之光場傳播方向進而達到衰減輸出的目的，詳細的理論模擬部份已由BPM-CAD計算完成。此外，在實驗部份已完成二次偏折波導之製作以及各角度的損耗量測。其針對1.3mm的波長量測得到的結果為，在經由兩次10度偏折後仍然可以保有65.7％的效率；而埋藏式通導結構波導所量得的傳輸損耗為0.48dB/cm。

A novel variable optical attenuator based on buried polymer waveguides and waveguide bends is proposed. The attenuator consists of three waveguide sections, separated for waveguide bending by two embedded micorprisms.
The attenuation of device was achieved by steering the beam propagation direction in the waveguide by thermo-optical effects. Detailed simulation results using the Beam Propagation Method are presented. In addition, radiation losses of the waveguide bends are experimentally investigated. After two-10° bends, the normalized insertion losses as low as 65.7％ are obtained. The propagation loss of the buried waveguide is 0.47dB/cm at l=1.3 mm.

第一章　導論
第二章　理論分析與模擬
2-1 micro-prism偏折結構與衰減原理　 　　　　
2-2 以BCB為導光材料之衰減器分析 　　　　
2-3 以OPIN1005為導光材料之衰減器分析 　　　
2-4 光衰減器之輸出特性結果與分析 　　　　
第三章 波導元件之製作 　　　　　　　　　
3-1 埋藏式波導的製作流程 　　 　 　
3-2 實驗結果與討論 　　　 　　　
第四章 波導特性與偏折損耗的量測 　　　　　
4-1 量測系統與方法 　　　　　　
4-2 量測結果 　　　　　 　
第五章　結論 　　　　　　　　　　　

1.R. N. Castellano, “Profile Control in Plasma Etching of SiO2,” Solid State Technology, pp.203-206, 1984.
2.S. Grigoropoulos, E, Gogolides, A. D. Tserepi, and A. G. Nassiopoulos, “Highly Anisotropic Slicon Reactive Ion Etching for Nanofabrication Using Mixtures of SF6/CHF3 Gases,” J. Vac. Sci. Techonol. B 15(3), pp.640-645, 1997.
3.L. Y. Tsou, “Effect of Photoresist on Plasma Etching,” J. Electrochem. Soc., Vol. 136, No. 8, pp.2354-2356, 1989.
4.G. Carlotti and G. Socino, “Elastic Properties of Spin-On Glass Thin Films,” Appl. Phys. Lett. 66 (20), pp. 2682-2684, 1995.
5.R. Hsiao *, J. Carr, “Si/SiO2 Etching in High Density SF6/CHF3/O2 Plasma,” Materials Science and Engineering B52, pp.63-77, 1998.
6.Ming Zhou*, “Low-Loss Polymeric Materials for Passive Waveguide Components in Fiber Optical Telecommunication,” Proceedings of SPIE Vol.4580, pp. 83-94, APOC 2001.
7.Han-Bin Lin, Yih-Bin Lin, and Way-Seen Wang, Member, IEEE, “Analysis of Abrupt Waveguide Bend with Low-Index Microprism,” IEEE Journal of Quantum Electronics, Vol. 34, No. 12, pp. 2291-2297.1998.
8.R.J. Shul. C.T. Sullivan and G.B. McClellan, “Anisotropic ECR Etching of Benzocyclobutene,” Electronics Letters, Vol. 31, No. 22, pp.1919-1921, 1995.
9.Koichi Hirayama, Member IEEE, and Masanori Koshiba, Senior Member, IEEE, “A New Low-Loss Structure of Abrupt Bends in Dielectric Wavguide,” Journal of Lightwave Technology, Vol. 10, No.5, pp.563-568, 1992.
10.Han-Bin Lin, Jung-Young Su, Pei-Kuen Wei, and Way-Seen Wang, Member, IEEE, “Design and Application of Very Low-Loss Abrupt Bends in Optical Waveguides,” IEEE Journal of Quantum Electronics, Vol. 30, No. 12, pp. 2827-2835, 1994.
11.Yu-Pin Liao, Member, IEEE, and Ruei-Chang Lu, “Design and Fabrication of Wide-Angle TE-TM Mode Splitter in Lithium Niobate,” IEEE Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 1, pp.88-92, 2000.
12.Sang-Shin Lee, Yong-Sung Jin, Member, IEEE, OSA, and Yung-Sung Son, Member, OSA, “Variable Optical Attenuator Based on a Cutoff Modulator with Tapered Waveguides in Polymers,” Journal of Lightwave Technology, Vol. 17, No. 12, pp.2556-2561, 1999.
13.Sang-Shin Lee, Yong-Sung Jin, Yung-Sung Son, and Tae-Kyung Yoo, “Polymeric Tunable Optical Attenuator with An Optical Monitoring Tap for WDM Transmission Network,” IEEE Photonics Technology, Vol. 11, No. 5, pp.590-592, 1999.
14.M. Allard, R. A. Masut, and M. Boudreau, “Temperature Determination in Optoelectronic Waveguide Modulators,” Journal of Lightwave Technology, Vol. 18, No. 6, pp.813-818, 2000.
15.B. Barber, C. R. Giles, V. Askyuk, R. Ruel, L. Stulz, and D. Bishop, “A Fiber Connectorized MEMS Variable Optical Attenuator,” IEEE Photonics Technology Letters, Vol. 10, No. 9, pp.1262-1264, 1998.
16.Min-Cheol Oh, Member, IEEE, Hyung-Jong Lee, Myung-Hyun Lee, Joo-Heon Ahn, Member, IEEE, and Seon Gyu Han, “Asymmetric X-Junction Thermooptic Switches Based on Fluorinated Polymer Waveguides,” IEEE Photonics Technology Letters, Vol. 10, No. 6, pp. 813-815, 1998.
17.Sang-Shin Lee, Jong-Uk Bu, Seung-Yeob Lee, Ki-Chang Song, Chil-Geun Park, and Tae-Sik Kim, “Low-Power consumption Polymeric Attenuator Using a Micromachined Membrane-Type Waveguide,” IEEE Photonocs Technology Letters, Vol. 12, No. 4, pp.407-409,2000.
18.許志宏，“建構在矽基板上之新型埋藏式複合高分子波導，” 國立中山大學光電工程研究所碩士論文，2001。
19.黃亦德，“應用佛列斯涅折射原理建構偏折之埋藏式高分子複合波導，” 國立中山大學光電工程研究所碩士論文，2001。
20.莊淑雯，“建構在玻璃上埋藏式高分子波導，” 國立中山大學光電工程研究所碩士論文，2000。