本論文的目的是利用光纖與Ultra-thin TFF(Thin-film Filter)為基礎，並且利用V槽(V-groove)以及U槽(U-groove)將其積體化整合(Hybrid Integration)至矽工作台(Silicon Bench)上。輸入光源我們將採取1310 nm及1550 nm兩種通訊用的光源，1310 nm入射光源將穿透TFF傳輸至另一光纖輸出端，而1550 nm入射光源將被TFF反射至另一多模光纖，再由光檢器接收。
本論文中我們將製作兩種不同的光收發模組，第一種雙向光收發模組是以單模光纖為傳輸通道，1310 nm入射光源經單模光纖穿透TFF傳輸至另一單模光纖輸出端，量得的插入損耗為5.66 dB，而1550 nm入射光源被TFF反射至另一多模光纖，量得的插入損耗為0.46 dB。
第二種雙向光收發模組則改用光纖透鏡作為傳輸通道，1310 nm入射光源經光纖透鏡穿透TFF傳輸至另一光纖透鏡輸出端時，量得之插入損耗為0.98 dB，而1550 nm入射光源被TFF反射至另一多模光纖，量得的插入損耗為0.31 dB。

The primary target of this paper is to fabricate bidirectional transceiver modules based on single mode fiber (SMF) and ultra-thin thin-film filter (TFF). Two major components, namely, SMF and ultra-thin TFF are hybrid integrated on the silicon bench using V-groove and U-groove techniques. A 1310 nm wavelength light was launched into the input SMF of the module. After passing through the filter, the light was received by the output SMF of the module. On the other hand, a 1550 nm wavelength light input to the SMF is reflected by the filter and collected by the output multimode fiber (MMF).
Transceiver modules using two different fiber structures were fabricated. The first kind of the module uses standard SMF for 1310 nm light transmission. The insertion loss of the module for the 1310 nm wavelength light was 5.66 dB. In the second kind of the module lens fibers were used to replace the standard SMF. The insertion loss for the 1310 nm wavelength light was reduced to 0.98 dB. A reduction of 4.6 dB was achieved. For both modules, the insertion loss for the 1550 nm wavelength light reflected from the filter was around 0.5 dB.

第一章 導論 1
第二章 結構特性與模擬分析 5
2-1 雙向光收發模組之基本結構 5
2-2 以單模光纖為傳輸通道之理論模擬 10
2-3 以埋藏式光波導(一)為傳輸通道之理論模擬 12
2-4 以埋藏式光波導(二)為傳輸通道之理論模擬 17
2-5 以埋藏式光波導(三)為傳輸通道之理論模擬 21
2-6 模擬結果與討論 25
第三章 量測分析 26
3-1 結構(一)之量測分析 26
3-2 結構(二)之量測分析 29
3-3 結構(三)之量測分析 32
3-4 結構(四)之量測分析 35
3-5 量測分析與討論 38
第四章 元件之製作 39
4-1 矽工作台製作流程 39
4-2 超薄薄膜濾波器與光纖封裝 46
4-3 製程分析與討論 49

第五章 雙向光收發模組之量測與分析 51
5-1 雙向光收發模組(一)之光學特性量測 51
5-2 雙向光收發模組(二)之光學特性量測 55
5-3 量測結果與分析 58

第六章 實驗結果與討論 59

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