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博碩士論文 etd-0615105-021629 詳細資訊
Title page for etd-0615105-021629
論文名稱
Title
埋藏式光波導與單模光纖以被動式對準技術建構於矽工作平台上
Passive Alignment of Buried Optical Waveguide and Single Mode Fiber on the Silicon Bench
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
100
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2005-06-03
繳交日期
Date of Submission
2005-06-15
關鍵字
Keywords
有機無機混成材料、矽工作平台、V槽、單模光纖、U槽、被動式對準、光波導
V-groove, Organic-inorganic hybrid materials, Single mode fiber, U-groove, Waveguide, Silicon bench, Passive alignment
統計
Statistics
本論文已被瀏覽 5659 次,被下載 25
The thesis/dissertation has been browsed 5659 times, has been downloaded 25 times.
中文摘要
本論文是將光波導與單模光纖以被動對準的方式,整合於矽工作平台之上,此種技術可以降低元件組裝的複雜度及提高製程良率以達量產的目的。在整個模組架構中,以單模態埋藏式光波導結構為基礎,波長1.31μm半導體雷射作為輸入光源,由半導體雷射發送的光信號可經由光波導進入單模光纖作傳輸。
本模組結構包括兩個主要部分,分別是埋藏式光波導(Buried Waveguide)與承載單模光纖之矽工作平台(Silicon Bench)。埋藏式光波導以二氧化矽厚膜作為底披覆層(Bottom Cladding),利用黃光及乾蝕刻技術在SiON上蝕刻出一溝槽,而後再旋鋪有機無機混成材料(Organic-inorganic hybrid materials)作為導光層(Core),最後在旋鋪一層折射率較小的有機無機混成材料作為頂批覆層(Top Cladding),降低傳輸損耗;在矽工作平台上我們利用濕蝕刻技術,蝕刻出固定光纖的V槽(V-groove)結構而後切出U槽(U-groove),以精確放置單模光纖。光波導與矽工作平台結構完成後,最後以複合式積體化(Hybrid Integration)的方式將單模光纖放置於V槽中,即完成模組的製作。
Abstract
The objective of this thesis is to integrate the optical waveguide and single mode fiber in a passive alignment way on a silicon bench. This technique can reduce the complexity of packaging the individual components and increase yield of the module in order to achieve the goal of the mass production. In this module, buried waveguide structure was used for light guidance. A 1.31µm semiconductor laser was used as the input light source. Light signal launched by semiconductor laser is transferred through the buried waveguide into the single mode fiber.
This module structure is consisted of two major parts, namely, the buried waveguide and the silicon bench. Buried optical Waveguide uses SO2 as the bottom cladding. Conventional photolithography procedures and etching technique were used to form a trench on the SiO2 cladding. The waveguide core was fabricated by coating the organic-inorganic hybrid materials into the trench. Finally, an organic-inorganic hybrid materials with a refractive index smaller than that of the core is used as the top cladding. The silicon benches were obtained by etching V-groove and saw-cutting U-groove on the silicon substrates for fixing the fiber. The patterning of buried waveguide and silicon V-groove were fabricated by a single optical mask procedure. Therefore accurate alignment between the waveguide and the single mode fiber can be obtained.
目次 Table of Contents
第 一 章 導論 1

第 二 章 模組結構設計 5
2-1 埋藏式光波導之結構特性與分析 7
2-2 有機無機混成材料之分析與應用 10
2-2-① 有機無機混成材料之特性與應用 10
2-2-② 導光層與披覆層之光學與材料特性 12
2-3 埋藏式光波導之理論模擬 19
2-4 V-groove結構特性與分析 22

第 三 章 模組製作 27
3-1 埋藏式光波導與V-groove整合製作流程圖 27
3-2 埋藏式光波導與V-groove整合製程說明 29
3-2-① 覆層材料成長 29
3-2-② 被動式對準製程 31
3-2-③ V-groove蝕刻 34
3-2-④ 光波導與頂披覆層製作 37
3-2-⑤ U-groove切割 42
3-3 製程分析與討論 56
第 四 章 模組特性量測 63 4-1 埋藏式光波導與V-groove之模組封裝流程圖 63
4-2 埋藏式光波導與V-groove之模組封裝 64
4-2-① 光波導封裝 64
4-2-② 光波導端面切割與研磨拋光 66
4-2-③ 單模光纖封裝 70
4-3 埋藏式光波導與V-groove之模組光學特性量測 74
4-3-① TE/TM光源光學系統架設 74
4-3-② 模組光學量測系統架設 75
4-3-③ 模組量測結果 80 4-4 量測結果分析與討論 83
4-4-① 模組量測結果分析 83
4-4-② 模組量測結果討論 84
第 五 章 實驗結果與討論 85

參考文獻 86
參考文獻 References
1. Hiroaki Okano, Akihiro Hiruta, Haruyasu Komano,“Hybrid Integrated Optical WDM Transceiver Module for FTTH Systems”, U.D.C. 621.372.88.029.72.049.776

2. Casey F. Kane and Robert R. Krchnavek, “Benzocyclobutene Optical Waveguides,” IEEE Photonics Technology Letters, Vol.7, No.5, pp.535-537, 1995.

3. Takashi YAMADA, Toshikazu HASHIMOTO, Takaharu OHYAMA, “New Planar Lightwave Circuit(PLC)Platform Eliminating Si Terraces and Its Application to Opto-Electronic Hybrid Integrated Modules”, IEICE TRANS. Electron., Vol. E84-C, No. 5 May.

4. J.Y. Lin, I.C. Yang, P.C. Lee and A.K. Chu, ”Compact 1×2 optical couplers based on buried optical waveguides, ” Institute of Electro-
optics engineering, National Sun Yat-Sen University

5. G.T. Reed,″Methods of measurement of passive integrated optical waveguides,″Measurements on Optical Devices,IEE Colloquium on , pp. 2/1 -2/7,Nov 199

6. A.Moujoud , Z. Saddiki, T.T. ouam AND S.I. Najafi, ″Measurement of the refractive-index variations with temperature of hybrid sol–gel glasses″, Thin Solid Films , pp. 161–165, July 2002.

7. A.J.Beuhler,D.A.Wargowski, K.D. Singer, T. Kowalczyk, ″Fabrication of low loss polyimide optical waveguides using thin-film multichipmodule process technology,″44th Electronic Components and Technology Conference, pp. 618 -620, May 1994.

8. R. Moosburger, R. Hauffe, U. Siebel,” Passive Alignment of Single-Mode Fibers to Integrated Polymer Waveguide Structures Utilizing a Single Mask Process”, IEEE Photonics Technology Letters, Vol. 11, No. 7, Juy 1999.

9. 吳銘仁,“Single Mode Buried Waveguides on Silicon Substrate”, 國立中山大學光電工程研究所碩士論文,2003。

10. 曾立豐,“ PECVD Oxide with Low Nitrogen Content for High Performance Waveguide Device ”,國立中山大學光電工程研究所碩士論文,2003。

11. 吳欲誌,“Fabrication of Single Mode Buried Waveguides Based on Hybrid Sol-gel Glasses”,國立中山大學光電工程研究所碩士論文, 2004。

12. 潘群豪,“Interconnection of Laser Diode and Single Mode Fiber using Buried Waveguide Structure on the Si Bench”,國立中山大學光電工程研究所碩士論文,2004。
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