Responsive image
博碩士論文 etd-0616104-144122 詳細資訊
Title page for etd-0616104-144122
論文名稱
Title
以高分子材料建立在矽基板之分光器
Polyimide based Optical Splitters on Silicon Substrate
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
79
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2004-06-11
繳交日期
Date of Submission
2004-06-16
關鍵字
Keywords
波導、高分子、分光器
waveguide, optical splitters, polyimide
統計
Statistics
本論文已被瀏覽 5637 次,被下載 2775
The thesis/dissertation has been browsed 5637 times, has been downloaded 2775 times.
中文摘要
本論文研究的目的在於研發以高分子材料在矽基板上製作光波導元件的製程技術,並量測其特性、改善材料,進而製作出1×8分光器(Splitter)。
我們首先利用BPM-CAD光場模擬軟體設計光波導之結構,再依照計算結果製作出光波導。利用長興化工所合成的polyimide作為波導材料,建構脊樑式(Ridge)的光波導,光波導的折射率對比(Index contrast)為0.73%,波導的截面大小為7μm × 7μm,量測結果顯示材料在TE模態的傳輸損耗為1.4dB,但此波導對TM模態的導光性不佳。之後,我們會以此技術為基礎,進行1×8分光器的製作,1×8元件製作完成之大小為17mm×3mm。
最後,我們再以光纖接觸(Fiber contact)的方法量測1×8分光器的光學輸出特性。
Abstract
1x8 optical power splitters on silicon substrate were successfully fabricated based on polyimide channel waveguides structure.
The 1x8 power splitter was first designed by bean propagation method. The device was fabricated using polyimide provided by Eternal chemistry. The TE propagation loss of the waveguide is 1.4dB with a index contrast of 0.73%. However, the waveguide is not able to support low-loss propagation of TM polarized light. The chip size of the 1x8 power splitter is 17mm x 3mm. After fabrication, the optical characteristics of the splitter were measured.
目次 Table of Contents
第一章 導論 3
第二章 高分子材料之特性 8
2-1高分子材料之塗鋪與特性之量測 9
2-2高分子材料烘烤條件與折射率之關係 9
2-2-1烘烤溫度與折射率之關係 9
2-2-2烘烤次數與折射率之關係 10
第三章 Channel WG之模擬設計與製作流程 12
3-1 Channel WG之模擬設計 12
3-2 Channel WG之製作流程 14
3-3 Channel WG之光學系統架設 24
3-4 Channel WG之實驗結果 26
第四章 材料比較的比較分析與建議 34
4-1 新材料特性的比較分析 34
4-2 我們的建議 39
第五章 Optical power splitter之設計分析 41
5-1 1x8 optical power splitters之設計與分析 41
5-2 1x16 optical power splitters之設計與分析 48
第六章 1x8 optical power splitters之製作流程與實驗結果 52
6-1 1×8 optical power splitter之製作流程 52
6-2 1×8 optical power splitter之光學系統架設 60
6-3利用長興化工提供之polyimide為top cladding所製作之 1x8 power splitter 61

6-3-1結構分析與模擬結果 61
6-3-2實驗結果 64
6-4 利用UV膠(OG 125)為top cladding所製作之1x8 power splitter 66

6-4-1結構分析與模擬結果 67
6-4-2實驗結果 70
第七章 結論 76
參考文獻 References
1.J. Kobayashi, T. Matsuura, Y. Hida, S. Sasaki, and T. Maruno, “ Fluorinated polyimide waveguides with low polarization-dependent loss and their applications to thermooptic switches,” J. Lightwave Technol., vol. 16, pp. 1024-1029, 1998.
2.G. Fischbeck, R. Moosburger, C. Kossstrzewa, A. Achen, and K. Petermann, “Singlemode optical waveguides using a high temperature stable polymer with low losses in the 1.55 μm range,” Electron. Lett., vol. 33, pp. 155-519, 1997.
3.Ryoko Yoshimura, Makoto Hikita, Satoru Tomaru, and Saburo Imamura, “Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate,” J. Lightwave Technol., vol. 16, pp.1030-1037, 1998.
4.Jae-Wook Kang, Jang-Joo Kim, Jinkyu Kim, Xiangdan Li, and Myong-Hoon Lee, “Low-loss and thermally stable TE-mode selective polymer waveguide using photosensitive fluoriated polyimide,” IEEE Photon. Technol., vol. 14, pp. 1297-1299, 2002.
5.A. Neyer, T. Knoche, and L. Müller, “Fabrication of low loss polymer waveguides using injection moulding technology,” Electron. Lett., vol. 29, pp. 399-401, 1993.
6.Y. T. Kim, S. M. Cho, Y. G. Seo, H. D. Yoon, and Y. M. Im, “Influence of hydrogen on SiO2 thick film deposited by PECVD and FHD for silica optical waveguide,” Cryst. Res. Technol., vol. 37, pp. 1257-1263, 2002.
7.Masao Kawachi, “Silica waveguides on silicon and their application to integrated-optic components,” Opt. Quantum Electron., vol. 22, pp. 391-416, 1990.
8.Martin Hoffmann, Peter Kopka, and Edgar Voges, “Low-loss fiber-matched low-temperature PECVD waveguides with small-core dimensions for optical communication systems,” IEEE Photon. Technol. Lett., vol. 9, pp. 1238-1240, 1997.
9.P. W. Leech, M. F. Faith, C. M. Johnson, M. C. Ridgway, and M. Bazylenko, “Channel waveguides formed by ion implantation of PECVD grown silica,” IEE Proc.-Optoelectron., vol. 144, pp. 97-100, 1997.
10.Hayakawa,T.;Asakawa,S.;Kokubun,Y ,“ARROW-B type polarization splitter with asymmetric Y-branch fabricated by a self-alignment process, “ Lightwave Technology, Vol 15 , 1165 – 1170,1997.
11.H. Takahashi, Y. Ohmori, M. Kawachi, “Design and fabrication of silica-based integrated-optical 1x128 power splitter, “ NTT Opto-Electronics, 1991.
12.李沛宸, “1×2 Y-branch之大角度偏折波導分光器,”國立中山大學光電工程研究所碩士論文, 2002。
13.林書宏, “高分子光波導之製作與特性量測,“ 國立中山大學光電工程研究所碩士論文, 2003。
電子全文 Fulltext
本電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。
論文使用權限 Thesis access permission:校內校外完全公開 unrestricted
開放時間 Available:
校內 Campus: 已公開 available
校外 Off-campus: 已公開 available


紙本論文 Printed copies
紙本論文的公開資訊在102學年度以後相對較為完整。如果需要查詢101學年度以前的紙本論文公開資訊,請聯繫圖資處紙本論文服務櫃台。如有不便之處敬請見諒。
開放時間 available 已公開 available

QR Code