本論文目的是以複合式sol-gel玻璃材料為基礎去構建新型的單
模態埋藏式光波導，我們會製作兩種不同結構之埋藏式光波導，並分
別測量其光學特性。首先我們在矽基板上以PECVD方式成長SiON厚膜，再利用黃光及乾蝕刻技術在SiON上蝕刻出一淺凹槽，然後再旋
鋪上一層較厚的sol-gel玻璃作為導光層，最後再旋鋪一層折射係數較小的頂披覆層，即完成第一種波導的製作。在測量光波長為1310nm
時，此波導傳輸損耗為0.59dB/cm。
第二種埋藏式波導是在SiON上蝕刻出5µm見方的凹槽，填入sol-gel玻璃後，利用其可曝光成像的特性，以非接觸式二次曝光顯影
的製程，除去非波導線路之sol-gel玻璃，再旋鋪上頂批覆層的材料，經封裝即可進行光學特性的量測。經量測其TE傳輸損耗為0.6
dB/cm，TM傳輸損耗為0.57dB/cm。而TE與TM極化光的耦合損耗分
別為2.21dB和2.41dB。

In this paper, single mode buried optical waveguides based on hybrid sol-gel glasses and PECVD oxide were fabricated. Two different buried waveguide devices are investigated, and their optical characteristics are characterized. The first buried waveguide was obtained
by etching a shallow trench on SiON layer. Then sol-gel material used as the guiding layer was deposited onto the layer and cured in proper conditions. Finally, the waveguides were completed by coating a sol-gel top cladding layer onto the guiding layer. The propagation loss of the
waveguide is 0.59dB/cm at λ=1310nm.
The second buried waveguide was fabricated by etching a trench of 5μm on SiON layer and then burying sol-gel material into the trench.Proximity printing was used to define the waveguide core on sol-gel films.The waveguide was packaged for measurement after coating a UV glue
on top of the core layer. The propagation losses of this waveguide device are 0.6dB/cm and 0.57dB/cm for TE and TM polarized lights. The coupling losses are 2.21dB and 2.41dB for TE and TM lights.

第一章導論 1
第二章複合sol-gel 有機無機玻璃材料材料之特性 5
2-1 平面光波導材料之比較 5
2-2 有機無機混成玻璃材料之特性與應用 7
2-3 導光層之光學與材料特性 8
2-4 批覆層之光學與材料特性 14
2-5 頻譜分析 15
第三章埋藏式光波導特性與理論模擬 19
3-1 埋藏式光波導（一）之結構特性 19
3-2 埋藏式光波導（一）之理論模擬 22
3-3 埋藏式光波導（二）之結構特性 24
3-4 埋藏式光波導（二）之理論模擬 25
第四章光波導元件之製作 29
4-1 埋藏式光波導（一）製作流程 29
4-2 埋藏式光波導（二）製作流程 38
4-3 製程分析與討論 52
第五章光波導元件之量測與分析 58
5-1 埋藏式光波導（一）光學特性量測 58
5-2 埋藏式光波導（二）封裝與鏡面處理 61
5-3 埋藏式光波導（二）光學特性量測 64
5-4 量測結果與分析 66
第六章實驗結果與討論 68

1. P. Coudray, P. Etienne, Y. Moreau, ” Integrated optics based on organo-mineral materials, ”European Materials Conference Strasbourg June 1999

2. S. Iraj Najafi, Member, OSA, T. Touam, R. Sara, M. P. Andrews, and M. A. Fardad, ” Sol-gel glass waveguide and grating on silicon, ”Journal of lightwave technology, vol.16, no9, pp.1640-1646, Sep 1998

3. R. Moosburger, R. Hauffe, U. Siebel, D. Arndt, J. Kropp, and K. Petermann, Senior Member, IEEE, ” Passive alignment of single-mode fibers to integrated polymer waveguide structures utilizing a single mask process, ” IEEE Photonics technology letters, vol.11, no.7,pp.848-850, July 1999

4. K. Petermann, “Properties of optical rib guides with large cross sections, ” Archiv fur Elektronik und Ubcrtragungstechnik, (Germany),vol. 30, pp. 139-140, 1976

5. R. Hauffe, U. Siebel, C. Kostrzewa, K. Petermann, “The single mode condition for rib waveguides,revised, ”IPR’99,RMH8-1, pp. 112-114

6. A. Moujoud, Z. Saddiki, t. Touam, S.I. Najafi,"Measurement of the refractive-index variations with temperature of hybrid sol-gel glasses, ”Thin solid films 422, pp. 161-165, July 2002

7. G.Fischbeck,R.Moosburger,M.T’’pper,and K.Petermann, ” Design concept for single-mode polymer waveguides, ” Electron. Lett., vol 32,no.3, pp. 212-213, Feb. 1996

8. Zhiming Mao and Wei-Ping Huang, Member, IEEE, ” Analysis of optical rib waveguides and couplers with buried guiding layer,“Journal of quantum electronics, vol. 28, no.1,pp.176-183, Jan 1992

9. J.Y. Lin, I.C. Yang, P.C. Lee and A.K. Chu, ”Compact 1×2 opticalcouplers based on buried optical waveguides, ” Institute of Electro-optics engineering, National Sun Yat-Sen University

10.黃建清, ” 使用溶膠-凝膠法合成矽石玻璃, ”國立交通大學光電工程研究所碩士論文,1993

11.黃奕德, “ 應用佛列斯涅折射原理建構偏折之埋藏式高分子複合波導, ” 國立中山大學光電工程研究所碩士論文, 2001

12.吳銘仁, ” 建立在矽基板之單模態埋藏式高分子波導, ”國立中山大學光電工程研究所碩士論文,2003

13.曾立豐, ” 以PECVD 成長之低氮含量二氧化矽及其於高效率波導
元件之應用, ”國立中山大學光電工程研究所碩士論文,2003