Title page for etd-0616104-221605


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URN etd-0616104-221605
Author Yu-zhi Wu
Author's Email Address m9135622@student.nsysu.edu.tw
Statistics This thesis had been viewed 5582 times. Download 7121 times.
Department Electro-Optical Engineering
Year 2003
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Fabrication of Single Mode Buried Waveguides Based on Hybrid Sol-gel Glasses
Date of Defense 2004-06-11
Page Count 84
Keyword
  • sol-gel glass
  • hybrid
  • proximity printing
  • Abstract In this paper, single mode buried optical waveguides based on hybrid sol-gel glasses and PECVD oxide were fabricated. Two different buried waveguide devices are investigated, and their optical characteristics are characterized. The first buried waveguide was obtained
    by etching a shallow trench on SiON layer. Then sol-gel material used as the guiding layer was deposited onto the layer and cured in proper conditions. Finally, the waveguides were completed by coating a sol-gel top cladding layer onto the guiding layer. The propagation loss of the
    waveguide is 0.59dB/cm at λ=1310nm.
      The second buried waveguide was fabricated by etching a trench of 5μm on SiON layer and then burying sol-gel material into the trench.Proximity printing was used to define the waveguide core on sol-gel films.The waveguide was packaged for measurement after coating a UV glue
    on top of the core layer. The propagation losses of this waveguide device are 0.6dB/cm and 0.57dB/cm for TE and TM polarized lights. The coupling losses are 2.21dB and 2.41dB for TE and TM lights.
    Advisory Committee
  • Ken-huang Lin - chair
  • Ju-ta Tung - co-chair
  • Kuang-yu Hsieh - co-chair
  • Yi-jen Chiu - co-chair
  • Ann-kao Chu - advisor
  • Files
  • etd-0616104-221605.pdf
  • indicate in-campus access immediately and off_campus access in a year
    Date of Submission 2004-06-16

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