奈米壓痕試驗已經成為量測材料機械性質的重要工具之一。特別是針對因製程限制，而無法進行一般拉伸或壓縮試驗的奈米晶粒材料，可以在奈米壓痕試驗中，藉由Oliver and Pharr所提供的方法得到其硬度與彈性係數。本研究的目的在指出，當奈米粒徑的鎳鐵合金出現黏彈性(viscoelastic)行為時，奈米壓痕試驗參數，如荷重速率、最大荷重施加時間和去荷重速率等，對其硬度與彈性係數均有相當明顯的影響。換言之，對具黏彈性行為的奈米金屬而言，在以奈米壓痕試驗量測機械性質時，試驗參數的選擇相當重要。本研究應用相關原理（the correspondence principle），透過一個Maxwell model和一個或多個 Kelvin model的串連所建構的模型，可以模擬奈米壓痕試驗中，在荷重施加過程中，以及在最大荷重施加過程中，受到滯彈性(anelastic)與潛變(creep)變形的影響時，位移對時間的曲線，從而求得材料的黏滯係數、滯彈性釋放時間與彈性常數。同時亦解釋了在較短的施加最大荷重時間與低釋放荷重速率下，荷重釋放初期階段的荷重與壓痕深度的凸起(nose)的現象。針對奈米鐵鎳電鍍合金的實驗結果顯示：材料的黏彈性變形包含了至少兩組滯彈性與一組潛變機構，滯彈性釋放時間分別為0.37s和6.7s。潛變機構的黏滯係數1.5x105 GPa.s。
針對直流電鍍純鎳試片所做的背向散射電子繞射分析，顯示試片的晶粒徑呈現雙峰分佈現象，大晶粒為柱狀，沿電鍍方向成長。小晶粒則為等軸晶粒。試片的集合組織為<100>//ND的軸狀集合組織，但是此一集合組織主要是柱狀大晶粒所貢獻，等軸小晶粒事實上不具明顯的集合組織。

Nanoindentation has been widely used for measuring mechanical behavior of nanocrystalline (nc) metals that cannot be measured by tensile and compressive test. The hardness and elastic modulus are usually obtained by Oliver and Pharr method. However, this may not be true for materials showing viscoelastic characteristics. This study aims at clarifying the effect of testing parameters, especially loading rate and holding time, on the hardness and elastic modulus of a nanocrystalline Fe-51Ni coating obtained in nanoindentation tests as the material exhibits anelastic and creep characteristics. An analytical method based on the correspondence principle for linear viscoelasticity was developed. The holding displacement-time data obtained in indentation creep tests at a high loading rate of 20 mN/s were analyzed and material parameters related to the elastic, anelastic and creep characteristic were derived using a model containing one Maxwell unit and two Kelvin units. The anelastic deformation thus contains at least two relaxation processes having relaxation times of 0.37 s and 6.8 s, respectively and the creep deformation is described by a viscosity value of 4.2x104 GPa.s for the alloy in an as-deposited state.
Moreover, electrodeposited (ED) Ni was analyzed by electron backscatter diffraction. Results indicated that the ED Ni exhibits a bimodal distribution of grain size. The grains having sizes larger than 2 μm shows a strong fiber texture of <100>//ND, whereas the small grains (<2 μm) are mainly randomly oriented.

一、前言 1
二、文獻回顧 2
2-1 微米與奈米晶粒材料的機械性質 2
2-1-1 強度與延展性 2
2-1-2 加工硬化 3
2-1-3 Hall-Petch關係 3
2-2 塑性變形機制 4
2-3集合組織 6
2-3-1 集合組織基本定義、表示法 6
2-3-2 XRD繞射法 9
2-3-3背向散射電子繞射(EBSD) 9
2-3-4 電鍍材料集合組織的發展 11
三、實驗方法 15
3-1 電鍍純鎳與鎳鐵合金之奈米晶粒製程 15
3-2 熱退火處理 15
3-3 奈米壓痕試驗 15
3-4 EBSD集合組織分析 16
四、結果與討論 18
4-1滯彈性分析理論 18
4-2 奈米壓痕分析 20
4-2-1多循環壓痕試驗 20
4-2-2單循環壓痕試驗 20
4-2-3釋放荷重現象 22
4-2-4非彈性與潛變現象 23
4-2-5機械性質 24
4-3 EBSD分析 25
五、結論 28
六、參考文獻 29

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