本研究開發了一種價格便宜且簡單的微型感測器，用來檢測揮發性有機氣體（VOCs），這種感測器的感測材料方面，主要是運用混合奈米多孔性聚醯亞胺（PI）摻雜碳黑（CB）作為感測材料，利用PI /CB薄膜吸收空氣中的揮發性有機氣體物質改變了晶片的導電特性來作量測。在一般情況下，固態揮發性有機氣體的感測器運用金屬氧化物作為感測材料，此種感測器的工作溫度大約在300–350℃，而本研究開發的揮發性有機氣體 VOCs感測器能於室溫環境做量測，如此可使得感測器能量消耗低。本研究也運用電漿蝕刻來開孔的方式增加了其感測器的敏感度，透過SEM圖片可證實微孔洞結構相互連接並且開啟與外界空氣接觸的面積，而比較在有經開孔的開孔性結構響應值快無開孔的孔洞結構3倍左右。摻雜的碳黑濃度比例經過比較後，此感測晶片在碳黑濃度為1wt.%時有較佳的敏感度和分散性。另外，此研究也反覆量測五次100 ppm的乙醇來展現感測晶片良好的的再現性，量測10 ppm、100 ppm、1000 ppm的苯和乙醇氣體長達24小時的長時間穩定性，量測揮發性有機氣體101 ppm∼105 ppm大範圍濃度的偵測能力，而且對於特定種類的揮發性有機氣體，如:醇類及醛類，則可透過化學鍵結的反應來分析感測材料對於特定氣體的選擇性。再加上本研究對於25oC∼60oC的敏感度做比較，其值在25oC為155%，隨著溫度的升高，到60oC下降至80%左右，降低了約一倍。另外，本研究也可將水氣的影響給偵測出來，其水氣的電容改變量為揮發性有機氣體的16多倍，可利用電容改變量將水氣的影響因素給消除。此研究的製程提供一項簡單且直接的製程方法來製作低成本的VOC感測器。

This study developed an inexpensive and simple microsensor for detecting volatile organic compounds (VOCs). This developed VOC sensor is composed of a nano-porous polyimide (PI) film doped with carbon black (CB) as the sensing material. The conductivity of the PI/CB film changed after absorbing VOC contents in the air. In general, solid state based VOC sensors which use metal oxide as the sensing materials have to work at a temperature of about 300–350℃. Alternatively, this research developed a VOC sensor capable of sensing VOCs at room temperature, resulting in a sensor system of low energy consumption. A post pore opening procedure by plasma etching is used to enhance the response of the sensor film. SEM images confirm that the micro-pores interconnect with their neighboring pores and also open to the outside air. The film prepared with pore opening procedure exhibit a response of 3 times faster than the film prepared without pore opening. Results indicate that the developed VOC sensor has a good repeatability for detecting VOCs. PI film with 1% (weight percent) of CB has the best sensitivity due to the well dispersion of CB. This research detected 100 ppm ethanol fifth times to show good reproducibility, and detected 10 ppm, 100 ppm, 1000 ppm benzene and ethanol for 24 hours to show long-term stability, and detected 101 ppm∼105 ppm widely VOCs concentration. Besides, this sensor has selectivity on specific gas like alcohol and aldehyde, the sensor material has special chemical bond that can connect with specific gas. Moreover, the sensitivity is about 155% at 25 oC and 80% at 60 oC, it is almost 2 times at 25 oC. The moisture can also be detected to avoid the impact on the sensor performance for detecting VOCs, the moisture capacitance changes is 16 times higher than VOCs. The sensor developed in this study provides a simple and straight forward method to fabricate low-cost VOC sensors.

致謝 i
中文摘要 ii
Abstract iii
目錄 iv
表目錄 vii
圖目錄 viii
符號表 x
簡寫表 xi
第一章 緒論 1
1.1 前言 1
1.2 揮發性有機氣體 1
1.3 氣體感測器介紹 5
1.3.1 電化學式感測器 5
1.3.2 壓電式感測器 6
1.4.3 光學式感測器 7
1.3.4 電阻式感測器 8
1.4 文獻回顧 11
1.5 研究動機與目標 17
1.6 論文架構 19
第二章 材料及特性介紹 21
2.1 碳黑材料介紹 21
2.1.1 碳黑的結構與基本特性 21
2.1.2 碳黑吸附能力分析 21
2.2 聚醯亞胺(Polyimide) 23
2.3 吸附等溫線分析以及孔洞分佈分析 23
第三章 晶片製作與實驗方法 27
3.1 材料簡介 27
3.2 研究方法 27
3.2.1 濺鍍金屬 28
3.2.2 光罩製作 28
3.2.3 晶片製作 29
3.2.4 製作指叉電極晶片 30
3.2.5 感測層製程 31
3.2.6 氧電漿蝕刻法 33
3.2.7 量測方法 34
第四章 結果與討論 36
4.1 表面電漿蝕刻的效果 36
4.2 吸脫附BET量測 37
4.3 碳黑濃度的影響 43
4.4 感測晶片之再現性量測 43
4.5 感測晶片之長時間穩定性量測 45
4.6 水氣與揮發性有機氣體的電容變化 46
4.7 溫度影響性 47
4.8 不同濃度及不同揮發性有機氣體的偵測極限 48
第五章 結論及未來展望 51
5.1 結論 51
5.2 未來展望 53
參考文獻 54
自述 61

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