高效率光模轉換器在積體光學中扮演重要的角色，因為可將不同光模態場型，以低損耗方式在不同模態的波導間轉換，使的層與層或不同的光電元件中，充分利用各個元件優點，相互連結。
本文主要是以新穎方式將三五族與矽使用異質整合結合後，再製作出共振耦合方式的漸變式光模轉換器，因共振耦合方式使得可在短距離內就可達到高的能量轉換，又由於漸變式寬度變寬，在轉換後，可隔離波導間偶合。首先，以稀釋DVS-BCB來當作膠材將三五族與矽結合在一起，再使用底切與自我對準技術分別將矽波導與三五族波導製做出來。由理論模擬在耦合長度100 μm以內就可以達到95%的耦合效率。我們成功的使用晶圓貼合的方式將高度0.22微米、寬度0.7微米的矽波導與寬度為次微米等級的漸變式錐形之三五族波導結合起來，並藉由量測不同長度的矽波導與三五族波導算出其耦合損耗、波導損耗與耦合效率，而其耦合效率高達80%。

High-efficiency optical spot size converter (SSC) has become one of the major functional elements in photonics integration. Due to low-loss conversion, the optical fields of waveguide devices can be transferred either from layer to layer, or from device to device, enabling the integration of individual device function advantages and also their optical interconnection.
In this work, a new type of SSC has been proposed and demonstrated based on hybrid integration of III-V and Si material. Using tapered III-V waveguide integrated with Si waveguide, the optical field modes can be converted in a short distance through resonance condition. The mode field can also be locked after conversion due to the enlarged waveguide structure. During the processing, DVS-BCB was used as adhesive material to bond two wafers. Selective undercut etching with self-alignment technique was then performed to fabricated tapered waveguide structure of directional coupler. By numerical simulation, 95% of mode conversion can be attained between Silicon on insulator (SOI) waveguide and III-V waveguide. A single mode SOI with 0.7μm width and 0.22μm height has been successfully integrated with top tapered submicron III-V waveguide through wafer bonding technology. By comparing with different length of SOI and III-V waveguide, 80% conversion efficiency was found.

審定書 i
英文審定書 ii
中文摘要 iii
英文摘要 iv
目錄 v
圖次 viii
表次 xiii
第一章 諸論 1
1-1 前言 1
1-2 研究動機 2
1-3 異質整合與光模轉換器之技術 3
1-3-1 異質整合之技術 3
1-3-2 光模轉換器之種類 6
1-3-3 本論文製作之光模轉換器 9
1-4 研究步驟 9
1-5 論文架構 11
參考文獻 12
第二章 異質整合與共振型光模轉換器介紹 14
2-1 異質整合之光模轉換器 14
2-2 共振型光模轉換器種類及工作原理 18
2-2-1 共振型光模轉換器種類 18
2-2-2 共振型光模轉換器工作原理 21
參考文獻 24
第三章 光模轉換器模擬與分析 25
3-1 光波導耦合理論(Couple mode theory) 25
3-2 三五族材料折射率理論模型 28
3-3 光模轉換器設計 30
3-3-1 被動波導設計 30
3-3-2 主動波導設計 34
參考文獻 45
第四章 元件製程 46
4-1 磊晶層結構 47
4-2 晶圓貼合技術 47
4-3 波導蝕刻與製作 54
4-3-1 定義錐形波導 56
4-3-2 主動波導蝕刻 57
4-3-3 被動波導蝕刻 58
參考文獻 60
第五章 量測結果與討論 61
5-1 場行量測 62
5-1-1 遠場繞射角量測(Far field angle) 62
5-1-2 近場模態量測(Near field Optics) 64
5-2 耦合量測 66
5-2-1 耦合損耗量測(Coupling loss) 67
5-2-2 耦合效率量測(Coupling efficiency) 68
5-3 結果與討論 69
5-4 未來工作 69

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