本論文中，我們利用五氧化二鉭(Ta2O5)薄膜，製作高品質低損耗環形共振腔，並實現低操作功率波長轉換。首先，以ma-N2410負光阻，搭配ma-D525顯影液製作環形共振腔，經量測後最佳環腔元件在間距700nm，其品質因子(Quality factor, Q)為50615，環腔傳播損耗為0.5cm^-1，其對應的Unload Q為182000，這些值相較於文獻中以Ta2O5製備之環形共振腔是最好的。
接著，我們利用Ta2O5環形共振腔元件首度實現簡併態四波混頻，在注入6mW的功率下產生-30dB的轉換效率，與本實驗室過去長直波導做四波混頻約-49dB比較，環形共振腔只需要低操作功率，就能產生高四波混頻轉換效率。同時，估算出非線性折射率(n2)為1.4×10^-14cm^2/W，與其他工作如自相位調變、直線四波混頻等量測出Ta2O5的n2皆為同個數量級。另外，我們也利用轉換效率公式分析影響轉換效率的重要參數。從其n2比Si3N4高近一個數量級與無雙光子吸收等非線性損耗之優異特性，我們認為利用Ta2O5非線性波導產生寬頻光源具有相當大的潛力。

In this thesis, we have demonstrated wavelength conversion with low operation power in low loss Ta2O5 based micro-ring resonator. Based on a reflow process on the developed resist, the sidewall of waveguide device is optimized and becomes smooth. The propagation loss of ring resonator with diameter of 100μm is as low as 0.5cm^-1, and the gap between waveguide and ring cavity is set as 700nm. The corresponding loaded/unloaded Q are 50000/182000. It is a current record of Ta2O5 based micro-ring resonator. For nonlinear optical applications, the high efficient four-wave mixing conversion efficiency of -30dB has been achieved by using high quality factor Ta2O5 based micro-ring resonator at pump power of merely 6mW. With the ring resonator, the four-wave mixing conversion efficiency can be significantly enhanced by comparing to that of straight waveguide structure. In addition, the nonlinear refractive index (n2) of Ta2O5 at 1550nm is estimated to be 1.4×10^-14cm^2/W, which is higher than other optical materials (For instance, SiO2, Si3N4, AlN and Hydex…etc.). As a result, Ta2O5 based micro-ring resonator shows great potentials in developing chip-scale nonlinear photonics.

中文審定書 i
英文審定書 ii
致謝 iii
摘要 iv
Abstract v
目錄 vi
圖次 viii
表次 xi
第一章 緒論 1
1.1非線性波導簡介 1
1.2四波混頻原理介紹 4
1.3四波混頻文獻回顧 7
1.4五氧化二鉭(Ta2O5)光電元件應用與文獻回顧 10
1.5論文動機 13
1.6論文架構 15
第二章 微環形共振腔元件製程與量測方法 16
2.1微環形共振腔與波導幾何結構設計 17
2.2元件製程介紹 20
2.2.1薄膜沉積 22
2.2.2熱退火(Annealing) 28
2.2.3薄膜光學特性量測 29
2.2.4電子束微影(E-beam lithography) 30
2.2.5顯影(Developer) 33
2.2.6蝕刻(Etch) 36
2.2.7電漿輔助化學氣相沉積(PECVD) 38
2.2.8切割(Dicing) 39
2.2.9研磨(Polish) 41
2.3微環形共振腔品質因子量測 42
2.3.1環形共振腔原理與品質因子 43
2.3.2不同顯影液製程之元件穿透譜分析 46
2.4結論 48
第三章 以五氧化二鉭微環形共振腔進行四波混頻量測和研究 49
3.1四波混頻量測 50
3.2 環腔內四波混頻轉換效率分析 52
3.2.1相位匹配分析 53
3.2.2環腔增強因子分析 56
3.2.3非線性折射率估算 57
3.2.4不同耦合係數對四波混頻轉換效率之影響 58
3.3 Ta2O5波導能量相依性 59
3.4不同環腔內傳播損耗對四波混頻轉換效率之影響 61
3.5四波混頻轉換效率和文獻比較 63
3.6章節結論 66
第四章 結論與未來展望 67
附錄 69
前言 69
Ta2O5裸波導製程 70
Ta2O5裸波導與二維材料整合之可能與應用 72
參考文獻 73

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