摘要
我們將以半導體製程技術研製一新型的埋藏式高分子波導，其製程簡單，價格便宜，平坦的表面架構，更可應用於DWDM光通訊系統中。
它是一種是將導光層高分子材料埋藏在沉積於矽基板的二氧化矽上的高分子波導，製作方法是先用乾蝕刻的方式來蝕刻出二氧化矽的槽溝，接著塗鋪高分子材料(BCB Polymer)當作此波導之導光層利用回蝕(Etch Back)的方式去除不在凹槽中的高分子材料。最後，塗鋪上高分子材料(SOG)當作上披覆層，來隔絕導光層和空氣，增加波導對環境的抵抗力。在量測上，針對1.3μm的波長作量測，對TE波有0.59dB/cm的傳波損耗及TM波有0.65dB/cm的傳波損耗。此外，本論文還針對此波導之應用：光學多模干涉分光器做理論的研究。

Abstract


A novel buried hybrid polymer waveguide using semiconductor processing technologies is presented. It has advantage of low cost, ease of fabrication, planar surface morphology of the device, and it is applicable in dense wavelength division multiplex (DWDM) systems.
The polymer waveguide consists of a polymer core buried in the SiO2 lower cladding on a Si substrate. The device was fabricated by first etching a trench into the SiO2 cladding. The surface of the waveguide was then planarized using the Benzocyclobutene (BCB) polymer. After etch back of the BCB polymer, the guiding core is formed in the trench region. Finally, a thin film layer of SOG (spin-on-glass) was coated on the top of the waveguide to isolate the core from the air. For TE polarized wave, the propagation loss as low as 0.59dB/cm is obtained. The propagation of TM wave is 0.65dB/cm. In addition, a multi-mode inference power splitter based on the buried waveguide structure is theoretically investigated.

目錄
第一章 導論 1
第二章 理論模擬與應用 4
第一節 單模波導模擬 4
第二節 光學多模干涉分光器的研究 7
第三章 波導元件製作 13
第一節 材料的選擇和分析 13
第二節 元件製作流程 16
第三節 保護層的成長和濕蝕刻 24
第四節 乾蝕刻的分析 26
第五節 高分子材料的蝕刻 32
第六節 結論 33
第四章 波導特性量測
第一節 量測的方法和架構 34
第二節 量測結果 36
第五章 結論 38

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