本實驗研究目的於探討導電高分子PEDOT:PSS之導電機制並提升其導電度，應用於有機發光二極體嘗試取代ITO電極。近年來對於PEDOT:PSS的導電度提升研究已有眾多樣化的探討，各方學者利用有機溶液透過不同的處理方式如摻雜、浸泡、與滴定熱處理等都能夠提升PEDOT:PSS之導電度。PEDOT:PSS導電度提升的原理主要有兩種機制，其一為改變PEDOT與PSS的比例，其二為改變PEDOT與PSS的排列，以上兩者都能夠有效提升導電度至三到四的數量級，且處理後的PEDOT:PSS薄膜導電度已十分逼近RT ITO之導電度，目前已位於同一個級數。由於ITO透明電極有銦離子擴散的污染疑慮、材質容易崩裂與製造過程的伴隨高溫等不利於軟板的因素，故有機高分子勢必成為未來軟性元件發展的主軸。在本實驗中利用多種溶劑如；Dimethyl sulfoxide、Glycerol、Formic acid、Methanol及Hydrochloric acid對PEDOT:PSS處理薄膜各別進行處理摻雜、浸泡與滴定熱處理等方式，進行四點探針、表面輪廓儀量測薄膜計算導電度，成功將其薄膜之未處理導電度從0.3(S/cm)最高提升至1244(S/cm)增加四個數量級本實驗製程方式穩定簡便且耗時短窗口廣，將高導電性PEDOT:PSS薄膜進行光學特性探討，使用UV-Vis、XPS、Raman量測，探討導電度的提升機制原理；且在不同的導電度下，對於表面PSS含量變化與分子排列差異進行探討；對於薄膜進行PESA功函數確認HOME能階匹配度；AFM表面型態量測確認元件的表面粗糙度是否適合元件製作。元件部分，選擇適合OLED製程的摻雜處理PEDOT:PSS薄膜作為陽極製作玻璃基板之藍光磷光有機發光二極體元件探討薄膜特性對於元件影響，最後成功製作出DMSO處理之PEDOT:PSS陽極元件，元件在亮度為1000 (cd/m2)時電流效率為18.5 (cd/A)；功率效率6.9 (lm/W)；EQE 9.1(%)。後續嘗試製作PEM軟板藍光磷光有機發光二極體元件探討基板對於元件表現差異。

In recent year, there are many research on improving conductivity of PEDOT:PSS thin film by various of treatment for instead of ITO anode on the OLED device. The ITO thin film is inflexible, if we fabrication flexible OLED ITO is not unsuitable for FOLED. For example, Doping, Dropping, Soaking, treatment by different solvent has been proofed that can enhance conductivity of PEDOT:PSS to 3-4 orders enhanced than before treatment.
In this research, we will use Dope, Soak and Drop treatment by DMSO, Glycerol, formic acid, Methanol and Hydrochloric acid. We compare the change of PEDOT:PSS thin film before and after the treatment by using four-point probe, Alpha step, UV-vis, Raman spectrum, XPS spectrum, AFM and PESA.
We successfully enhance the conductivity of PEDOT:PSS from 0.3(S/cm) to 1244 S/cm by stabilizing, easy, liable and height adaptation method. Finally, we manufacture PEDOT:PSS anode device by doping treatment. At the luminance 1000 cd/m2, the performance of current efficiency are 18.5 (cd/A), power efficiency are 6.3 (lm/W), 6.9 (lm /W), EQE are 9.1(%).

中文審定書 i
英文審定書 ii
誌謝 iii
中文摘要 iv
Abstract v
目錄 vi
圖目錄 x
表目錄 xiii
第一章 緒論 1
1-1 OLED簡介 1
1-1-1 OLED元件結構 2
1-1-2 OLED & PLED介紹 4
1-2導電高分子 4
1-2-1導電高分子PEDOT:PSS 7
1-2-2 PEDOT:PSS應用 8
1-2-3 PEDOT:PSS導電度提升機制介紹 8
第二章 理論基礎 11
2-1 有機發光二極體發光原理 11
2-2螢光與磷光 12
2-2-3能量轉移機制 13
2-2-4濃度淬熄機制 16
2-3 OLED發光效率之定義 17
2-4 OLED光色鑑定 20
第三章 實驗 23
3-1 實驗動機 23
3-2 實驗架構 24
3-3實驗材料 26
3-4製程設備 30
3-4-1超音波清洗機(Ultrasonic cleaning) 30
3-4-2旋轉塗佈機(Spin coater) 31
3-4-3加熱盤(Hot plate) 31
3-4-4紫外光曝光機(UV exposure) 31
3-4-5 RF濺鍍機(sputter) 31
3-4-6電漿清洗機(O2-plasma) 32
3-4-7反應式離子蝕刻機Reactive Ion Etching(RIE) 33
3-4-8手套箱(Glove Box) 34
3-4-9蒸鍍機(Evaporator) 35
3-5 量測設備 36
3-5-1四點探針片電阻量測 36
3-5-2表面輪廓儀 37
3-5-3原子力掃描探針顯微鏡 38
3-5-4紫外光/可見光光譜儀 41
3-5-5拉曼光譜儀 42
3-5-6 X光光電子能譜儀 42
3-5-7光電子光譜分析儀(PESA) 43
3-5-8 OLED光電特性量測 44
3-6實驗步驟 45
3-6-1基板清洗 45
3-6-2 PEDOT:PSS配置與成膜製程 45
3-6-3 RIE PEDOT:PSS陽極圖形化 48
3-6-4室溫Sputter ITO 49
3-6-5OLED元件製程 49
3-6-6OLED元件量測 50
第四章 實驗量測分析 51
4-1摻雜(Dope)處理 52
4-4-1摻雜處理之穿透度 53
4-4-2摻雜處理之芳香環吸收 54
4-1-3摻雜處理之XPS表面分析 55
4-1-4摻雜處理之Raman量測 56
4-2浸泡(Soaking)處理 57
4-2-1浸泡處理之穿透度 58
4-2-2浸泡處理之芳香環吸收 59
4-2-3浸泡處理之XPS表面分析 59
4-2-4浸泡處理之Raman量測 60
4-3滴定 (Drop) 熱處理 62
4-3-1滴定熱處理之穿透度 63
4-3-2滴定熱處理之芳香環吸收 64
4-3-3滴定熱處理之XPS表面與Raman量測分析 64
4-4前處理與後處理差異 66
4-4-1 AFM表面粗糙度探討 66
4-4-2 PESA功函數量測 68
4-4-3 近紅外光吸收量測 70
4-5 OLED元件之PR-650量測 71
4-5-1 OLED基本元件 71
4-5-2 PEN軟板之PEDOT:PSS陽極元件 75
第五章 結論 78
參考資料 80

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