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博碩士論文 etd-0620106-135714 詳細資訊
Title page for etd-0620106-135714
論文名稱 Title |
以柴式提拉法生長(La,Sr)(Al,Ta)O3單晶晶體與其特性之量測 Study on the Czochralski Growth and characterization of (La,Sr)(Al,Ta)O3 single crystals |
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系所名稱 Department |
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畢業學年期 Year, semester |
語文別 Language |
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學位類別 Degree |
頁數 Number of pages |
57 |
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研究生 Author |
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指導教授 Advisor |
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召集委員 Convenor |
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口試委員 Advisory Committee |
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口試日期 Date of Exam |
2006-06-01 |
繳交日期 Date of Submission |
2006-06-20 |
關鍵字 Keywords |
柴式提拉法、單晶生長 Sr)(Al, (La, Ta)O3 |
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統計 Statistics |
本論文已被瀏覽 5687 次，被下載 2153 次 The thesis/dissertation has been browsed 5687 times, has been downloaded 2153 times. |
中文摘要 |
本文利用傳統的柴氏提拉法，以不同的轉速和拉速提拉兩根(La,Sr)(Al,Ta) O3晶體，主要的目的是為了找出(La,Sr)(Al,Ta) O3晶體最佳的生長條件。第一根晶體從錐頂到底部長約8.5公分，呈現著不對稱的形狀，在晶體生長的過程中，晶體的結晶速率相當的緩慢，造成的因素為晶體的熱傳導係數很低，使得溫度梯度過小造成晶體的結晶速率緩慢。第二次晶體實驗中，藉著改變熱場的配置，生長出的晶體明顯獲得改善，但是在剩料中卻殘留一部分的藍色結晶，此結晶與之前剩料的顏色有明顯的不同，藉X-ray和ICP-MS光譜去分析藍色晶塊成份及形成的原因。另外本研究亦量測(La,Sr)(Al,Ta) O3晶體的物理性質，並且由偏光顯微鏡還有高角度X-ray光譜分析，發現了晶體中存在著另一種結構。 |
Abstract |
In this work, two (La,Sr)(Al,Ta) O3 single crystals were grown by the conventional Czochralski pulling method by using different rotation rates and pull rates to find out the optimal growth conditions. The total length of the first (La,Sr)(Al,Ta) O3 crystal is about 8.5cm, and the shape is not symmetrical. The small thermal conductivity of the crystal would lead to small temperature gradient, so the growth rate was slow. The shape of the second crystal was improved by adjusting the thermal field. But, the bottom of the residual has blue color. The blue residual was analysed by x-ray and Inductively Coupled Plasma Mass Spectrometry (ICP-MS). Besides, the crystal structure was analyzed and the second phase had been found in crystals by high angle x-ray spectrum and polarizer microscope. |
目次 Table of Contents |
目 錄 1.前言 1 2.文獻回顧 3 2-1白光二極體簡介 3 2-2氮化鎵的結構與特性回顧 6 2-3 (La,Sr)(Al,Ta) O3歷史回顧 9 3. (La,Sr)(Al,Ta) O3單晶生長 14 3-1多晶(La,Sr)(Al,Ta) O3製備 14 3-2(La,Sr)(Al,Ta) O3單晶生長 17 4.結果與討論 21 4-1第一根(La,Sr)(Al,Ta) O3單晶生長實驗 21 4-1-1 晶體形狀………………………………………………..23 4-1-2晶體顏色…………………………………………….…..23 4-1-3 參數修正……………………………………………….25 4-2第二次(La,Sr)(Al,Ta) O3單晶生長實驗………………………28 4-2-1 晶體形狀………………………………………………..29 4-2-2 晶體顏色…………………………………………….....29 4-2-3 X-ray diffraction 分析……………………………..…32 4-2-4感應耦合電漿質譜分析儀 (ICP-MS)……………….…36 4-3 (La,Sr)(Al,Ta) O3單晶特性量測……………………………...38 4-3-1 Rocking curve 光譜之量測………………………….....38 4-3-2 高角度x-ray與偏光顯微鏡之量測……..…………….39 4-3-3 穿透式電子顯微鏡(transmission electron microscopy, TEM)觀察之結果……………………………………………..42 4-3-4穿透率光譜的量測………………………………....…...45 5.結論…………………………………………………………………...46 |
參考文獻 References |
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