電漿表面處理是一種極為有效的高分子材料表面處理技術，使用電漿表面處理，可以在高分子材料的表面，導入特定的表面性質，而且不會影響高分子材料的本身原有的總體性。在本實驗中，我們使用高頻電漿(Electron Cyclotron Resonance)對軟性基材(Poly ethylene terephthalate , PET)進行表面改質的研究，我們觀察到使用六氟化硫氣體SF6時，對薄膜表面改質效果的變化趨勢與反應氣體、功率、反應時間關係密切。在製程中於基材表面放置遮罩並控制基材與遮罩間之距離，可同時獲得親水與疏水的表面特性，顯示處理後的遮閉區域，曝在大氣中，可與大量的氧原子反應形成親水性的表面特性，其水接觸角差異可達到100 度以上，我們也將進一步研究親疏水與表面化學結構的變化。

Plasma surface treatment is an effect method to modify the surface chemistry of a plastic substrate without affecting the nature of the substrate itself .In this there, we use high frequency SF6 plasma generated by Electron Cyclotron Resonance (ECR) to modify the surface properties of a Poly ethylene terephthalate (PET) substrate. We found that the PET surface properties were strongly related to the gas pressure, RF power and reaction time, In addition, by masking on parts of the sample surface, both by hydrophobic and hydrophilic surfaces can be obtained in a single process. The hydrophilic is formed because of large amount of oxygen atoms reacting to the masking areas of the sample surface after the sample was exposed to the atmosphere. The difference of the measured water contact angle of hydrophobic and hydrophilic surface is larger than 100 degree.

一. 導論
二. 原理及使用設備
2-1高分子材料表面--------------------------------- 04
2-1-1表面特性--------------------------------- 04
2-1-2 電漿處理--------------------------------- 05
2-1-3 表面重組--------------------------------- 06
2-2表面分析技術----------------------------------- 07
2-2-1水接觸角分析----------------------------- 07
2-2-2表面化學組成分析(XPS)-------------------- 10
2-2-3掃描探針顯微技術(AFM)-------------------- 12
2-3電漿化學與技術
2-3-1低溫電漿表面處理技術--------------------- 14
2-3-2電漿處理之優缺點---------------------- --- 15
2-3-3 SF6化學電漿改善親疏水反應--------------- 16
2-4光發射光譜儀(OES)------------------------------ 18
2-5熱蒸鍍系統---------------------------------- --- 19
2-6實驗步驟------------------------------------ --- 20
三.結果與討論
3-1高頻SF6電漿改質---------------------------- --- 21
3-1-1 PET薄膜的親疏水特性變化----------------- 21
3-1-1-1 改變遮閉區檔板到試片距離--------- 21
3-1-1-2 操作時間的變化------------------- 24
3-1-1-3放置時間與遮閉區的變化------------ 25
3-1-2 SF6在PET表面之分析 (OES光譜儀)--------- 27
3-2老化效應討論-------------------------------- --- 30
3-3表面粗糙度分析--------------------------------- 32
3-4圖案化親/疏水處理製作-------------------------- 36
四.結論與未來的展望------------------------------- 40

附錄一.平均自由徑 (mean free path, MFP)------------- 42
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