可撓式有機發光二極體(Flexible Organic Light Emitting Diode；FOLED)為現今熱門的主題，具有自發光、廣視角、可彎曲等優點。一般傳統式OLED元件是以ITO (Indium Tin oxide)來做為陽極，若要做成FOLED，ITO會因大彎曲而脆裂並不適合做為陽極，因此利用另一種高分子材料PEDOT:PSS去取代，但PEDOT:PSS的導電率較不及於ITO，因此提升陽極的導電率非常重要。
本研究主要提升PEDOT:PSS導電率取代ITO陽極並製程有機發光二極體，PEDOT結構具有導電性與疏水性，PSS結構具有絕緣性與親水性，兩者由於受到庫倫作用力的影響，彼此結構會互相纏繞使載子傳輸受到限制，使其導電率不高。而本研究利用20 M甲酸對PEDOT:PSS進行處理使PSS比例有下降的趨勢，成功的將導電率從未處理0.3提升到1223 S/cm。而後續對薄膜進行UV-Vis、AC-2的HOMO分析、AFM表面粗糙度等量測，並利用XPS探討PEDOT與PSS兩者之間的比例，隨後利用反應式離子蝕刻機(RIE)對PEDOT:PSS薄膜進行乾式蝕刻產生圖形化，並成功的製作出磷光藍色OLED元件，並與Sputter ITO當作陽極製作出OLED做元件效率與亮度的比較，而經過20 M甲酸處理的PEDOT:PSS導電陽極在亮度1000 cd/m^2時的電流效率為13.40 cd/A，功率效率為4.98 lm/W，EQE為6.68%。

(Flexible Organic Light Emitting Diode；FOLED) is a popular technology in display area. It has some advantages such as self-luminous, wide viewing angle, and flexible. Currently, the most widely used transparent electrode was indium tin oxide (ITO) in OLEDs. If we want to fabrication FOLED, ITO is unsuitable as the electrode in FOLEDs. So we use the polymer material such as PEDOT:PSS to replace ITO, but not higher conductivity than ITO ; thus, it is important to enhance conductivity of PEDOT:PSS.
In this study, we enhance the conductivity of PEDOT:PSS for ITO-free organic light emitting diodes. The conductive PEDOT chains has having a hydrophobic and insulation PSS chains having a hydrophilic. The conductivity is poor of PEDOT:PSS, because the two chains has the Coulomb each other attraction, so the carrier has limitation to transport. We use the 20M formic acid to treat the PEDOT:PSS by dipping process, we found the conductive enhance from 0.3 (S/cm) to 1223 (S/cm) with proportion of PEDOT and PSS decrease. The film were investigated with UV-vis、AC-2、AFM, we use the XPS to analyze the proportion of PEDOT:PSS, and then use the RIE to treat the film that has the pattern. When the heat-treatment PEDOT:PSS anode device at the luminance of 1000 cd/m^2, the performance of the current efficiency are 13.40 cd/A , power efficiency are 4.98 lm/W and EQE are 6.68%.

目錄
中文審定書 i
致謝 ii
中文摘要 iii
Abstract iv
目錄 v
圖目錄 viii
表目錄 xi
第一章 緒論 1
1-1 OLED簡介 1
1-2 OLED元件介紹與結構 2
1-3 導電高分子 6
1-3-1 發展過程 6
1-3-2 PEDOT:PSS簡介 8
1-3-3 PEDOT:PSS應用 9
第二章 理論基礎 10
2-1 OLED理論基礎 10
2-1-1 發光原理 10
2-1-2 發光機制：螢光與磷光 11
2-1-3 能量轉移機制 12
2-1-4 濃度淬熄機制 15
2-2 OLED發光效率定義 17
2-3 OLED光色定義 20
第三章 實驗 22
3-1 研究動機 22
3-2 PEDOT:PSS導電率提升機制 23
3-3 實驗架構 26
3-4 實驗材料 27
3-5 製程設備 30
3-5-1 超音波清洗機(Ultrasonic cleaning) 30
3-5-2 旋轉塗佈機(Spin coater) 30
3-5-3 加熱盤(Hot plate) 30
3-5-4 氧電漿清洗機(O_2-plasma) 30
3-5-5 反應式離子蝕刻機Reactive Ion Etching(RIE) 31
3-5-6 RF濺鍍機(Sputter) 32
3-5-7 蒸鍍機(Evaporator) 33
3-5-8 手套箱(Glove Box) 34
3-6 量測儀器 35
3-6-1 片電阻量測 35
3-6-2 表面輪廓儀 36
3-6-3 紫外光/可見光光譜儀 37
3-6-4 原子力掃描探針顯微鏡 38
3-6-5 光電子光譜分析儀(PESA) 41
3-6-6 X光光電子能譜儀(XPS) 42
3-6-7 OLED光電特性的量測 43
3-7 實驗步驟 44
3-7-1 實驗前的準備 44
3-7-2 PEDOT:PSS薄膜製備 44
3-7-3 PEDOT:PSS陽極圖形化 45
3-7-4 室溫Sputter ITO製作 46
3-7-5 藍光OLED的製作 46
3-7-6 元件的量測 47
第四章 結果與討論 48
4-1 PEDOT:PSS導電薄膜優化特性 48
4-2 PEDOT:PSS導電薄膜分析 55
4-2-1 XPS能譜分析 55
4-2-2 HOMO值 56
4-2-3 片電阻Life time量測 57
4-2-4 薄膜表面粗糙度與相位分析 57
4-3 元件分析 59
第五章 總結 65
參考文獻 66

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