Responsive image
博碩士論文 etd-0626106-162553 詳細資訊
Title page for etd-0626106-162553
論文名稱
Title
以繞射元件從事三維形貌量測技術之研究
Projected Fringe Profilometry using Diffractive Elements
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
63
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2006-06-14
繳交日期
Date of Submission
2006-06-26
關鍵字
Keywords
條紋投影、繞射元件、全像片、正弦光柵、三維形貌
sinusoidal grating, projected fringe, diffractive element, 3D profile, hologram
統計
Statistics
本論文已被瀏覽 5648 次,被下載 1916
The thesis/dissertation has been browsed 5648 times, has been downloaded 1916 times.
中文摘要
本研究提出一套結合全像繞射元件的三維形貌量測系統。有鑒於傳統條紋投影輪廓儀其光柵投影裝置景深較小的缺點,利用全像技術做為條紋投影的機制可以獲得較大的景深,對於大尺寸物體的形貌量測會有顯著的幫助。新式的量測系統除了有較大的景深之外,其優點還包括了:

(1) 量測簡易
(2) 非常小的透鏡像差
(3) 量測系統構造簡單
(4) 高精確值
Abstract
A technique using diffractive elements for finding the absolute shape of a large-scale object is proposed. An accurate projected fringe profilometry can be built by applying the holographic technique in this system. The advantages of using the presented technique for projected fringe profilemetry are :
(1) a large depth of field ;
(2) very low fringe distortion ;
(3) a compact design for the measurement system ;
(4) high accuracy ;
(5) fast measurement speed.
目次 Table of Contents
謝誌…………………………………………………………Ⅰ
中文摘要……………………………………………………Ⅱ
英文摘要……………………………………………………Ⅲ
目錄…………………………………………………………Ⅳ
圖目錄………………………………………………………Ⅶ
表目錄………………………………………………………Ⅹ
第一章 前言
1-1 研究背景……………………………………………1
1-2 研究動機及目標……………………………………2
第二章 條紋投影輪廓儀
2-1 簡介…………………………………………………5
2-2 典型條紋投影輪廓儀的量測原理…………………5
2-2-1 光學三角量測法……………………………7
2-2-2 相位移偵測技術……………………………9
2-2-3 相位展開及其演算法………………………11
第三章 利用全像繞射元件搭設條紋投影輪廓儀
3-1 簡介………………………………………………14
3-2 全像術的基本原理………………………………14
3-2-1 波前的紀錄及重建………………………15
3-2-2 全像片的種類……………………………17
3-3 全像繞射元件的製作……………………………19
第四章 條紋投影輪廓儀的校正系統
4-1 簡介………………………………………………21
4-2 『相位-縱深』的校正原理……………………21
4-3 『側向』的校正原理………………………… 24
4-4 待測物3D形貌的量測原理…………………… 27
第五章 實驗與結果.
5-1 製作全像繞射元件………………………………29
5-2 校正及量測………………………………………32
5-2-1 『相位-縱深』的校正………………… 33
5-2-2 『側向』的校正…………………………35
5-2-3 待測物3D形貌的量測……………………38
5-3 誤差分析…………………………………………45
第六章 結論
6-1 結果討論…………………………………………46
6-2 未來研究工作……………………………………47
參考文獻…………………………………………………… 48
附錄………………………………………………………… 50
參考文獻 References
1. k.A.Haines,B.P.Hildebrand,“Contour generation by
wavefront reconstruction,”Physical Letters, 19, 10-11
(1965).

2. R.E.Brooks and L.O.Heflinger,“Moiré gauging using
optical interference pattern,”Applied Optics,8,935-939
(1969).

3. H.Takasaki,“Moiré topology,”Applied Optics, 9, 1467-
1472 (1970).

4. L.Deck and P.de Groot,“High-speed non contact profiler
based on scanning white-light interferometry,”Applied
Optic,33,7334-7338 (1994).

5. S.H.Rowe and W.T.Welford,“Surface topography of non-
optical surfaces by projected interference fringes,”
Nature, 216, No. 5117,786-788 (1967).

6. R. Crane,“Interference phase measurement,”Applied
Optics, 8, 538(1969).

7. J.H.Burning,D.R.Herriott,J.E.Gallagher,D.P.Rosenfeld, A.
D.White, and D.J.Brangaccio,“Digital wavefront
measuring interferometer for testing optical surfaces
and lenses,” Applied Optics, 13,2693 (1974).

8. G.Lu,S.Wu,N.Palmer,and Hongyu Liu,“Application of phase-
shift optical triangulation to precision gear gauging,”
Proc. SPIE, 3520, 52-63(1998).

9. Hongyu Liu,B.A.Bard,Wei-Hung Su,Fei Wu, Shizhuo Yin, and
T.S.Yu,“Accuracy enhancement in phase-shifting
projected fringe profilometry by microscanning,
Proceedings of Optical Society of America Annual
Meeting, Santa Clara, California, September 26-October1,
(1999).

10. Hongyu Liu, B.A.Bard,Wei-Hung Su,and Fei Wu,
“Precisionprofile measurement by phase-shifting
projected-fringe profilometry,”ARL year 2000, The
Pennsylvania State University (internalpublications).

11. Wei-Hung Su, Hongyu Liu, Karl Reichard, Shizhuo Yin,
and FrancisT. S. Yu,“Fabrication of digital
sinusoidal grating and preciselycontrolled diffusive
flat and their applications to highly accurateprojected
fringe profilometry,”Optical Engineering, 42,No.6,
1730-1740 (2003).

12. Hongyu Liu, Wei-Hung Su, Karl Reichard, and Shizhuo Yin,
“Calibration-based phase-shifting projected fringe
profilometry foraccurate absolute 3D surface profile
measurement,” OpticsCommunications, 216, Issues 1-3,
65-80 (2003).

13. Wei-Hung Su, Karl Reichard, Hongyu Liu, and Shizhuo Yin,
“Integration of segmented 3D profiles measured by
calibration-basedphase-shifting projected fringe
profilometry (PSPFP),”Optical Memory & Neural
Networks,12,No.1,(2003).

14. Wei-Hung Su,Wei-Jen Chen,Hung-Jei Kao,and Chia-Jeng
Huang,“Projected fringe profilmetry using holographic
techniques for large-scale measurement,”Proc. SPIE,
(2005).

15. W.R.Klein,“Theoretical Efficiency of Bragg Devices,”
Proc.IEEE54,803(1966).

16. Takeda,“Fourier transform profilometry for the
automatic measurement of 3-D object shaped,”Applied
Optics, 22, No. 24, 3977-3982 (1983).
17. 光電概論 -- 孫慶成 , 全華圖書.
18. 基礎雷射全像術 – 陳逸寧 , 全華圖書.
電子全文 Fulltext
本電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。
論文使用權限 Thesis access permission:校內立即公開,校外一年後公開 off campus withheld
開放時間 Available:
校內 Campus: 已公開 available
校外 Off-campus: 已公開 available


紙本論文 Printed copies
紙本論文的公開資訊在102學年度以後相對較為完整。如果需要查詢101學年度以前的紙本論文公開資訊,請聯繫圖資處紙本論文服務櫃台。如有不便之處敬請見諒。
開放時間 available 已公開 available

QR Code