Electro-optic probing techniques are advancing rapidly in recent years. These techniques have been proven to be an effective tool in parameter extraction of semiconductor devices such as response time, delay time as well as scattering parameters. Not only the magnitude of the electric field but also the direction of the corresponding E-field direction are measured in several developed electro-optic probing system. By incorporated these techniques, the near-field electric field vectors can be estimated and they are valuable information for the analysis of RF circuit devices, e.g., micro-strip transmission line, patch antenna, etc. When probing the 2-D E-field vectors, one can only measure 1-D E-field direction, then rotate the device under test by 90° for another orthogonal tangential E-field direction. However the process not only reduces the probing accuracy but also increases the time interval for achieving measurement and lead to obstacles in use.
In the thesis, 2D E-field can be obtained without rotating the DUT by using two kinds of modulation schemes, i.e., compressed/stretched deformation modulation(CSDM) and rotational deformation modulation(RDM). These novel techniques provide a total solution for the above bottleneck and improve the sensitivity for different E-field direction. Besides, a heterodyne method is developed to measure the high frequency near-field 2D E-field distribution. By the heterodyne method, the EO probing system can incorporate the CW laser instead of the pulse laser for reducing the cost and enhancing the merits when applied.