本論文旨在發展時間解析之電致發光及光致電流顯微術並應用於光電元件之量測。這項技術的核心是將輸入的訊號加以調變，並利用鎖相放大器觀察其對輸出訊號的影響，再結合以雷射掃描顯微鏡以達成高空間解析度。
我們做了兩項量測，第一項為量測發光二極體(LED)的電致發光，如此可將LED的反應時間以圖像顯示，不只如傳統上僅量測整體LED的反應時間。因LED發光面上每一點的反應值皆不一致，利用本實驗方法可以得到LED發光面上的反應時間分布情形。另一項量測則是利用鎖相放大器達成高訊噪比之光致電流顯微術，所使用的光電元件包括LED，有機發光二極體(OLED)，共平面波導調變器(CPW)等。不同於第一項的量測，被調變的則是激發光電元件的光源，並利用鎖相放大器偵測被激發之光電流，如此可過濾出單純由激發光源產生的電訊號，且能大幅改善訊噪比，建構極佳之光致電流影像。為配合鎖相放大器之運作，掃描速率調整技術之發展無疑是關鍵之進展。

In this study we have successfully developed the techniques of time-resolved electro-luminescence (EL) and optical beam induced current (OBIC) microscopy for the mapping of photonic devices. We have applied the techniques to examine various photonic devices, including light emitting diodes (LED), organic light emitting diode (OLED), and coplanar waveguide (CPW) devices.

The key development in time-resolved microscopy is the technique of modulation. By measuring the phase delay between the modulation source and the output signal, the response time of the observed devices can be extracted. In electro-luminescence mapping, the phase delay is measured between the applied sinusoidal voltage and the emitted EL, while in OBIC mapping the phase delay is measured between the modulated laser beam and the resulting photocurrent. The phase delay measurements are performed with a lock-in amplifier. In this way, large enhancement in signal-to-noise ratio can also be obtained. Additionally, the technique of varying scanning rate is also developed to synchronize the data acquisition between the LSM and the lock-in amplifier, a key enabling advancement in this thesis study.

中文摘要 頁次
目錄
圖目錄

第 一 章 簡介 01
　 1.1 研究動機 01
1.2 實驗方法之簡述 02

第 二 章 電激發光反應時間之量測 03
2.1 反應時間的量測原理 03
2.2 電致發光量測反應時間原理 09
2.3 電致發光原理 10
2.4 實驗所須之儀器設備 10
2.4.1 共軛焦顯微鏡 10
2.4.2 鎖相放大器 11
2.4.3 其他之實驗設備 11
2.5 實驗架設模擬及結果討論 11
2.5.1 電路模擬 11
2.5.2 樣品之準備 15
2.5.3 電激發光之反應時間量測及結果討論 16

第 三 章 高訊噪比及掃描速率可調整之光致電流顯微術
3.1 光致電流的原理 20
3.2 傳統的光致電流影像 21
3.3 速率可調整之共軛焦掃描系統 23
3.4 實驗架構 23
3.5 樣品介紹 24
3.6 實驗結果 24

第 四 章 結論與未來展望 27
附錄一 共軛焦掃描顯微術 29
附錄二 鎖相放大器工作原理 34
附錄三 其它實驗設備 39
附錄四 Matlab 程式 40

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