隨著電子元件朝高速、省電和小體積的需求，高速數位系統之雜訊容忍度相對的減小很多。而在人造合成材料之大量生產下，人體愈來愈容易因摩擦而帶電產生對電子元件的空氣放電，在周圍環境靜電問題與日俱增但元件對靜電放電之防護力卻越來越差的情形下，使得靜電放電問題對於電子產品之影響愈加嚴重。
本論文先介紹真實生活中人帶電所引發的空氣放電機制，接著提供靜電放電的量測方法致力於提升實驗的再現性讓結果精確可靠，最後嘗試用時域有限差分法模擬空氣放電與接觸放電，以提供在量測上的簡單驗證。

The trends of present design in electronic systems are towards high speed, small size, and lower voltage levels. The noise immunity of high speed digital circuit decreases. ESD problem becomes more and more important for electric products because of the triboelectricity caused by human body with synthetic material.

In this thesis we introduce the phenomenon in real life ESD caused by a charged human body source. Then we provide a good measurement method of ESD which enhances the repetition that gives a reliable and accurate result. Finally we try to build the numerical model for the air and contact discharge simulation by FDTD to provide a good measurement validation.

第一章 序論 1
1.1 研究目的 1
1.2 論文大綱 2
第二章 靜電放電之簡介與規範 3
　2.1 靜電放電簡介 3
　　 2.1.1 何為靜電 3
　　 2.1.2 靜電的基本觀念 3
　　 2.1.3 靜電放電的影響及一般防治概念 8
　2.2 靜電放電模型介紹 10
　　 2.2.1 靜電放電模型與規範簡介 10
　　 2.2.2 IEC 61000-4-2 靜電槍簡單模型 11
　　2.2.3 靜電槍放電波形之驗證 12
　　 2.2.4 靜電放電測試方法 15
第三章 靜電放電之量測方法 19
　3.1 量測設備需求及配置 19
　　　3.1.1 挑選數位示波器 19
　　　3.1.2 數位示波器與靜電槍量測前的驗證 20
　3.2 靜電槍開關充放電的電磁場預先干擾 22
　3.3 高壓產生器的電磁輻射 23
　3.4 電磁輻射源進入的可能路徑 25
　3.5 不同靜電槍的特性比較 28
　3.6 共模電流與磁性扼流環之影響 30
　3.7 以電波暗室隔絕全部雜訊干擾源 31
　3.8 結論 33
第四章 靜電槍空氣帶電模式放電的波形探討與量測方法 34
　4.1 空氣放電簡介 34
　　　4.1.1 空氣放電生成原因 34
　　　4.1.2 空氣離子化電子的傳遞過程 35
　　　4.1.3 空氣放電的陰極過程 37
　　　4.1.4 湯森放電(Townsend’s sparking criterion) 39
　　　4.1.5 流注理論(Streamer theory) 41
　　　4.1.6 帕森定律(Paschen’s law) 42
　　　4.1.7 氣體放電的型態 44
　　　4.1.8 時間延遲 44
　　　4.1.9 影響空氣放電的變因總結 46
　4.2 靜電槍固定距離對待測物空氣放電 46
　　　4.2.1 實驗設置 46
　　　4.2.2 實驗環境條件 48
　　　4.2.3 電弧長度與電壓關係 48
　　　4.2.4 電弧長度與放電波型關係 48
　　　4.2.5 結論與探討 53
　4.3 靜電槍帶電接近物體空氣放電 55
　　　4.3.1 實驗設置 55
　　　4.3.2 實驗環境條件 56
　　　4.3.3 帶電電壓對放電波型的影響 56
　　　4.3.4 結論與探討 58
　4.4 空氣放電鄰近耦合 59
　　　4.4.1 空氣放電在受屏蔽之平行耦合傳輸線上 59
　　　4.4.2 空氣放電在沒有金屬屏蔽之平行耦合傳輸線上 61
　4.5 比較接觸放電與空氣放電 62
　　　4.5.1 接觸放電與空氣放電波形差異 62
　　　4.5.2 由能量與電荷探討接觸放電與空氣放電差異 63
第五章 靜電放電之數值分析方法 66
　5.1　簡介 66
　5.2　SPICE模型 66
　5.3　Maxwell方程式以及FDTD離散化公式 69
　　　5.3.1 穩定準則 73
　　　5.3.2 吸收邊界 73
　5.4　FDTD集總元件法 76
　　　5.4.1 電阻 77
　　　5.4.2 電容 77
　　　5.4.3 電感 78
　　　5.4.4 阻抗性電壓源 78
　5.5　FDTD模擬靜電放電之結果 79
　　　5.5.1 接觸放電模擬 79
　　　5.5.2 空氣放電模擬 86
第六章 結論 90

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