在本研究中，我們利用表面光柵結構及波導模態共振效應來設計雙參數感測器。當光柵使入射光產生繞射後，會在波導層激發TE/TM 波導模態，且光柵結構會使激發的模態在傳播一段距離後形成洩漏的繞射光，當兩相鄰的洩漏繞射光達到相位匹配時，便可產生共振。此外，當外在環境參數變化時共振點會隨之移動，因此我們可以藉由量測共振點之位移量來感測環境參數。我們利用Comsol multiphysics來分析本論文所提出的反射式雙參數感測器與穿透式雙參數感測器的特性，可以得到反射式雙參數感測器的溫度靈敏度為-13.8pm/°C (TE波導模態)及-24pm/°C (TM波導模態)，外在環境折射率變化的靈敏度為37nm/RIU(TE波導模態)及186nm/RIU(TM波導模態)，而穿透式雙參數感測器之感測靈敏度則為-20pm/°C (TE波導模態)及-43pm/°C (TM波導模態)與27nm/RIU(TE波導模態)及54nm/RIU(TM波導模態)。另一方面，我們也設計了反射式雙參數薄膜感測器可以用來同時感測薄膜材料厚度與折射率，其感測薄膜厚度之靈敏度為0.18 nm/nm(TE波導模態) 及0.2 nm/nm(TM波導模態)，而感測薄膜折射率之靈敏度為252.849nm/RIU(TE波導模態) 及190.5 nm/RIU(TM波導模態)。此外，有別於現今被提出的波導模態共振感測器，本研究所設計出的感測器均為雙參數的形式，因此我們能在量測一個參數時排除另一個參數的影響，以提高感測器的應用價值。

In this study, we employ two-dimensional (2-D) grating structures and the guided mode resonance effect to design dual-parameter sensors. The incident light is diffracted by the 2-D grating to induce both the transverse electric (TE) guided mode and transverse magnetic (TM) guided mode of the waveguide. Due to the grating structures, the guided waveguide modes will leak out from the waveguide. As they fulfill the phase matching condition, we can observe resonance peaks in the spectrum. The resonance wavelengths can be affected by the external environment parameters. As a result, we can achieve dual-parameter sensing by measuring the TE/TM resonance wavelengths. The numerical tool we utilized is Comsol Multiphysics. For the reflection type dual-parameter sensor, the sensing sensitivities to temperature and environment refractive index are -13.8pm/°C (TE waveguide mode), -24pm/°C (TM waveguide mode), 37nm/RIU (TE waveguide mode), and 186nm/RIU (TM waveguide mode). Meanwhile, the calculated sensing sensitivities of transmission type dual-parameter sensor to temperature and environment refractive index are -20pm/°C (TE waveguide mode), -40pm/°C (TM waveguide mode), 27nm/RIU (TE waveguide mode), and 54nm/RIU (TM waveguide mode). We have also designed reflection type dual-parameter sensor for thin-film sensing. The sensing sensitivities to thin film thickness and index are 0.18 nm/nm (TE waveguide mode), 0.2 nm/nm (TM waveguide mode), 252.849nm/RIU (TE waveguide mode), and 190.5 nm/RIU (TM waveguide mode). Moreover, our proposed dual-parameter sensors can be used without cross-sensitivities to increase their sensing applications.

致謝 i
中文摘要 ii
Abstract iii
目錄 iv
圖目錄 vi
表目錄 ix
第一章 緒論 1
1-1光柵的繞射 1
1-2結合光柵結構的感測器 2
1-2.1表面電漿波感測器(surface plasmon polariton, SPP) 2
1-2.2波導模態共振感測器 (Guided-mode resonance effect, GMR) 6
1-3研究動機 9
第二章 波導模態共振的原理 10
2-1等效介質理論 11
2-2波導的色散理論 14
2-3波導模態共振的共振點設計 21
第三章 反射式雙參數感測器 22
3-1 元件建構-反射式雙參數感測器 22
3-1.1結構參數對共振點的特性分析 25
3-2雙參數感測特性 29
3-3反射式薄膜材料雙參數感測器 33
3-3.1元件架構-反射式薄膜材料雙參數感測器 33
3-3.2光柵週期對共振點的特性分析 36
3-3.3薄膜材料厚度與折射率的雙參數感測 37
第四章 穿透式雙參數感測器 41
4-1穿透式雙參數穿透式感測器元件設計 41
4-1.1結構參數對共振點的特性分析 44
4-1.2穿透式雙參數感測器的最佳化選擇 48
4-2雙參數的感測特性 49
第五章 結論 52
參考文獻 53

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