光纖Mach-Zehnder干涉儀感測器具有體積小、抗電磁干擾以及結構簡單等優點，因此近年來被廣泛地提出及應用。本論文利用蝕刻光子晶體光纖並熔接單模光纖的方式，成功地製作出同軸Mach-Zehnder光纖干涉儀。我們製作出不同長度的元件，同時選擇適合的蝕刻參數使元件的頻譜表現最佳化，當元件長度為37.2μm時有最大的消光比為12dB，並且當蝕刻時間小於30分鐘時，元件的頻譜響應最佳，大約為12dB。
我們利用所製作出的同軸Mach-Zehnder光纖干涉儀進行折射率以及溫度感測，當外界環境折射率改變時，其折射率靈敏度約為6.42pm/RIU。接著，我們利用不同長度的元件進行溫度感測，當外界溫度變化範圍是30°C ~100°C時，其溫度靈敏度會隨元件長度上升而增加，約為21.4pm/°C ~24.4pm/°C。由實驗結果可知，我們提出的同軸Mach-Zehnder光纖干涉儀可避免折射率的交叉干擾，並能夠在不同折射率環境下進行溫度感測。最後，我們在同軸Fabry-Pérot光纖干涉儀的纖芯沾UV膠以改善其溫度靈敏度。根據實驗結果，沾膠前、後的靈敏度分別為8.5pm/°C與-104pm/°C，證實沾UV膠可以有效提升同軸Fabry-Pérot光纖干涉儀的溫度靈敏度。

Fiber-optic Mach-Zehnder interferometers (MZIs) have been widely explored in many fields in recent years due to their advantages such as small size, immunity to electromagnetic interference and simple structure. In this thesis, we proposed a coaxial-fiber-based MZI by etching photonic crystal fibers (PCFs) which were spliced with SMFs. By varying the lengths of PCFs and etching parameters, we can obtain the optimized interference spectra. As the device length is 37.2μm, we can obtain the highest extinction ratio of 12dB. When the etching time is less than 30 minutes, the device have better sensing properties.
We have applied the coaxial-fiber-based MZI to refractive index (RI) and temperature sensing. By varying the surrounding RI, we can obtain the RI sensitivity of 6.42pm/RIU. We have also measured the temperature sensitivities samples with different lengths as the temperature varied from 30°C to 100°C. We can obtain the temperature sensitivities from 21.4pm/°C to 24.4pm/°C with the increasing device lengths. As a result, our proposed coaxial-fiber-based MZI can avoid RI disturbance while performing temperature sensing. Finally, to improve the temperature sensitivity, we have attached the UV gel onto the core of coaxial-fiber-based FPI. According to the experimental results, the temperature sensitivities of the FPI with and without UV gel are -104pm/°C and 8.5pm/°C, respectively.

目錄
學位論文審定書 i
中文摘要 ii
Abstract iii
目錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1-1 光纖感測器 1
1-2 光纖干涉儀感測器簡介 3
1-2.1 光纖馬赫-桑德爾干涉儀(Fiber Mach-Zehnder interferometer) 4
1-2.2 光纖法布立-培若干涉儀(Fiber Fabry-Pérot interferometer) 7
1-2.3 光纖麥克森干涉儀(Fiber Michelson interferometer) 9
1-2.4 光纖薩格納克干涉儀(Fiber Sagnac interferometer)感測器 11
1-3 研究動機 14
第二章 Mach-Zehnder光纖干涉儀 15
2-1 Mach-Zehnder干涉儀 15
2-2 同軸Mach-Zehnder光纖干涉儀 16
2-3 元件製程 19
2-3.1 光纖介紹 19
2-3.2 元件製作 20
2-3.3 蝕刻製程特性 25
第三章 同軸Mach-Zehnder光纖干涉儀的干涉特性量測 27
3-1 元件量測架設 27
3-2 不同纖芯直徑的干涉特性量測 29
3-3 不同元件長度的干涉特性量測 32
第四章 同軸光纖干涉儀之感測應用 36
4-1 折射率感測 36
4-2 溫度感測 38
4-3 同軸Fabry-Pérot光纖干涉儀溫度敏感度改善 41
4-3.1 材料介紹 42
4-3.2 製程介紹 43
4-3.3 同軸Fabry-Pérot光纖干涉儀填膠後溫度量測 45
第五章 結論 47
參考文獻 48

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