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博碩士論文 etd-0629112-153526 詳細資訊
Title page for etd-0629112-153526
論文名稱
Title
反射異向性光譜應用於檢測聚亞醯胺薄膜特性之研究
The Use of Reflection Anisotropy Spectroscopy in Characterisation of Polyimide Thin Films
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
51
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2012-06-19
繳交日期
Date of Submission
2012-06-29
關鍵字
Keywords
聚亞醯胺、反射異向性光譜、表面自由能、預傾角、摩擦
alignment, pretilt angle, reflection anisotropy spectroscopy(RAS), polyimide, surface free energy
統計
Statistics
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中文摘要
在聚亞醯胺(polyimide PI)薄膜上摩擦,為現今液晶顯示器工業上重要的配向技術。經過摩擦的表面所呈現的異向性,將會有相對應的預傾角產生。因此對於摩擦的監控與品質控制,反射異向性光譜為一種重要的監測技術。
反射異向性光譜,為一種非破壞性的偵測系統,利用光學的反射,基板的表面特性將可偵測而不接觸表面,經過測量的基板可以繼續進入製程,可以將此系統放入製程中以達及時監控的目的。
在本實驗中,我們將探討室溫對於PI的影響。在室溫中PI的組成將會產生改變,此種改變可以從反射異向性光譜中測出,經過表面能與預傾角的比對,我們發現PI在溫度25℃~30℃內就會有異向性產生,經過的時間越長改變的幅度也越大。
Abstract
Rubbing on polyimide thin film surface is an important procedure of alignment in the commercial display industry. Present on the surface of friction anisotropy, there will be corresponding to the pre-tiltangle. Monitoring and quality controlling of rubbing procedure will be the major issue. Reflection Anisotropy Spectroscopy is a powerful monitoring technology.
Reflection Anisotropy Spectroscopy is a non-destructive detective system. Through optical method we could get property of our samples without damaging. After our process of survey, samples could be used in next manufactured step.
In this thesis, we detected that monomers would occur some changes in a small amount in room temperature. We could find those changes effect the peak region of RA spectra and the feature in pretilt angle.
目次 Table of Contents
目錄
中文論文審定書……………………………………………………………… i
英文論文審定書……………………………………………………………… ii
誌謝…………………………………………………………………………… iv
中文摘要……………………………………………………………………… v
英文摘要……………………………………………………………………… vi
第一章 緒論………………………………………………………………… 1
第二章 液晶介紹…………………………………………………………… 2
2.1液晶的種類……………………………………………………. 2
2.2液晶的光學異向性………………………………………… … 4
2.3液晶的介電異向性……………………………………………. 6
2.4配向層…………………………………………………………. 7
2.5液晶分子配向模式……………………………………………. 7
第三章 反射異向性光譜…………………………………………………… 10
3.1 RAS的發展…………………………………………………..... 10
3.2 RAS的原理……………………………………………………. 10
3.3各向同性與各向異性…………………………………………. 10
3.4電磁波的反射與透射…………………………………………. 11
3.5 Epiopoic....……………….…………………………………….. 13
3.6 RAS系統………………………………………………………. 14
3.7 RAS系統儀器介紹……………………………………………. 15
3.7-1光學元件與分析儀器…………………………………… 15
3.7-2 RAS儀控軟體………………………………………….... 20
3.8 RAS系統架設理論……………………………………………. 21
第四章 樣品製備……………………………………………………………. … 25
4.1配向層材料……………………………………………………….. 25
4.2基板製作……….…………………………………………………. 25
4.2-1 ITO玻璃的清洗……………………………………………... 25
4.2-2塗佈聚亞醯胺………………………………………………. 26
4.2-3軟烤與硬烤…………………………………………………. 26
4.2-4摩擦配向……………………………………………………. 26
第五章 實驗與結果討論…………………….………………………………… 28
5.1退化………………………………………………………………… 28
5.2實驗結果…………………………………………………………… 29
5.2-1振幅大小…………………………………………………….. 29
5.2-2特徵譜線…………………………………………………….. 31
5.2-3特徵波段…………………………………………………….. 35
第六章 未完成工作與未來方向……………………………………………….. 38
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