在此研究中，我們結合了非晶矽材料及微晶矽材料的優點，提出了一個新穎的單接面薄膜太陽能電池架構 「 ITO / p-a-Si:H / i1-a-Si:H / i2-μc-Si:H / n-μc-Si:H / ITO 」。其中i1-a-Si:H層為非晶矽材料，因其移動率能隙較大的緣故，可提升整體的開路電壓；而i2-μc-Si:H層為微晶矽材料，可以吸收太陽光較長部分的波長，以增加電子電洞對的產生，增進短路電流密度，進而提升太陽能電池的轉換效率。此新穎單接面薄膜太陽能電池架構之模擬結果，相較於傳統的單接面矽薄膜太陽能電池可提高8.8 %到19.5 %的轉換效率。另外，為了因應低成本、高效能太陽能電池的發展趨勢，我們提出了一個新穎的薄膜太陽能電池製程方式，於相同的時間內，同時兩面沉積矽薄膜太陽能電池，自然形成一背對背類並聯型的矽薄膜太陽能電池。經過模擬後顯示，類並聯的非晶矽薄膜太陽能電池相較於傳統的非晶矽薄膜太陽能電池可提高約39.8 %的轉換效率，而類並聯的微晶矽薄膜太陽能電池相較於傳統的微矽薄膜太陽能電池也可提高約16 % 的轉換效率。經過實際製程驗證後，類並聯的非晶矽薄膜太陽能電池相較於傳統的非晶矽薄膜pin太陽能電池，可提高25.6 %到31.5 %的轉換效率。

In this work, combining the advantages of amorphous silicon and microcrystalline silicon, we propose a new structure of solar cell “ ITO / p-a-Si:H / i1-a-Si:H / i2-μc-Si:H / n-μc-Si:H / ITO ”. The i1-a-Si:H can make the open circuit voltage much higher due to the high mobility bandgap. The i2-μc-Si:H can get more effectively absorb of sunlight, so the novel p-i1-i2-n solar cell can get higher short circuit current density. The simulation results indicate the conversion efficiency is higher than that of the conventional silicon solar cell at least 8.8 % to 19.5 %. In order to obtain low-cost and high-performance solar cell, a novel thin film solar cell fabrication has been developed. In this way, the deposition of silicon thin film solar cells on both sides of the substrate is performed at the same time, forming a back-to-back parallel-type silicon thin film solar cell naturally. The simulation results indicate the conversion efficiency of the back-to-back parallel-type amorphous silicon thin film solar cell is higher than that of the conventional amorphous silicon thin film solar cell at least 39 %. And the conversion efficiency of the back-to-back parallel-type microcrystalline silicon thin film solar cell is higher than that of the conventional microcrystalline silicon thin film solar cell at least 16 %. The fabrication results also indicate the conversion efficiency is higher than that of the conventional pin amorphous silicon solar cell at least 25.6 % to 31.5 %.

第一章、導論 1
1.1. 背景 1
1.2. 矽薄膜太陽能電池 2
1.3. 矽太陽能電池製程趨勢 5
1.4. 動機 8
第二章、模擬結果與討論 10
2.1. 新穎單接面矽薄膜太陽能電池模擬 10
2.1.1. 模擬之物理模型與參數 10
2.1.2. 模擬之最佳化 15
2.1.3. 與傳統單接面矽薄膜太陽能電池之模擬比較 21
2.2. 新穎類並聯矽薄膜太陽能模擬 32
2.2.1. 模擬之物理模型與參數 32
2.2.2. 模擬之最佳化 38
2.2.3. 與傳統矽薄膜太陽能電池之比較 41
2.2.4. 類並聯矽薄膜太陽能電池單雙面照光之比較 43
第三章、製程結果與討論 49
3.1. 新穎單接面矽薄膜太陽能製程 49
3.1.1. 製程與光罩設計 49
3.1.2. 製程結果與討論 53
3.2. 新穎類並聯薄膜太陽能製程 55
3.2.1. 製程與光罩設計 55
3.2.2. 製程結果與討論 59
第四章、結論與未來展望 66
4.1. 結論 66
4.2. 未來展望 67
參考文獻 68
附錄 73
A. 太陽能電池基本原理與矽薄膜太陽能電池的物理機制 73
A-1. 太陽能電池基本原理 73
A-2. 矽薄膜太陽能電池物理機制 77
B. 個人獲獎 79
B-1. 新穎單接面薄膜太陽能電池模擬 79
B-2. 新穎薄膜太陽能電池製程研究 80

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