本論文為研製環型共振濾波器，也包括了對多模干涉耦合器及彎曲波導做一些探討。
在環型濾波器計算設計上，單環部分FSR有33.3GHz、40GHz及50GHz，串聯雙環的部分FSR分別有100GHz及200GHz；在2×2 MMI的部分，9

In this thesis, S-bend waveguides and ring resonant filters with multimode interference (MMI) couplers have been designed and fabricated.
The single-ring filters are designed to have free spectral ranges ( FSR's) of 33.3GHz, 40GHz and 50GHz. The FSR's of double-ring filters are 100GHz and 200GHz. The splitting ratios of the 9-

目錄
第一章 簡介
1-1. 前言.........................................1
1-2. 光波濾波器的介紹.............................1
1-3. 元件的應用...................................2
1-4. 論文架構.....................................3

第四章 原理
2-1. 環型濾波器簡介...............................4
2-1-1.單環濾波器之分析.........................6
2-1-2.雙環濾波器之分析........................10
2-2.多模干涉耦合.................................12
2-2.1 多模干涉耦合器模態分析..................13
2-3. 彎曲波導....................................16

第三章　元件設計與模擬
　　　　3-1. 前言........................................20
3-2. 環型濾波器
3-2-1. 單環濾波器之模擬計算....................23
3-2-2. 雙環濾波器之模擬計算....................25
3-3. 多模干涉耦合器..............................29
3-4. S型波導.....................................32
3-5. 光罩的設計..................................34

第四章 元件製程步驟
4-1. 製作流程示意圖..............................35
4-2. 製程示意圖..................................36
4-3. 製程步驟及實驗結果..........................39

第五章 量測與結果
5-1. 量測系統架構................................52
5-2. 量測結果....................................53

第六章 結論.............................................58

參考文獻.................................................59

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