近年來原油供應難以維繫穩定，尋找替代能源逐漸成為全世界的一項趨勢，比起其他形式的替代能源，太陽能電池因理論效率較高且技術發展成熟而獲得青睞。薄膜型太陽能電池，在同一受光面積下可大幅減少材料的使用量，若與濺鍍(sputtering)技術搭配，可以有效的降低生產成本。
　　氧化亞銅(Cu2O)具有較低的直接能隙(2eV)，吸收的頻段恰好落在可見光波長的範圍，很適合作為太陽能電池的吸收層，理論上應用於光伏元件會有很高的效率，一直以來持續有人研究。
　　本文以磁控式射頻濺鍍法製作氧化亞銅薄膜，混合氣體總通量30 sccm(氧氣1.5sccm、氬氣18.5sccm、氮氣10sccm)、濺鍍功率55W、基板溫度200℃的濺鍍製程可獲得單一晶相的氧化亞銅薄膜，分析其特性與表面結構，再與氧化鋅(ZnO)搭配組成P-N異質結構，最後以此異質接面結構作為太陽能電池元件的基礎製作太陽能電池元件，並在模擬太陽光照的條件下量測轉換效率，獲得I-V曲線通過第四象限的表現。

In recent years, it is becoming difficult to maintain the stability of the crude oil supply. Therefore, the research for renewable energy has become a global trend. Solar cells have gained lots of attentions because of their theoretically high efficiency and the mature fabrication technology. In the field of thin-film solar cell, the required amount of materials can be greatly cut down and the fabrication cost can be effectively reduced with the help of sputtering technique. Cu2O possesses a relatively low direct band gap (2eV), so the absorption spectrum appropriately falls in the range of visible light. It is very suitable as the absorption layer of solar cells.
In this thesis, RF magnetron sputtering method is used to manufacture Cu2O thin film. The dependence of fabricating condition and the surface structure of Cu2O are studied. With the gas flux of 30 sccm (oxygen 1.5 sccm, argon 18.5 sccm, nitrogen 10 sccm), sputtering power of 55W, and the substrate temperature of 200℃, a single phase Cu2O thin film can be obtained. The characteristics of the solar cell with the configuration of Ni/Cu2O/ZnO/ITO are also discussed in this thesis.

致謝 2
摘要 3
Abstract 4
目錄 5
圖目錄 6
表目錄 7
第一章 緒論 8
1-1　前言 8
1-2　研究動機與目的 10
1-3　各章提要 13
第二章 理論基礎 14
2-1 　太陽能電池介紹 14
2-2　濺鍍 19
2-3　反應式濺鍍 23
2-4　薄膜形成機制 25
第三章 實驗裝置與元件製作 27
3-1　實驗流程 27
從最初的濺鍍薄膜到最後製作元件的步驟，本文的實驗流程如下所示： 27
3-2　薄膜成長 28
3-3　薄膜量測與儀器介紹 30
3-3-1　表面輪廓儀(Surface Profiler) 30
3-3-2　雙晶薄膜ｘ光繞射儀(X-ray diffractometer，XRD) 31
3-3-3　場發射行掃描式電子顯微鏡(field emitter-scanning electron microscope) 35
3-3-4　太陽光模擬器(Solar simulator) 37
第四章　結果與討論 39
4-1　氧氣分壓對濺鍍氧化亞銅(Cu2O)薄膜的影響 39
4-2　濺鍍功率與氧化亞銅成膜的關係 42
4-3　太陽能電池元件製作 44
4-4　利用退火(annealing)促進薄膜的平整 46
4-5　利用環氮法改善元件的短路電流 48
第五章　總結 51
參考文獻 52

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