隨著科技發展突飛猛進，資訊的傳輸與需求量更是不可同日而語，但傳統的通訊系統早已跟不上如此龐大的傳輸量，矽光子技術被視為目前的解決方案。非線性光學材料的飛秒等級響應時間可用於處理和操作數據信號是一大可以利用的優勢。為了實現非線性調變，需要較高的功率，倘若以矽作為元件的材料，雙光子吸收的特性會降低性能，而五氧化二鉭(Ta2O5)具有高折射率(Refractive index)、高非線性係數(n2)、寬能隙(Large bandgap)的優點，同時也得以和矽基板在製作過程中加以整合，適合作為非線性全光調變器的材料，因此本論文以五氧化二鉭(Ta2O5)為材料，並利用非線性多模態干涉波導的特性來實現非線性全光調變切換器的製作。首先以分步Fourier法考慮的多模態波導中非線性傳播方程式分析其特性，並在模擬結果中觀察到非線性切換的效果。設計的尺寸為寬8um高0.1um長0.4557(31L)及寬8um高0.1um長0.7497(51L)的多模態波導，以波長1064nm，脈衝寬度100fs，重複率為80MHz的脈衝雷射量測。比較切換功率的能力，51L長波導的模擬及量測觀察到的結果，皆比31L長的波導來的早發生。若在模擬上增加高階模態的傳輸損耗，可以得到出較為吻合實驗結果的分析。

The rapid advancement in information science and technology, such as big data and deep learning opens even higher demand for data processing and transmission, which is beyond the capability of currently mature technology based on electronic circuits. Although integrated optics and silicon photonics serves one of the solution to such a demand, the electronic response in data modulation and processing still set the limit to the speed. Femtosecond response time are easily achieved in nonlinear optical materials, for example the Kerr effect can be used for all optical processing in ultrafast regime. Even though silicon itself is one of the good nonlinear material, its two photon absorption (TPA) become an obstacle for implementing efficient nonlinear optical processing device. Ta2O5, on the other hand, is a wide band gap material providing high transmission and low loss in communication bandwidth. In the meanwhile, it has large Kerr nonlinear coefficient that is comparable to silicon but does not suffer from TPA. In this dissertation, we implement and demonstrate non-linear all-optical optical switcher using nonlinear multiple interference effect in Ta2O5 waveguide of sub-wavelength thickness. We design the device based on multiple-mode nonlinear Schrödinger equations and split-step Fourier method for simulation. We designed and fabricated multi-mode waveguides of width 8um, height 0.1um, length 0.4557cm(31L), and length 0.7497cm(51L) and characterize them by a femtosecond oscillator emitting 100fs mode locked pulses at 80MHz repetition frequency and the wavelength of 1064 nm. It is observed that the transmission through the nonlinear MMI waveguide drops as the peak intensity of the incident laser increases. The transition in the power depending transmission is consistent with the simulation when the modal losses are justified unequally.

中文審定書 i
英文審定書 ii
致謝 iii
摘要 iv
Abstract v
目錄 vi
圖次 ix
表次 xv
1 第一章 緒論 1
1.1 前言 1
1.2 矽光子技術 2
1.3 全光訊號調變 3
1.4 非線性效應 5
1.4.1 四波混頻(four-wave mixing, FWM) 5
1.4.2 三波混頻(Three Wave Mixing) 7
1.4.3 SPM和XPM： 10
1.5 光學邏輯元件 11
1.5.1 640-Gb / s的同步邏輯閘： 12
1.5.2 High-Base加法和減法： 13
1.6 文獻回顧以及研究動機 14
1.7 光波導材料 22
參考文獻 25
2 第二章 原理 31
2.1 Maxwell’s equations 31
2.2 脈衝傳播方程式 35
2.2.1 非線性脈衝傳播 35
2.2.2 高階非線性效應 42
2.3 多模態干涉 50
2.3.1 多模態波導 51
參考文獻 56
3 第三章 模擬 61
3.1 數值方法 61
3.1.1 Sellmeier equation 61
3.1.2 Eigenvalue equation 63
3.1.3 Split-Step Fourier Method 64
參考文獻 73
4 第四章 製程 76
4.1 基板 76
4.2 清洗 77
4.3 鍍膜 77
4.4 微影 80
4.5 蝕刻 82
4.6 沉積 84
4.7 切割 85
4.8 研磨 86
5 第五章 量測 88
5.1 量測系統 88
5.2 長直波導 89
5.3 多模態干涉波導 91
5.4 討論 93
6 第六章 結論 96

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