Fabry-Pérot光纖干涉儀具有體積微小、結構簡單以及可以進行探針式感測等優點，近年來被廣泛研究於許多領域，而開放式共振腔Fabry-Pérot光纖干涉儀具有較高的折射率靈敏度，因此適合應用於環境折射率的感測。有研究團隊提出利用飛秒雷射進行加工或利用錯位熔接法製作開放式共振腔，但有製作成本昂貴或製作過程困難的問題。本論文利用蝕刻後之斜角多模光纖與切平的單模光纖進行熔接來製作開放式共振腔Fabry-Pérot光纖干涉儀。相較於錯位熔接法，我們提出的方法能降低製程難度，且不需使用飛秒雷射，可以有效降低製作成本。
我們利用所製作之開放式共振腔Fabry-Pérot光纖干涉儀對環境折射率、溫度以及氣壓進行實驗量測。在折射率1.333至1.3463之間，元件的折射率靈敏度達到1219.6nm/RIU，對於折射率量測的最大誤差值僅為5.15×10-5 RIU，代表元件對於折射率量測具有高敏度以及高穩定性。在溫度量測範圍100℃至500℃之間，其溫度靈敏度只有-6.73pm/°C，說明元件在進行外在環境參數感測時，不易受到溫度擾動的影響。而在氣壓10至100psi之間，元件的靈敏度為28.2pm/psi，比起其他文獻所提出全光纖Fabry-Pérot光纖干涉儀氣壓感測器具有更高的靈敏度。根據上述的實驗結果，我們所提出的開放式共振腔Fabry-Pérot光纖干涉儀在環境感測上具有很高的應用潛力。

In recent years, fiber-optic Fabry-Pérot interferometers (FFPIs) have been widely explored in many fields due to their advantages such as small size, simple structure, and the ability of probe sensing. In addition, due to their high sensitives, FFPIs with open cavities have high potential in environmental refractive index (RI) monitoring. Previous studies have proposed open-cavity FFPIs formed by femtosecond lasers or offset fusing method, which results in high cost or enhances the fabrication difficulty. In this thesis, we simply splice an etched beveled multi-mode fiber with a cleaved single-mode fiber to fabricate an open-cavity FFPI. The proposed method can reduce the fabrication difficulty, and no high-cost femtosecond lasers are required.
We employ the fabricated open-cavity FFPI sensor to perform the RI, thermal, and pressure sensing. The RI sensitivity of the FFPI is 1219.6nm/RIU as the RI ranged from 1.3330 to 1.3463. The maximum deviation is only 5.15×10-5 RIU, which shows the high sensitivity and great stability of our FFPI. We have also measured the pressure response of our FPI sensor, and the sensitivity is 28.2 pm/psi as the pressure is from 10 psi to 100 psi. Compared with other all-fiber pressure sensors, our fabricated open-cavity FFPI sensor has a higher pressure sensitivity. From the experimental results, our fabricated FFPI sensor indeed has good potentials in the environmental monitoring.

第一章 緒論.....................................................................................................................1
1-1 光纖干涉儀的發展......................................................................................1
1-2 光纖干涉儀感測器的種類介紹..................................................................3
1-2.1 麥克森光纖干涉儀...................................................................5
1-2.2 馬赫桑德光纖干涉儀...............................................................6
1-2.3 法布里培諾光纖干涉儀...........................................................8
1-3 研究動機....................................................................................................11
第二章 Fabry-Pérot光纖干涉儀....................................................................................12
2-1 Fabry-Pérot干涉儀原理..........................................................................12
2-2 Fabry-Pérot光纖干涉儀原理..................................................................19
第三章 開放式共振腔Fabry-Pérot光纖干涉儀的製作...............................................22
3-1 元件設計....................................................................................................22
3-2 元件製作步驟............................................................................................25
3-2.1 光纖介紹.................................................................................25
3-2.2 製作步驟.................................................................................26
3-3 元件結構確認............................................................................................31
第四章 開放式共振腔Fabry-Pérot光纖干涉儀的基本特性.......................................33
4-1 實驗架設....................................................................................................33
4-2 研磨程度對於干涉特性的影響................................................................36
4-3 不同開放式共振腔長之干涉特性............................................................38
第五章 開放式共振腔Fabry-Pérot光纖干涉儀的感測...............................................42
5-1 折射率感測................................................................................................42
5-1.1 量測架設...................................................................................42
5-1.2 折射率量測…...........................................................................43
5-1.3 穩定度量測...............................................................................48
5-1.4 反應時間量測...........................................................................49
5-2 溫度感測....................................................................................................51
5-2.1 量測架設...................................................................................51
5-2.2 溫度量測原理...........................................................................52
5-2.3 熱退火處理及溫度量測結果...................................................53
5-3 氣壓感測....................................................................................................55
5-3.1 氣壓量測架設...........................................................................55
5-3.2 氣壓量測...................................................................................57
5-3.3 文獻比較...................................................................................60
第六章 結論...................................................................................................................61
參考文獻.........................................................................................................................62

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