本篇論文提供了一個全新的製程以整合噴孔片至霧化器上。並將其應用在融合微粒電噴灑游離質譜法上。此一新技術整合了多次曝光單次顯影技術（MESD）、超硬鎳-鈷合金電鑄以及精密微細射出成型等。可以大幅減少目前噴孔片的生產成本。經過黃光定義圖案與多次曝光單次顯影後，將定義出的噴孔結構以鎳-鈷合金電鑄後，可得到高硬度之鎳-鈷模仁（HV 550）。由於鎳-鈷模仁的硬度較強，因此以此模仁可以承受高速射出成型。此外用極短成型週期完成噴孔片，成型材料則是選用LCP高分材。本研究使用ANSYS模擬壓電致動器的最佳驅動頻率，並實際將壓電致動器與噴孔片組裝成一霧化器系統，證實了霧化器應用在FD-ESI之可行性。

This study presents a novel concept to integrated nebulizer nozzle plate for FD-ESI (Fused-droplet Electrospary Ionization Mass Spectrometry) using modified LIGA process. This fabrication technique can reduce the production cost of current nozzle plate. It comprises of multi-exposure and single develop (MESD) process, the extra-hard Ni-Co (Nickel-Cobalt) electroforming and thin-wall plastic microinjection molding. The template of nozzle plate is patterned using dry film and MESD process. Later, the template is transferred into metal Ni-Co mold by electroplating. In this study, the technique of extra-hard Ni-Co alloy electroplating process with Hardness of Vickers over (HV) 550 is developed. Then with the stiffness of Ni-Co mold, it can withstand high injection speed. Thin-wall microinjection molding process with short cycle time to fabricate nozzle plate can be finished. Liquid crystal polymer (LCP) is used for thin-wall microinjection molding process. In order to make efficiently atomization, we used ANSYS to optimize PZT actuator. Besides, the work of nebulizer with FD-ESI was demonstrated in this study. a novel design of nozzle plate.

目錄......................................................I
圖目錄...................................................IV
表目錄..................................................VII
中文摘要...............................................VIII
英文摘要.................................................IX
第一章 序論...............................................1
1.1研究背景...............................................1
1.2文獻回顧...............................................2
1.3本文架構...............................................4
第二章 驅動元件...........................................5
2.0前言...................................................5
2.1壓電驅動方式介紹.......................................6
2.2壓電理論...............................................9
– 2-2.1 機械與電氣間之關係.........................9
– 2-2.2 壓電方程式................................10
2.3壓電模擬..............................................12
– 2-3.1 ANSYS簡介.................................12
– 2-3.2 壓電模擬..................................15
第三章 噴孔片製作與機構組裝..............................20
3.0前言..................................................20
3.1微電鑄................................................20
– 3-1.1製程原理介紹...............................20
– 3.1-2 縮孔電鑄製程介紹..........................29
3.2薄件射出成型..........................................30
– 3-2.1射出成型原理...............................30
– 3-2.2 射出成型之微細模仁製作....................34
– 3-2.3 射出成型機及微成型模具裝配介紹............37
– 3-2.4 射出原料..................................40
3.3霧化器之組裝..........................................41
第四章 霧化器於質譜分析之應用............................44
4.0前言..................................................44
4-1質譜分析簡介..........................................44
– 4-1.1化學液相層析法(HPLC)簡介...................45
– 4-1.2電噴灑游離質譜法(ESI)簡介..................46
– 4-1.3 ESI離子化機制.............................47
– 4-1.4融合微粒電噴灑游離裝置(FD-ESI) ............50
4.2霧化器於質普分析之應用................................51
第五章 結果與討論........................................56
5.1壓電模擬與量測結果討論................................56
5.2微射出結果討論........................................58
5.3質譜分析應用結果討論..................................63
第六章 結論與建議........................................70
6-1本研究之主要成果......................................70
6-2未來展望..............................................71
參考文...................................................72

[1] Kamisuki, S., Fujii, M., Takekoshi, T., Tezuka, C., and Atobe, M., "A high resolution, electrostatically-driven commercial inkjet head," Proceedings of the IEEE, 2000, p. 793-798.
[2] Domingo, C., Berends, E. M., and Van Rosmalen, G. M., "Precipitation of ultrafine benzoic acid by expansion of a supercritical carbon dioxide solution through a porous plate nozzle," Journal of Crystal Growth, 1996, 166(1-4): p. 989-995.
[3] Goldmann, T. and Gonzalez, J. S., "DNA-printing: utilization of a standard inkjet printer for the transfer of nucleic acids to solid supports," Journal of Biochemical and Biophysical Methods, 2000, 42(3): p. 105-110.
[4] Teranishi, R., Fujiwara, T., Watanabe, T., and Yoshimura, M., "Direct fabrication of patterned PbS and US on organic sheets at ambient temperature by on-site reaction using inkjet printer," Solid State Ionics, 2002, 151(1-4): p. 97-103.
[5] Yu, H. and Kim, E. S., "Micropropulsion of air and liquid jet by acoustic streaming," Proceedings of the IEEE, 2003, p. 76-79.
[6] Allen, D. M. and Lecheheb, A., "Micro electro-discharge machining of ink jet nozzles: optimum selection of material and machining parameters," Journal of Materials Processing Technology, 1996, 58(1): p. 53-66.
[7] Li, Y., Guo, M., Zhou, Z. Y., and Hu, M., "Micro electro discharge machine with an inchworm type of micro feed mechanism," Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2002, 26(1): p. 7-14.
[8] Burghardt, B., Scheede, S., Senczuk, R., and Kahlert, H. J., "Ablation plume effects on high precision excimer laser-based micromachining," Applied Physics a-Materials Science & Processing, 1999, 69: p. S137-S140.
[9] Zhang, Y., Lowe, R. M., Harvey, E., Hannaford, P., and Endo, A., "High aspect-ratio micromachining of polymers with an ultrafast laser," Applied Surface Science, 2002, 186(1-4): p. 345-351.
[10] Lee, J. D., Yoon, J. B., Kim, J. K., Chung, H. J., Lee, C. S., Lee, H. D., Lee, H. J., Kim, C. K. and Han, C. H. , "A thermal inkjet printhead with a monolithically fabricated nozzle plate and self-aligned ink feed hole," Journal of Microelectromechanical Systems, 1999, 8(3): p. 229-236.
[11] Cheng, C. H., Chen, S. C., and Chen, Z. S., "Multilevel electroforming for the components of a microdroplet ejector by UV LIGA technology," Journal of Micromechanics and Microengineering, 2005, 15(4): p. 843-848.
[12] Tzeng, S. C. and Ma, W. P., "Study of flow and heat transfer characteristics and LIGA fabrication of microspinnerets," Journal of Micromechanics and Microengineering, 2003, 13(5): p. 670-679.
[13] Menz, W., Bacher, W., Harmening, M., and Michel, A., "The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding," Proceedings of IEEE, 1991, p. 69-73.
[14] Bacher, W., Menz, W., and Mohr, J., "The LIGA technique and its potential for microsystems-a survey," IEEE Transactions on Industrial Electronics, 1995, 42(5): p. 431-441.
[15] Schift, H., Heyderman, L. J., Maur, M. A. D., and Gobrecht, J., "Pattern formation in hot embossing of thin polymer films," Nanotechnology, 2001, 12(2): p. 173-177.
[16] Both, A., Bacher, W., Heckele, M., Muller, K.D., Ruprecht, R. and Strohrmann, M., "Molding process with high alignment precision for the LIGA technology," Proceedings of the IEEE, 1995, p. 186.
[17] Piotter, V., Hanemann, T., Ruprecht, R., and Hausselt, J., "Injection molding and related techniques for fabrication of microstructures," Microsystem Technologies, 1997, 3(3): p. 129-133.
[18] Yao, D. G. and Kim, B., "Simulation of the filling process in micro channels for polymeric materials," Journal of Micromechanics and Microengineering, 2002, 12(5): p. 604-610.
[19] Eberle, H., "Micro-injection moulding - Mould technology.," Kunststoffe-Plast Europe, 1998, 88(9): p. 1344-1346.
[20] Ruprecht, R., Bacher, W., Hausselt, J. H., and Piotter, V., "Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermo-plastics," Proceedings of SPIE, 1995, p. 146-157.
[21] Weber, L., et al., "Micromolding: a powerful tool for large-scale production of precise microstructures," Proceedings of SPIE, 1996, p. 156-167.
[22] Su, Y. C., Shah, J., and Lin, L. W., "Implementation and analysis of polymeric microstructure replication by micro injection molding," Journal of Micromechanics and Microengineering, 2004, 14(3): p. 415-422.
[23] Chen, R. H. and Lan, C. L., "Fabrication of high-aspect-ratio ceramic microstructures by injection molding with the altered lost mold technique," Journal of Microelectromechanical Systems, 2001, 10(1): p. 62-68.
[24] Le, H. P., "Progress and trends in ink-jet printing technology," Journal of Imaging Science and Technology, 1998, 42(1): p. 49-62.
[25] Hansell, C. W., "Measuring Instrument of Recording Type," U.S. patent, 2512743, 1950.
[26] Bartky, "Multi-channel array pulsed droplet depositionapparatus," U.S. patent, 4992808, 1991.
[27] Wallace, D. B., Trost, H. J., and Eichenlaub, U., "Multi-fluid Ink-Jet Array for Manufacturing of Chip-Based Microarray Systems," Proceedings of 2nd International Conference on Microreaction Technology, 1998, p. 1-5.
[28] Yoshimura, K., Kishimoto, M., and Suemune, T., "Inkjet Printing Technology," oki Technical Review, 1998, 64: p. 41-44.
[29] Brunahl, J. and Grishin, A. M., "Piezoelectric shear mode drop-on-demand inkjet actuator," Sensors and Actuators a-Physical, 2002, 101(3): p. 371-382.
[30] 周桌明, "壓電力學," 全華科技圖書, 2003.
[31] 莊達人, "VLSI製造技術," 高立圖書, 2002.
[32] 劉博文, "ULSI製造技術," 新文京開發, 2003.
[33] Wang, X. F., Engel, J., and Liu, C., "Liquid crystal polymer (LCP) for MEMS: processes and applications," Journal of Micromechanics and Microengineering, 2003, 13(5): p. 628-633.