微機電系統是通過微製造技術將電子和機械元器件集成在一個矽基片上而構成的獨立智慧系統，主要包括微感測器、微執行器（作動器、致動器）、微能源、信號處理以及控制電路。微機電系統具有體積小、重量輕、功耗小、慣性小、回應時間短等特點，具有力、熱、磁、化學、生物等多種能源轉化與傳輸功能，它可以完成常規大尺寸機電系統不能完成的任務。結合「再生能源發展方案」及對微機電產業的重視，本實驗室將致力於微發電機系統之開發。電磁式旋轉微發電機引用多極多層平面微線圈與多極磁石的優點是可以平面化製作，有效減少發電機體積；線圈多極多層與磁石多極化的設計，可提高發電量。電磁式旋轉微發電機之多極多層平面微線圈與多極磁石之製作方法，主要技術包括繞線技術與磁性材料燒結磁石技術。以電磁感應原理為基礎及工程輔助分析軟體FEMLAB，做分析、設計與建構出多極多層磁石及線圈之旋轉式微發電機。建立發電量數學模型以推導理論發電量；完成旋轉式微發電機之雛型，進行發電測試，由量測實驗值與理論值比較發電量，驗證理論模型。

MEMS process offers many advantages that the microsystem can be downscaled and can be combined with integrated circuit (IC). This technique has been successfully applied to micromotor, micropump, and microelectric apparatus but there has been existing problems of independent and compact power supply system. Hence this study presents an electromagnetic rotary microgenerator, mainly consisting of multilayer planar Cu microcoil and multipolar hard magnet of Nd/Fe/B by sintering. The layout of the microgenerator is 9 9 1 mm3 in volume. The paper also presents design and analysis of a multipolar rotary electromagnetic microgenerator. Theoretical mathematic model is derived to predict the power generation. Experimental results are compared with simulations. The experimental result shows good agreement with simulations. The preliminary experimental result reveals that this microgenerator with eight magnet poles and four-layer Cu planar microcoil generates an output voltage of 569 mV at 213.7 Hz frequency.

目錄
目錄....................................................................................................................I
圖目錄.............................................................................................................III
表目錄.............................................................................................................VI
符號說明.......................................................................................................VIII
中文摘要...........................................................................................................X
英文摘要.........................................................................................................XI
第一章 緒論......................................................................................................1
1-1 研究背景與目的................................................................................1
1-2 文獻回顧............................................................................................4
1-3 本文架構…........................................................................................6
第二章 微發電機之多極多層平面微線圈設計與分析..................................7
2-1 發電機理論基礎................................................................................7
2-2 旋轉微發電機設計原理....................................................................7
2-2-1 電磁感應分析.........................................................................7
2-2-2 線圈之分析與設計.................................................................9
2-2-3 感應電壓頻率與線圈轉速之關係.......................................13
2-3 FEMLAB電磁感應分析..................................................................13
第三章 多極多層旋轉式微發電機之製作....................................................17
3-1 多極多層旋轉式微發電機..............................................................17
3-2 微線圈之製作..................................................................................17
3-2-1 繞線技術...............................................................................18
3-2-2 繞線技術製作微線圈...........................................................18
3-3 磁石之製作......................................................................................20
3-3-1 磁性材料...............................................................................20
3-3-2 磁石.......................................................................................22
3-3-3 燒結製程技術.......................................................................25
3-3-4 燒結製程技術製作磁石.......................................................26
3-3-5 磁性之量測...........................................................................31
3-3-6振動樣品磁力計系統.............................................................34
第四章 結果與討論........................................................................................37
4-1 微發電機..........................................................................................37
4-2 繞線技術製作微線圈結果討論......................................................37
4-3 燒結製程技術製作磁石結果討論..................................................38
4-3-1 振動樣品磁力計系統量測磁性............................................40
4-4 電磁感應分析結果討論..................................................................41
4-5 發電量量測實驗結果討論..............................................................47
4-5-1發電量量測實驗一結果討論..................................................50
4-5-2發電量量測實驗一結果討論..................................................58
第五章 結論與未來展望................................................................................66
5-1結論.............................................................................................66
5-2未來展望.....................................................................................66
參考文獻..........................................................................................................68

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