本實驗主要有兩個目標，首要目標為完成Ag-Al-Sn三元系統和Ag-Al-Pd三元系統500℃之等溫橫截面相圖。第二目標為在純銀線可靠度試驗中，所生成之Ag-Al介金屬相性質不佳並且會出現Kirkendall voids，在長時間後將形成孔洞造成微接點失效。根據二元相圖在Al-Pd中具有許多介金屬相，希望可以利用這個性質來抑制Ag-Al相之成長，在Ag-Sn中則具有與Ag2Al相同結構之介金屬相可以完全互溶來形成強化機制。本實驗為利用擴散偶製作相圖，藉由Ag-Pd及Ag-Sn和純鋁擴散偶以模擬打線接合之界面擴散層生長情形，觀察Pd及Sn對於Ag2Al相之影響。
有別於傳統大量製作單點合金試片方式繪製相圖，起先製作擴散偶試片針對界面相平衡進行研究，整理所獲得之局部相平衡結果，搭配特定單點合金試片相平衡結果進行驗證，確定出整體相平衡關係，以繪製出完整三元系統等溫相圖。實驗中所配製之合金試片皆利用真空電弧融煉爐所製作，再將處理後之合金試片封入真空石英管中進行時效熱處理，擴散偶試片於500±3℃進行24小時之均質化處理，單點合金試片則在500±3℃中，進行為期30天均質化熱處理，試片經由金相處理後利用電子微探儀(EPMA)對於平衡相進行成分分析確定其組成。
在Ag-Al-Sn系統中，利用EPMA進行分析單點合金試片及XRD粉末繞射儀進行結構分析，確認出Ag2Al及Ag5Sn帶狀連接區λ相之存在及其邊界，同時定出一個三相區為L(Sn)-Ag3Sn-λ。
在Ag-Al-Pd系統中，一共找出了七個三相區，分別為(1) λ(Al4Pd) -γ(Al21Pd8) -(Al)(2)γ(Al21Pd8)-(Al)-Ag2Al(3)γ(Al21Pd8)-δ(Al3Pd2)-Ag2Al(4)μ(AlPd)-δ(Al3Pd2) -Ag2Al (5)μ(AlPd)-ν(Al3Pd5)-(Ag,Pd,Al) (6)ν(Al3Pd5)-ρ(Al2Pd5)-(Ag,Pd,Al) (7)ρ(Al2Pd5)-τ(AlPd2)-(Ag,Pd,Al)。

The Ag-Al-Pd and Ag-Al-Sn 500℃ isothermal phase diagrams were determined in this study. The purpose is to provide the phase diagram data for the guide of new silver bonding-wire development. The reliability test of silver bonding-wire show the poor bondability due to the poor Ag2Al intermetallic properties. The kirkendall voids and cracks were observed during the reliability tests. In the Ag-Al-Pd system, there are many IMCs in the binary phase diagram of Ag-Pd, hoping to exploit this property to inhibit the growth of Ag-Al phase. In the Ag-Al-Sn system, the phase Ag3-5Sn has the same structure as Ag2Al. The structure can be strengthened by solid solution strengthening.
The diffusion couple technique applied to obtain the diffusion paths that provide the two-phases or three-phases equilibrium information. The tradition equilibrated alloys were selected to verify the diffusion couples results and complete the equilibrium phase diagram. All of the samples in the experiment were prepared by arc melting and sealed in the vacuum quartz tube for 500 ℃ annealing. The Electron Probe X-Ray Microanalyzer (EPMA) used to analysis the equilibrium phase composition.
In Ag-Al-Sn system, the solubility range of silver phase (Ag) and Ag2Al-Ag5Sn (λ)phase were determined.
There are seven three-phase equilibrium was observed in the Ag-Al-Pd equilibrated alloys, as follows (1) γ(Al21Pd8) -(Al)-Ag2Al, (2) γ(Al21Pd8) -δ(Al3Pd2) -Ag2Al, (3) μ(AlPd)-δ(Al3Pd2)-Ag2Al,(4)ν(Al3Pd5)-(Al2Pd5)-(Ag,Pd,Al)(5)λ(Al4Pd)-γ(Al21Pd8)-(Al) (6)μ(AlPd)-ν(Al3Pd5)-(Ag,Pd,Al) (7)ρ(Al2Pd5)-ρ(Al2Pd5)-(Ag,Pd,Al).

論文審定書 i
致謝 ii
摘要 iii
Abstract iv
總目錄 vi
圖目錄 ix
表目錄 xiii
壹、前言 1
1-1 研究背景 1
1-2 研究動機 2
貳、文獻回顧 4
2-1 相平衡 4
2-2 二元系統相平衡圖 4
2-2-1 Ag-Al二元系統相平衡圖 4
2-2-2 Ag-Pd二元系統相平衡圖 5
2-2-3 Ag-Sn二元系統相平衡圖 5
2-2-4 Al-Pd二元系統相平衡圖 6
2-2-5 Al-Sn二元系統相平衡圖 8
2-3 三元系統 8
2-3-1 Ag-Al-Sn 三元系統 8
2-3-2 Ag-Al-Pd 三元系統 8
2-4 擴散 9
2-4-1 界面反應 9
2-4-2 擴散路徑 9
參、實驗步驟 11
3-1 實驗目的 11
3-2 試片製備 11
3-2-1合金配製 11
3-2-2擴散偶試片製作及時效熱處理 12
3-2-3單點試片製作及時效熱處理 12
3-3金相處理 13
3-4 EPMA量測分析 13
3-5 XRD 結構分析 13
肆、實驗結果 14
4-1 500℃之Ag-Al-Sn平衡相圖研究 14
4-1-1 500℃之Al-Ag95Sn5擴散偶結果 14
4-1-2 500℃之Al-Ag92Sn8擴散偶結果 14
4-1-3 500℃之Al-Ag90Sn10擴散偶結果 14
4-1-4 λ帶狀區單點合金試片 15
4-1-5 Ag3Sn-λ-L(Sn) 三相區單點合金試片 15
4-2 500℃之Ag-Al-Pd平衡相圖研究 16
4-2-1 500℃之Al-Ag92Pd8擴散偶結果 16
4-2-2 500℃之Al-Ag90Pd10擴散偶結果 16
4-2-3 γ(Al21Pd8)-λ-(Al) 三相區單點試片 16
4-2-4 γ(Al21Pd8)-(Al) 二相區單點試片 17
4-2-5 γ(Al21Pd8)-(Al)-Ag2Al 三相區單點合金試片 17
4-2-6 γ(Al21Pd8)-δ(Al3Pd2) -Ag2Al 三相區單點合金試片 17
4-2-7 μ(AlPd)-δ(Al3Pd2) 二相區單點合金試片 18
4-2-8 μ(AlPd)-δ(Al3Pd2)-Ag2Al 三相區單點合金試片 18
4-2-9 μ(AlPd)-(Ag,Pd,Al) 二相區單點合金試片 18
4-2-10 μ(AlPd)-ν(Al3Pd5)-(Ag,Pd,Al) 三相區單點合金試片 19
4-2-11 ν(Al3Pd5)-ρ(Al2Pd5)-(Ag,Pd,Al) 三相區單點合金試片 19
4-2-12 ρ(Al2Pd5)-τ-(Ag,Pd,Al) 三相區單點合金試片 19
4-2-13 ρ(Al2Pd5)-(Ag,Pd,Al) 二相區單點合金試片 20
4-2-14 τ-(Ag,Pd,Al) 二相區單點合金試片 20
4-2-15 (Ag,Pd,Al) 單相區單點合金試片 20
伍、討論 21
5-1 Ag-Al-Sn系統 21
5-2 Ag-Al-Pd系統 23
陸、結論 26
6-1 Ag-Al-Sn系統 26
6-2 Ag-Al-Pd系統 26
柒、參考文獻 28

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