本論文主要使用變溫光致螢光方法來研究AlGaN/GaN 異質結構。文中以較多的篇幅詳細描述其原理、操作過程與分析方法，希望提供完整的使用經驗給予後人參考。實驗結果則偏重分析由異質結構中的GaN 所發出之螢光訊號，由文獻中的經驗來判斷，85K 時所量測到3.486eV、3.405eV 及3.310eV 的峰值分別由Free Exciton A、FXA-1LO 和FXA-2LO 自由激子與聲子的交互作用所貢獻。針對主波峰做高斯曲線擬合，可觀察到主波峰由(D0,X)、FXA 和FXB 所組成。最後對主波峰隨溫度之變化作一系列的分析。

We study AlGaN/GaN heterostucture using temperature dependent micro-photoluminescence. Detailing its principle, operation process and analysis is to provide usage experiences for posterity's reference. The experiment's results emphasize analysis in the photoluminescence spectrum of the GaN in the heterostructure. We believe the peaks 3.486eV, 3.405eV and 3.310eV provided from Free Exciton A, FXA-1LO and FXA-2LO respectively by experience in the cultural heritage.And the fitting result of FXA peak with Gaussian curve shows the major peak is composed by (D0,X), FXA and FXB. Finally, we analyze the major peaks' characteristics varied with the temperature.

第1 章 前言...........................................................................................6
第2 章 理論...........................................................................................7
2-1 異質結構...................................................................................7
2-2 光致螢光...................................................................................9
第3 章 實驗儀器與步驟.....................................................................14
3-1 儀器架設.................................................................................14
3-2 實驗流程.................................................................................19
3-3 數據處理.................................................................................24
第4 章 實驗數據分析.........................................................................32
4-1 實驗樣品結構.........................................................................32
4-2 實驗結果概述.........................................................................34
4-3 KTH 417 實驗結果.................................................................38
4-4 KTH 437 實驗結果.................................................................40
4-5 KTH 438 實驗結果.................................................................42
第5 章 綜合討論.................................................................................44
5-1 實驗誤差討論.........................................................................44
5-2 發光來源.................................................................................48
5-3 LO Phonon Energy ..................................................................52
5-4 主波峰分裂.............................................................................58
5-5 能隙分析.................................................................................67
5-6 半高寬分析.............................................................................70
5-7 發光強度分析.........................................................................73
第6 章 結論.........................................................................................76
Reference 77

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