本論文目的是利用乾蝕刻技術在矽晶片上製做半球形微透鏡陣列母模，然後在PET 基板上翻印成微透鏡陣列，且應用於可撓式有機發光二極(OLED)，以達到增加元件亮度之目的。
在製程上，首先我們利用RIE/ECR 乾蝕刻系統以SF6 為反應氣體蝕刻矽晶片並控制反應氣壓、ECR power、RF power、反應時間，將矽晶片蝕刻成凹半球型微透鏡陣列母模，再利用濕蝕刻以氫氟酸(HF)與硝酸(HNO3)之混和溶液蝕刻矽晶片母模以利於矽母模之脫模， 最後再以此母模利用熱壓成型法在材料PET(Polyethyleneterephthalate)之基板壓成凸微透鏡陣列結構。
利用此製程我們已成功做出半徑25μm 與10μm 的半球形微透鏡陣列矽基母模，在PET 材質之基板壓印出微透鏡陣列結構，且其覆蓋率達90%。此外表面微透鏡陣列可增加OLED 之外部量子效應(Out coupling Efficience)，以達到增加OLED 亮度之目的，而模擬的結果微透鏡結構可增加亮度為平面之1.73 倍，而實驗結果約1.67 倍。

This aim of this dissertation is to fabrication microlens arrays (MLA) by silicon mold using dry etching technique and imprint on the PET
substrate by direct imprinting microlens structures on Polyethylene terephthalate (PET) substrates using Si molds.The MLA on PET substrates can be used to increase light emitting efficiency from OLED.
The MLA was formed by first etching the silicon wafers using SF6 process gas in an RIE/ECR system using isotropic etching technique.The concave undercuts obtained after the dry etching was removed by
wet-etching the wafer in HF and HNO3 solutions.Finally,the fabricated silicon mold was used to imprint the microlens structure on the PET
substrates.The microlens array with 10 μm and 25 μm radius on PET substrate were successfully fabricated using the technique.The surface
coverage of the MLA of beter than 90% was obtained.
In addition,the outcoupling efficiency of an OLED can be increased using the MLA.The brightness enhancement factor of 1.67 was achieved
using in the MLA comparision to the simulation result of 1.73.

目錄
目錄.......................................................................................................III
圖目錄........................................................................................................V
第一章 簡介...............................................................................................1
1.1 前言...................................................................................................1
1.2 研究動機...........................................................................................2
1.3 研究目標...........................................................................................3
1.4 文獻回顧..........................................................................................4
第二章光學模擬與量測..........................................................................13
2-1 光學折射定律與全反射定律.........................................................13
2-2 光學模擬與量測.............................................................................14
2-2-1 微透鏡陣列對OLED 之光學模擬........................................14
2-2-2 微透鏡應用於太陽能電池之模擬.........................................17
第三章 微透鏡製程實驗........................................................................20
3.1 微透鏡陣列製作流程....................................................................20
3.2 微透鏡製程結果............................................................................25
第四章 微透鏡陣列應用於有機發光二極體........................................30
IV
4.1 有機發光二極體元件製程............................................................30
4.2 結果與討論....................................................................................31
第五章結論...............................................................................................37
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