本論文旨在探討應用拋光加工對工件表面進行粗度移除所能得到的終極粗度及其特性。本研究將利用液動壓拋光法為研究對象來幫助我們了解拋光加工法的終極粗度及特性，並期望此結論能適用於其他的拋光法。文中除提出終極粗度相關的數學模式，並以實驗的方式加以探討理論的合適性。
文中首先提出達到終極粗度的充要條件，是當單位時間工件粗度在波峰波谷的加工率差異小於最小的加工單位(在本研究中假設為一顆原子的大小)。利用此一概念結合過去的研究提出在液動壓拋光法下終極粗度的理論模式。並以電腦模擬的方式幫助吾人更加瞭解終極粗度的特性，此外更進一步以實驗的方式驗證終極粗度的特性及粗度理論的合適性。
最後針對實驗和理論不一致的地方提出可能的解釋，以作為後續相關研究的方向，並對拋光加工的操作參數提出一些建議，期能對於以拋光加工獲得極光滑表面有所助益。

The ultimate value of surface roughness and its characteristic for the polishing process was investigated in this thesis. To find out the nature of ultimate surface roughness by means of the hydrodynamic polishing process and can be used for all polishing method. A preliminary mathematical model that was proposed to explain the ultimate surface roughness proceedings and a series of experiments was planed to verify suitable of this model.
Starting with the rule for ultimate surface roughness happened. The assumption that abrasive particle at roughness peak and valley machining capability differ less than one atom, the ultimate surface roughness be attained. We can propose the mathematical model of ultimate surface roughness based on this rule and the previous study of hydrodynamic polishing process. Following by useing the computer simulation to help us exploring ultimate surface roughness characteristic and testing experiments fit for the forecasting.
Finally, we explain reasons that cause the experiment results not agree with the model anticipation and propose better lubrication condition to polish the optimum surface.

謝誌…………………………………………………………………………I
英文摘要……………………………………………………………………II
論文摘要……………………………………………………………………III
目錄…………………………………………………………………………IV
圖索引………………………………………………………………………VI
表索引………………………………………………………………………IX

第一章 緒論……………………………………………………………… 1
1.1 前言………………………………………………………………… 1
1.2 研究動機…………………………………………………………… 1
1.3 液動壓拋光法對粗度移除的相關研究…………………………… 3
1.4 研究內容簡介……………………………………………………… 5

第二章 液動壓拋光法加工理論回顧……………………………………7
2.1 液動壓拋光法的加工機制……………………………… 7
2.2 非接觸狀態下的加工率特性……………………………10
2.3 半接觸狀態下的加工率特性………………………………………12
2.4 潤滑條件和加工率特性的關係……………………………………16

第三章 終極粗度的理論模式…………………………………………18
3.1 終極粗度的理論基礎……………………………………18
3.2 非接觸潤滑狀態下的終極粗度…………………………20
3.3 半接觸潤滑狀態下的終極粗度…………………………22
3.3.1 半接觸潤滑下非接觸部分的終極粗度…………22
3.3.2 半接觸潤滑下接觸部分的終極粗度……………………………23
3.4 影響終極粗度的因素………………………………………………26

第四章 終極粗度的特性分析……………………………………… 28
4.1 非接觸潤滑狀態下終極粗度的變化………………… 28
4.2 半接觸潤滑狀態下終極粗度的變化………………… 30
4.2.1 半接觸潤滑下的非接觸部分………………… 30
4.2.2 半接觸潤滑下的接觸部分…………………… 31
4.2.3半接觸潤滑下整體終極粗度的變化………… 33
4.3 結論……………………………………………………34
第五章 實驗結果與規劃…………………………………………… 35
5.1 實驗規劃………………………………………………………35
5.2 實驗設備………………………………………………………39
5.2.1 實驗系統簡介………………………………39
5.2.2 實驗設備及量測儀器…………………………41
5.3 實驗結果與討論…………………………………………………42
5.4 理論模式的修正…………………………………………………47

第六章 結論…………………………………………………………48

參考文獻 …………………………………………………………… 50

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